Ultra-Precision SiC Air-Bearing Theem

Ultra-Precision SiC Air-Bearing Stage Featured duab

Lus piav qhia luv luv:

Nrog rau kev hloov pauv tas mus li ntawm kev lag luam semiconductor, kev ua thiab tshuaj xyuas cov khoom xav tau kev ua haujlwm siab dua. Tsim kom muaj kev txawj ntse nyob rau hauv kev tswj cov lus tsa suab thiab nanometer-theem positioning, peb tau tsim ib tug planar H-hom dual-axis ultra-precision cua-cov kabmob theem.

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Daim duab qhia ntxaws

Txheej txheem cej luam

Engineered nrog ib tug finite-element-optimized silicon carbide (SiC) ceramic qauv thiab compensated air-bearing technology, lub theem muab zoo heev raug, rigidity, thiab dynamic teb. Nws yog qhov zoo tagnrho rau:

Semiconductor ua thiab tshuaj xyuas
Micro/nano fabrication thiab metrology
Nanometer-scale ya-txiav thiab polishing
High-speed precision scanning

Cov yam ntxwv tseem ceeb

SiC air-bearing guidewayrau ultra-siab nruj thiab precision
Siab dynamics: ceev mus txog 1 m / s, acceleration mus txog 4 g, ceev ceev
Dual-tsav gantry Y-axisua kom muaj peev xwm thauj khoom siab thiab ruaj khov
Kev xaiv encoder: optical grating lossis laser interferometer
Positioning raug± 0.15 hli;repeatabilityUa haujlwm siab: ± 75nm
Optimized cable routingrau kev tsim qauv huv thiab kev ntseeg tau ntev
Customizable configurationsrau daim ntawv thov tshwj xeeb xav tau

Ultra-Precision Design & Direct-Drive, Non-Contact Architecture

SiC Ceramic Ncej: ~ 5 × qhov nruj ntawm aluminium alloy thiab ~ 5 × qis thermal expansion, kom ntseeg tau siab ceev stability thiab thermal robustness.
Compensated Cua-Bearing: Proprietary tsim txhim khu kev nruj, load peev xwm, thiab motion stability.
Dynamic Performance: Txhawb 1 m / s tshaj tawm thiab 4 g acceleration, zoo tagnrho rau cov txheej txheem high-throughput.
Seamless kev koom ua ke: Tau tshaj cov kev co kev sib cais, cov theem teb, qaij modules, thiab wafer tuav platforms.
Cable Management: Tswj lub vojvoog dabtsi yog khoov txo qis kev ntxhov siab rau kev pab cuam lub neej ntev.

Coreless Linear Tsav: Smooth txav nrog xoom cogging quab yuam.
Multi-Motor Tsav: Load-plane motor placement txhim kho qhov ncaj, flatness, thiab angular precision.
Thermal Isolation: Cov motors raug cais tawm ntawm cov qauv theem; xaiv huab cua los yog dej txias rau kev ua haujlwm siab.

Specifications

Qauv	400-400	500-500	600-600
Axes	X (scan) / Y (theem)	X (scan) / Y (theem)	X (scan) / Y (theem)
Taug kev (mm)	400/400	500/500	600/600
Qhov tseeb (μm)	± 0.15	± 0.2	± 0.2
Repeatability (nm)	± 75	± 100	± 100
Kev daws teeb meem (nm)	0.3	0.3	0.3
Max ceev (m / s)	1	1	1
Acceleration (g)	4	4	4
Ncaj (μm)	± 0.2	± 0.3	± 0.4
Kev ruaj ntseg (nm)	± 5	± 5	± 5
Qhov hnyav (kg)	20	20	20
Pitch / Yob / Yaw (arc-sec)	± 1	± 1	± 1

Kev Xeem Xeem:

Cua muab: huv, qhuav; dew point ≤ 0 ° F; particle filtration ≤ 0.25 μm; los yog 99.99% nitrogen.
Qhov tseeb ntsuas 25 hli saum theem nruab nrab ntawm 20 ± 1 ° C, 40-60% RH.

Daim ntawv thov

Semiconductor lithography, tshuaj xyuas, thiab wafer tuav
Micro/nano fabrication thiab precision metrology
High-end optics manufacturing thiab interferometry
Aerospace thiab kev tshawb fawb qib siab

FAQ - Silicon Carbide Air-Bearing Stage

1. Dab tsi yog qhov cua-cov kabmob theem?

Lub tshuab cua-txheej txheem theem siv cov yeeb yaj kiab nyias ntawm cov cua siab ntawm theem thiab cov kev taw qhia los muabTsis muaj kev sib txhuam, hnav-dawb, thiab ultra-smooth motion. Tsis zoo li cov khoom siv sib xyaw ua ke, nws tshem tawm cov nplaum nplaum, xa cov nanometer-theem raug, thiab txhawb kev ntseeg tau ntev.

2. Vim li cas thiaj siv silicon carbide (SiC) rau cov qauv theem?

Siab tawv: ~ 5 × uas ntawm aluminium alloy, txo deformation thaum lub sij hawm dynamic.
Tsawg thermal expansion: ~ 5 × qis dua aluminium, tswj qhov tseeb raws li qhov kub thiab txias.
Lub teeb: Tsawg ntom piv rau cov hlau, ua kom muaj kev kub ceev thiab kev ua haujlwm siab.
Zoo heev stability: Superior damping thiab rigidity rau ultra-precision positioning.

3. Puas yog theem yuav tsum tau lubrication los yog tu?

Tsis muaj ib txwm lubrication xav tau txij li thaum muajtsis muaj kev sib cuag txhua yam. Kev saib xyuas pom zoo suav nrog:

Kev muab khoomhuv, qhuav compressed cua los yog nitrogen
Kev tshuaj xyuas ib ntus ntawm cov lim dej thiab tshuab ziab khaub ncaws
Saib xyuas cov kab hluav taws xob thiab cov tshuab cua txias

4. Dab tsi yog qhov yuav tsum tau ua ntawm huab cua?

Dew point: ≤ 0 ° F (≈ -18 ° C)
Particle filtration: ≤ 0.25 μm
Ntxuav, qhuav cua los yog 99.99% ntshiab nitrogen
Lub siab ruaj khov nrog kev hloov pauv tsawg

Txog Peb

XKH tshwj xeeb hauv kev tsim cov thev naus laus zis, tsim khoom, thiab muag cov iav tshwj xeeb kho qhov muag thiab cov ntaub ntawv siv lead ua tshiab. Peb cov khoom siv kho qhov muag khoom siv hluav taws xob, khoom siv hluav taws xob, thiab tub rog. Peb muab Sapphire optical Cheebtsam, xov tooj ntawm tes lens npog, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor siv lead ua wafers. Nrog cov kws tshaj lij thiab cov cuab yeej siv niaj hnub, peb ua tau zoo hauv kev ua cov khoom lag luam uas tsis yog tus qauv, aiming los ua ib qho khoom siv optoelectronic high-tech enterprise.