Silicon / Silicon Carbide (SiC) Wafer Plaub-Theem Txuas Polishing Automation Line (Integrated Post-Polish Handling Line)

Kev Piav Qhia Luv:

Kab Tshuab Ua Polishing Automation Plaub-Theem no yog ib qho kev daws teeb meem sib xyaw ua ke, tsim los rautom qab txhuam / tom qab CMPkev ua haujlwm ntawmsiliconthiabsilicon carbide (SiC)cov ncuav qab zib. Ua nyob ib puag ncigcov tais diav ua los ntawm cov khoom siv ceramic (cov tais diav ua los ntawm cov khoom siv ceramic), lub kaw lus muab ntau yam haujlwm txuas ntxiv ua ke rau hauv ib txoj kab sib koom tes—pab cov fabs txo kev siv tes, tswj lub sijhawm siv, thiab txhawb kev tswj hwm kev ua qias tuaj.

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Cov yam ntxwv

Daim duab qhia ntxaws ntxaws

Silicon / Silicon Carbide (SiC) Wafer Plaub-Theem Txuas Polishing Automation Line (Integrated Post-Polish Handling Line)4

Txheej txheem cej luam

Hauv kev tsim khoom semiconductor,Kev ntxuav tom qab CMP zootau lees paub dav dav tias yog ib kauj ruam tseem ceeb los txo cov teeb meem ua ntej cov txheej txheem tom ntej, thiab cov txheej txheem siab heev (suav nrogkev ntxuav megasonic) feem ntau raug tham txog rau kev txhim kho kev ua haujlwm tshem tawm cov khoom me me.

Rau SiC, nws tshwj xeebkev nyuaj siab thiab kev tsis muaj zog ntawm tshuaj lom neegua rau kev txhuam hniav nyuaj (feem ntau cuam tshuam nrog qhov nrawm tshem tawm cov khoom tsawg thiab muaj kev pheej hmoo siab dua ntawm kev puas tsuaj rau saum npoo / hauv qab), uas ua rau kev ua haujlwm ruaj khov tom qab txhuam hniav thiab kev tswj hwm kev ntxuav / kev tuav pov hwm tshwj xeeb tshaj yog muaj txiaj ntsig zoo.

Silicon / Silicon Carbide (SiC) Wafer Plaub-Theem Txuas Polishing Automation Line (Integrated Post-Polish Handling Line)5

Silicon / Silicon Carbide (SiC) Wafer Plaub-Theem Txuas Polishing Automation Line (Integrated Post-Polish Handling Line)2

Cov Txiaj Ntsig Tseem Ceeb

Ib txoj kab sib txuas ua ke uas txhawb nqa:

Kev sib cais thiab sau cov wafer(tom qab polishing)
Cov khoom siv ceramic buffering / cia khoom
Kev ntxuav cov khoom siv ceramic
Wafer mounting (pasting) rau ntawm cov khoom siv ceramic
Kev ua haujlwm ib kab sib koom ua ke rauCov ntawv ci 6-8 nti

Cov Lus Qhia Txog Kev Siv (Los ntawm Cov Ntaub Ntawv Muab)

Qhov Loj ntawm Cov Khoom Siv (L × W × H):13643 × 5030 × 2300 hli
Kev Muab Fais Fab:AC 380 V, 50 Hz
Tag Nrho Lub Hwj Chim:119 kW
Kev Ntxuav ntawm Kev Teeb Tsa:0.5 μm < 50 ib qho; 5 μm < 1 ib qho
Kev Teeb Tsa:≤ 2 μm

Cov Ntaub Ntawv Siv Tau (Los ntawm Cov Ntaub Ntawv Muab)

Qhov Loj ntawm Cov Khoom Siv (L × W × H):13643 × 5030 × 2300 hli
Kev Muab Fais Fab:AC 380 V, 50 Hz
Tag Nrho Lub Hwj Chim:119 kW
Kev Ntxuav ntawm Kev Teeb Tsa:0.5 μm < 50 ib qho; 5 μm < 1 ib qho
Kev Teeb Tsa:≤ 2 μm

Cov Kab Ntsig Ib Txwm Muaj

Infeed / interface los ntawm thaj chaw polishing upstream
Kev sib cais thiab sau cov wafer
Kev khaws cia/kev khaws cia ntawm cov khoom siv ceramic (kev sib cais lub sijhawm takt)
Kev ntxuav cov khoom siv ceramic
Wafer mounting rau ntawm cov neeg nqa khoom (nrog kev huv thiab kev tswj qhov tiaj tus)
Xa mus rau cov txheej txheem downstream lossis logistics

Cov Lus Nug Feem Ntau

Q1: Cov kab no feem ntau daws cov teeb meem dab tsi?
A: Nws ua kom cov haujlwm tom qab txhuam los ntawm kev sib koom ua ke ntawm kev sib cais / sau wafer, kev sib txuas ntawm cov khoom siv ceramic, kev ntxuav cov khoom siv, thiab kev teeb tsa wafer rau hauv ib kab sib koom ua ke - txo cov ntsiab lus kov tes thiab tswj kev ua haujlwm ntau lawm.

Q2: Cov ntaub ntawv wafer thiab qhov loj me twg tau txais kev txhawb nqa?
Ib:Silicon thiab SiC,6–8 nticov wafers (raws li cov spec uas tau muab).

Q3: Vim li cas kev ntxuav tom qab CMP thiaj li tseem ceeb hauv kev lag luam?
A: Cov ntaub ntawv hauv kev lag luam qhia tias qhov kev thov rau kev ntxuav tom qab CMP tau loj hlob los txo qhov tsis zoo ua ntej kauj ruam tom ntej; cov txheej txheem raws li megasonic feem ntau raug kawm rau kev txhim kho kev tshem tawm cov khoom me me.

Txog Peb

XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.