Cov txheej txheem TVG ntawm quartz sapphire BF33 wafer Iav wafer xuas nrig ntaus

Cov txiaj ntsig ntawm TGV (Through Glass Via) feem ntau pom tseeb hauv:

1) Cov yam ntxwv hluav taws xob zoo heev. Cov khoom siv iav yog cov khoom siv rwb thaiv tsev, qhov dielectric tas li tsuas yog li 1/3 ntawm cov khoom siv silicon, qhov poob factor yog 2-3 qhov kev txiav txim ntawm qhov loj dua li cov khoom siv silicon, ua rau qhov poob ntawm substrate thiab cov teebmeem parasitic raug txo kom ntseeg tau tias qhov kev ncaj ncees ntawm cov teeb liab xa mus;

(2) Cov iav loj thiab nyias heev yooj yim tau txais. Peb tuaj yeem muab Sapphire, Quartz, Corning, thiab SCHOTT thiab lwm cov chaw tsim khoom iav tuaj yeem muab cov iav loj heev (> 2m × 2m) thiab ultra-thin (<50µm) vaj huam sib luag iav thiab cov ntaub ntawv iav nyias nyias.

3) Tus nqi qis. Tau txais txiaj ntsig los ntawm kev nkag mus rau cov iav loj ultra-thin vaj huam sib luag, thiab tsis tas yuav tsum muaj cov txheej insulating, tus nqi tsim khoom ntawm cov iav adapter phaj tsuas yog li 1/8 ntawm cov silicon-based adapter phaj;

4) Cov txheej txheem yooj yim. Tsis tas yuav tso ib txheej rwb thaiv tsev rau ntawm qhov chaw substrate thiab phab ntsa sab hauv ntawm TGV (Through Glass Via), thiab tsis tas yuav ua kom nyias nyias rau hauv lub phaj adapter ultra-thin;

(5) Muaj zog ruaj khov. Txawm tias thaum lub thickness ntawm lub adapter phaj tsawg dua 100µm, qhov warpage tseem me me;

6) Ntau yam kev siv. Ntxiv rau qhov muaj kev cia siab zoo hauv kev siv ntau zaus, ua cov khoom siv pob tshab, kuj tseem siv tau hauv kev sib koom ua ke ntawm optoelectronic system, airtightness thiab corrosion resistance zoo ua rau lub iav substrate hauv MEMS encapsulation muaj peev xwm zoo.

Tam sim no, peb lub tuam txhab muab TGV (Through Glass Via) iav los ntawm kev siv tshuab, tuaj yeem npaj cov txheej txheem ntawm cov khoom xa tuaj thiab muab cov khoom ncaj qha. Peb tuaj yeem muab Sapphire, Quartz, Corning, thiab SCHOTT, BF33 thiab lwm yam iav. Yog tias koj muaj kev xav tau, koj tuaj yeem tiv tauj peb ncaj qha txhua lub sijhawm! Txais tos nug!