Silicon Carbide (SiC) Ib Leeg-Crystal Substrate - 10 × 10 hli Wafer
Daim duab qhia txog Silicon Carbide (SiC) substrate wafer
Txheej txheem cej luam ntawm Silicon Carbide (SiC) substrate wafer
Lub10 × 10 hli Silicon Carbide (SiC) ib leeg-siv lead ua substrate waferyog ib yam khoom siv semiconductor ua tau zoo uas tsim los rau cov khoom siv hluav taws xob thiab optoelectronic tiam tom ntej. Muaj cov thermal conductivity zoo heev, bandgap dav, thiab kev ruaj khov tshuaj zoo heev, Silicon Carbide (SiC) substrate wafer muab lub hauv paus rau cov khoom siv uas ua haujlwm tau zoo hauv qab qhov kub siab, zaus siab, thiab cov xwm txheej voltage siab. Cov substrates no raug txiav ua qhov tseeb.Cov chips plaub fab 10 × 10 hli, zoo tagnrho rau kev tshawb fawb, prototyping, thiab kev tsim khoom siv.
Txoj Cai Tsim Khoom ntawm Silicon Carbide (SiC) substrate wafer
Cov wafer silicon carbide (SiC) substrate yog tsim los ntawm Physical Vapor Transport (PVT) lossis sublimation kev loj hlob. Cov txheej txheem pib nrog cov hmoov SiC siab-purity thauj mus rau hauv lub graphite crucible. Nyob rau hauv qhov kub siab tshaj 2,000 ° C thiab ib puag ncig tswj, cov hmoov sublimates rau hauv vapor thiab rov tso rau ntawm cov noob siv lead ua tib zoo, tsim cov khoom siv lead ua loj, qhov tsis zoo-minimized ib leeg.
Thaum lub SiC boule loj hlob tuaj, nws yuav raug:
- Kev txiav cov hlau nplaum: Cov hlau txiav pob zeb diamond precision txiav cov hlau nplaum SiC rau hauv cov wafers lossis cov chips.
- Kev sib tsoo thiab kev sib tsoo: Cov nplaim raug tiaj tiaj kom tshem tawm cov cim pom thiab ua tiav qhov tuab sib xws.
- Kev Siv Tshuaj Txhuam Hniav (CMP): Ua tiav qhov tiav daim iav uas npaj txhij rau epi nrog qhov roughness qis heev.
- Kev xaiv doping: Nitrogen, txhuas, lossis boron doping tuaj yeem qhia txog kev hloov kho cov khoom hluav taws xob (n-hom lossis p-hom).
- Kev tshuaj xyuas zoo: Kev ntsuas siab heev ua kom cov wafer tiaj tus, qhov tuab sib xws, thiab qhov tsis xws luag ua tau raws li cov kev cai nruj ntawm semiconductor-qib.
Cov txheej txheem ntau kauj ruam no ua rau muaj cov chips wafer 10 × 10 hli Silicon Carbide (SiC) uas npaj txhij rau kev loj hlob epitaxial lossis kev tsim khoom siv ncaj qha.
Cov yam ntxwv ntawm cov khoom siv ntawm Silicon Carbide (SiC) substrate wafer
Cov Silicon Carbide (SiC) substrate wafer feem ntau yog ua los ntawm4H-SiC or 6H-SiCcov polytypes:
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4H-SiC:Nws muaj cov yam ntxwv ntawm kev txav mus los ntawm cov hluav taws xob siab, ua rau nws zoo tagnrho rau cov khoom siv fais fab xws li MOSFETs thiab Schottky diodes.
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6H-SiC:Muaj cov khoom tshwj xeeb rau RF thiab optoelectronic Cheebtsam.
Cov khoom tseem ceeb ntawm Silicon Carbide (SiC) substrate wafer:
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Qhov dav bandgap:~3.26 eV (4H-SiC) - ua rau muaj hluav taws xob tawg siab thiab kev poob qis.
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Kev ua tau zoo ntawm cov cua sov:3–4.9 W/cm·K – tshem tawm cua sov tau zoo, ua kom muaj kev ruaj khov hauv cov kab ke muaj zog siab.
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Qhov nyuaj:~ 9.2 ntawm Mohs scale - ua kom muaj zog thaum lub sijhawm ua thiab kev ua haujlwm ntawm lub cuab yeej.
Cov ntawv thov ntawm Silicon Carbide (SiC) substrate wafer
Qhov ua tau ntau yam ntawm Silicon Carbide (SiC) substrate wafer ua rau lawv muaj txiaj ntsig thoob plaws ntau yam lag luam:
Cov Khoom Siv Hluav Taws Xob: Lub hauv paus rau MOSFETs, IGBTs, thiab Schottky diodes siv rau hauv cov tsheb fais fab (EVs), cov khoom siv fais fab kev lag luam, thiab cov inverters zog rov ua dua tshiab.
Cov Khoom Siv RF & Microwave: Txhawb nqa cov transistors, amplifiers, thiab cov khoom siv radar rau 5G, satellite, thiab kev siv tiv thaiv.
Optoelectronics: Siv rau hauv UV LEDs, photodetectors, thiab laser diodes qhov twg UV siab transparency thiab stability yog qhov tseem ceeb.
Aerospace & Defense: Cov khoom siv txhim khu kev qha rau cov khoom siv hluav taws xob uas kub thiab muaj hluav taws xob ntau.
Cov Tsev Kawm Ntawv Tshawb Fawb & Cov Tsev Kawm Qib Siab: Zoo tagnrho rau kev kawm txog kev tshawb fawb txog cov khoom siv, kev tsim cov cuab yeej prototype, thiab kev sim cov txheej txheem epitaxial tshiab.

Cov Lus Qhia rau Silicon Carbide (SiC) substrate wafer Chips
| Vaj tse | Tus nqi |
|---|---|
| Loj | 10 hli × 10 hli plaub fab |
| Qhov tuab | 330–500 μm (kho tau) |
| Polytype | 4H-SiC los yog 6H-SiC |
| Kev Taw Qhia | C-dav hlau, tawm ntawm-axis (0°/4°) |
| Qhov Chaw Tiav | Ib sab los yog ob sab txhuam; npaj txhij siv tau |
| Cov Kev Xaiv Doping | N-hom lossis P-hom |
| Qib | Qib kev tshawb fawb lossis qib khoom siv |
Cov Lus Nug Txog Silicon Carbide (SiC) substrate wafer
Q1: Dab tsi ua rau Silicon Carbide (SiC) substrate wafer zoo dua li cov silicon wafers ib txwm muaj?
SiC muaj 10 × lub zog tawg siab dua, tiv taus cua sov zoo dua, thiab qis dua qhov poob ntawm kev hloov pauv, ua rau nws zoo tagnrho rau cov khoom siv ua haujlwm siab, muaj zog ntau uas silicon tsis tuaj yeem txhawb nqa.
Q2: Puas yog 10 × 10 hli Silicon Carbide (SiC) substrate wafer tuaj yeem muab nrog cov txheej epitaxial?
Yog. Peb muab cov khoom siv uas npaj txhij rau epi thiab tuaj yeem xa cov wafers nrog cov txheej epitaxial tshwj xeeb kom tau raws li cov khoom siv fais fab lossis cov kev xav tau tsim khoom LED.
Q3: Puas muaj qhov ntau thiab tsawg thiab cov qib doping?
Kiag li. Thaum 10 × 10 hli chips yog tus qauv rau kev tshawb fawb thiab kev kuaj cov cuab yeej, kev cai qhov ntev, tuab, thiab cov ntaub ntawv doping muaj thaum thov.
Q4: Cov wafers no ruaj khov npaum li cas hauv qhov chaw ib puag ncig hnyav?
SiC tswj tau qhov ruaj khov ntawm cov qauv thiab kev ua haujlwm hluav taws xob siab dua 600 ° C thiab nyob rau hauv qhov hluav taws xob siab, ua rau nws zoo tagnrho rau kev siv hauv aerospace thiab cov khoom siv hluav taws xob tub rog.
Txog Peb
XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.












