Silicon Carbide (SiC) Wafer Nkoj

Silicon Carbide (SiC) Wafer Boat Featured Duab

Kev Piav Qhia Luv:

Lub nkoj Silicon Carbide (SiC) wafer yog lub nkoj thauj khoom semiconductor ua los ntawm cov khoom siv SiC siab, tsim los tuav thiab thauj cov wafers thaum lub sijhawm kub siab xws li epitaxy, oxidation, diffusion, thiab annealing.

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Cov yam ntxwv

Daim duab qhia ntxaws ntxaws

Txheej txheem cej luam ntawm Quartz Iav

Nrog rau kev txhim kho sai ntawm cov khoom siv hluav taws xob semiconductors thiab cov khoom siv dav dav, cov nkoj quartz ib txwm muaj kev txwv xws li kev hloov pauv ntawm qhov kub siab, kev ua qias tuaj ntawm cov khoom me me, thiab lub neej luv luv. Cov nkoj SiC wafer, uas muaj kev ruaj khov thermal zoo dua, kev ua qias tuaj tsawg, thiab lub neej ntev dua, tab tom hloov cov nkoj quartz ntau dua thiab dhau los ua qhov kev xaiv zoo tshaj plaws hauv kev tsim khoom siv SiC.

Cov Nta Tseem Ceeb

1. Cov Khoom Siv Zoo

Ua los ntawm cov khoom siv SiC uas muaj purity siabsiab hardness thiab lub zog.
Melting point siab tshaj 2700 ° C, siab dua li quartz, ua kom ruaj khov mus sij hawm ntev hauv qhov chaw ib puag ncig hnyav.

2. Cov Khoom Siv Thermal

Kev ua kom muaj cua sov siab rau kev hloov pauv cua sov sai thiab sib xws, txo qhov kev ntxhov siab ntawm wafer.
Coefficient of thermal expansion (CTE) sib xws nrog SiC substrates, txo cov wafer bowing thiab cracking.

3. Kev Ruaj Ntseg Tshuaj

Ruaj khov nyob rau hauv qhov kub siab thiab ntau yam huab cua (H₂, N₂, Ar, NH₃, thiab lwm yam).
Kev tiv thaiv oxidation zoo heev, tiv thaiv kev lwj thiab kev tsim cov khoom me me.

4. Kev Ua Haujlwm Zoo

Qhov nto du thiab ntom ntom txo cov khoom me me thiab cov kuab paug.
Tswj tau qhov ruaj khov ntawm qhov ntev thiab lub peev xwm thauj khoom tom qab siv ntev.

5. Kev Siv Nyiaj Zoo

Lub neej ua haujlwm ntev dua 3–5 npaug dua li cov nkoj quartz.
Txo qhov zaus txij nkawm, txo qhov downtime thiab cov nqi hloov.

Cov ntawv thov

SiC EpitaxylTxhawb nqa 4-nti, 6-nti, thiab 8-nti SiC substrates thaum lub sijhawm loj hlob epitaxial kub siab.
Kev Tsim Khoom Siv Hluav Taws XobZoo tagnrho rau SiC MOSFETs, Schottky Barrier Diodes (SBDs), IGBTs, thiab lwm yam khoom siv.
Kev Kho Mob KubCov txheej txheem annealing, nitridation, thiab carbonization.
Kev Oxidation & Diffusion: Lub platform txhawb nqa wafer ruaj khov rau kev ua kom sov thiab diffusion.

Cov Lus Qhia Txog Kev Siv

Khoom	Cov Lus Qhia Tshwj Xeeb
Khoom siv	Silicon Carbide (SiC) uas muaj kev ntshiab siab
Qhov Loj ntawm Wafer	4-nti / 6-nti / 8-nti (kho tau)
Max Kev Ua Haujlwm Temp.	≤ 1800 ° C
Kev nthuav dav ntawm Thermal CTE	4.2 × 10⁻⁶ /K (ze rau SiC substrate)
Kev Ua Kub	120–200 W/m·K
Qhov Roughness ntawm qhov chaw	Ra < 0.2 μm
Kev sib luag	±0.1 hli
Lub Neej Pabcuam	≥ 3 × ntev dua li cov nkoj quartz

Kev Sib Piv: Quartz Boat vs. SiC Boat

Qhov Loj	Quartz Nkoj	SiC Nkoj
Kev Tiv Thaiv Kub	≤ 1200 ° C, deformation ntawm qhov kub siab.	≤ 1800 ° C, ruaj khov
Kev Sib Tw CTE nrog SiC	Kev tsis sib xws loj, kev pheej hmoo ntawm kev ntxhov siab wafer	Sib phim ze, txo cov wafer tawg
Kev Ua Paug Rau Cov Khoom Me Me	Siab, tsim cov khoom tsis huv	Qhov chaw qis, du thiab ntom
Lub Neej Pabcuam	Hloov pauv luv luv, nquag	Ntev, 3–5 × lub neej ntev dua
Cov Txheej Txheem Tsim Nyog	Ib txwm muaj Si epitaxy	Optimized rau SiC epitaxy & cov khoom siv fais fab

Cov Lus Nug Feem Ntau - Silicon Carbide (SiC) Wafer Boats

1. Lub nkoj SiC wafer yog dab tsi?

Lub nkoj SiC wafer yog lub nkoj semiconductor ua los ntawm cov silicon carbide uas muaj purity siab. Nws yog siv los tuav thiab thauj cov wafers thaum lub sijhawm kub siab xws li epitaxy, oxidation, diffusion, thiab annealing. Piv rau cov nkoj quartz ib txwm muaj, cov nkoj SiC wafer muaj kev ruaj khov thermal zoo dua, qis dua kev ua qias tuaj, thiab lub neej ua haujlwm ntev dua.

2. Vim li cas ho xaiv SiC wafer nkoj dua li quartz nkoj?

Kev tiv thaiv kub duaRuaj khov txog li 1800 ° C piv rau quartz (≤1200 ° C).
Kev sib tw CTE zoo dua: Nyob ze rau SiC substrates, txo qhov kev ntxhov siab ntawm wafer thiab kev tawg.
Tsawg dua cov khoom me me: Qhov chaw du thiab ntom ntom txo cov kuab paug.
Lub neej ntev dua: ntev dua li cov nkoj quartz 3–5 npaug, txo tus nqi ntawm kev muaj.

3. Cov nkoj SiC wafer tuaj yeem txhawb nqa cov wafer loj npaum li cas?

Peb muab cov qauv tsim qauv rau4-nti, 6-nti, thiab 8-ntiwafers, nrog rau kev hloov kho tag nrho kom tau raws li cov neeg siv khoom xav tau.

4. Cov nkoj SiC wafer feem ntau siv rau hauv cov txheej txheem twg?

Kev loj hlob ntawm SiC epitaxial
Kev tsim cov khoom siv semiconductor fais fab (SiC MOSFETs, SBDs, IGBTs)
Kev kub siab annealing, nitridation, thiab carbonization
Cov txheej txheem oxidation thiab diffusion

Txog Peb

XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.