Ultra-Precision SiC Air-Bearing Stage

Duab Qhia Txog Theem Uas Muaj Kev Ntsuas Siab Tshaj Plaws SiC

Kev Piav Qhia Luv:

Nrog rau kev hloov pauv tas mus li ntawm kev lag luam semiconductor, cov khoom siv ua thiab tshuaj xyuas xav tau kev ua haujlwm siab dua. Los ntawm kev paub txog kev tswj kev txav mus los thiab kev teeb tsa qib nanometer, peb tau tsim ib theem planar H-type dual-axis ultra-precision air-bearing.

Xa email rau peb

Cov yam ntxwv

Daim duab qhia ntxaws ntxaws

Txheej txheem cej luam

Tsim los ntawm kev siv cov qauv ceramic finite-element-optimized silicon carbide (SiC) thiab cov thev naus laus zis compensated air-bearing, lub theem muab kev raug zoo, rigidity, thiab dynamic response. Nws yog qhov zoo tshaj plaws rau:

Kev ua thiab kev tshuaj xyuas semiconductor
Kev tsim khoom metrology thiab micro/nano
Kev txiav thiab txhuam hniav raws li qhov ntsuas nanometer
Kev ntsuas ceev ceev precision

Cov Nta Tseem Ceeb

SiC cua-bearing guidewayrau qhov siab heev thiab qhov tseeb
Kev ua haujlwm siabKev nrawm: txog li 1 m/s, kev nrawm txog li 4 g, kev sib sau ua ke sai
Ob chav tsav gantry Y-axisua kom muaj peev xwm thauj khoom siab thiab ruaj khov
Cov kev xaiv encoderCov khoom siv: optical grating lossis laser interferometer
Qhov tseeb ntawm qhov chaw: ±0.15 μm;rov ua dua±75 nm
Optimized cable routingrau kev tsim qauv huv si thiab kev ntseeg siab mus sij hawm ntev
Kev teeb tsa kho taurau cov kev xav tau tshwj xeeb ntawm daim ntawv thov

Tsim Qauv Ultra-Precision & Direct-Drive, Tsis Sib Cuag Architecture

SiC Ceramic Ncej: ~ 5 × qhov tawv ntawm txhuas alloy thiab ~ 5 × qis dua thermal nthuav dav, ua kom muaj kev ruaj khov ceev thiab thermal robustness.
Kev Them Nyiaj Rau Cua: Kev tsim tshwj xeeb ua rau muaj kev ruaj khov, muaj peev xwm thauj khoom, thiab kev ruaj khov ntawm kev txav mus los.
Kev Ua Tau ZooTxhawb nqa 1 m/s qhov ceev thiab 4 g kev nrawm, zoo tagnrho rau cov txheej txheem siab.
Kev Sib Koom Tes Tsis Muaj Kev Sib Txuas: Sib xws nrog cov tshuab cais kev co, cov theem tig, cov modules tilt, thiab cov platforms tuav wafer.
Kev Tswj Xyuas Cable: Kev tswj hwm qhov khoov vojvoog txo qis kev ntxhov siab rau lub neej ua haujlwm ntev.

Lub Cev Muaj Zog Tsis Muaj Coreline: Kev txav mus los du nrog tsis muaj zog cogging.
Kev Tsav Tsheb Ntau Lub Cev Muaj Zog: Qhov chaw tso lub cev muaj zog ntawm lub dav hlau thauj khoom txhim kho qhov ncaj, qhov tiaj tiaj, thiab qhov tseeb ntawm lub kaum sab xis.
Kev Rho Tawm Kub: Cov cav tau cais tawm ntawm cov qauv theem; xaiv tau cua lossis dej txias rau cov voj voog ua haujlwm siab.

Cov Lus Qhia Tshwj Xeeb

Qauv	400-400	500-500	600-600
Cov Axes	X (luam theej) / Y (kauj ruam)	X (luam theej) / Y (kauj ruam)	X (luam theej) / Y (kauj ruam)
Kev Mus Ncig (hli)	400 / 400	500 / 500	600 / 600
Qhov tseeb (μm)	±0.15	±0.2	±0.2
Rov ua dua (nm)	±75	±100	±100
Kev daws teeb meem (nm)	0.3	0.3	0.3
Qhov Ceev Tshaj Plaws (m/s)	1	1	1
Kev nrawm (g)	4	4	4
Kev Ncaj Ncees (μm)	±0.2	±0.3	±0.4
Kev ruaj khov (nm)	±5	±5	±5
Qhov Siab Tshaj Plaws (kg)	20	20	20
Suab/Yob/Yaw (arc-sec)	±1	±1	±1

Cov Kev Cai Xeem:

Kev muab cua: huv, qhuav; dew point ≤ 0°F; kev lim cov khoom me me ≤ 0.25 μm; lossis 99.99% nitrogen.
Qhov tseeb ntsuas tau 25 hli saum toj ntawm qhov chaw nruab nrab ntawm 20±1 °C, 40–60% RH.

Cov ntawv thov

Kev siv tshuab luam ntawv semiconductor, kev tshuaj xyuas, thiab kev tuav cov wafer
Kev tsim khoom me me / nano thiab kev ntsuas qhov tseeb
Kev tsim khoom siv optics siab heev thiab kev cuam tshuam
Kev tshawb fawb txog aerospace thiab kev tshawb fawb siab heev

Cov Lus Nug Feem Ntau - Silicon Carbide Air-Bearing Stage

1. Lub theem cua yog dab tsi?

Ib theem uas muaj cua siv ib daim nyias nyias ntawm cov cua uas muaj siab nyob nruab nrab ntawm theem thiab txoj kev qhia kom muabtsis muaj kev sib txhuam, tsis hnav, thiab kev txav mus los du heevTsis zoo li cov khoom siv kho tshuab ib txwm muaj, nws tshem tawm qhov stick-slip, xa cov nanometer-level precision, thiab txhawb kev ntseeg siab mus sij hawm ntev.

2. Vim li cas ho siv silicon carbide (SiC) rau cov qauv theem?

Siab tawv: ~ 5 × ntawm cov hlau txhuas, txo qhov deformation thaum lub sijhawm txav mus los.
Kev nthuav dav thermal qis: ~ 5 × qis dua li txhuas, tswj tau qhov tseeb nyob rau hauv qhov kub thiab txias sib txawv.
Sib dua: Qhov ceev qis dua piv rau hlau, ua rau muaj kev ua haujlwm ceev thiab kev nrawm siab.
Kev ruaj khov zoo heev: Kev co thiab kev nruj zoo tshaj plaws rau kev tso qhov chaw siab heev.

3. Lub theem puas xav tau lubrication lossis kev txij nkawm?

Tsis tas yuav siv lubrication ib txwm vim tias muajtsis muaj kev sib cuag nrog tshuabCov kev saib xyuas pom zoo suav nrog:

Kev Muab Khoomcua huv, qhuav compressed los yog nitrogen
Kev tshuaj xyuas cov lim dej thiab cov tshuab ziab khaub ncaws tsis tu ncua
Kev saib xyuas cov cables thiab cov tshuab cua txias

4. Cov kev cai rau kev muab cua yog dab tsi?

Cov dej noo: ≤ 0 °F (≈ –18 °C)
Kev lim dej me me: ≤ 0.25 μm
Huab cua huv, qhuav los yog 99.99% nitrogen ntshiab
Ruaj khov siab nrog qhov hloov pauv tsawg kawg nkaus

Txog Peb

XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.