Wafer Orientation System rau Crystal Orientation Measurement
Kev Taw Qhia Txog Khoom Siv
Cov cuab yeej taw qhia wafer yog cov khoom siv precision raws li X-ray diffraction (XRD) cov ntsiab cai, feem ntau yog siv rau hauv kev tsim khoom semiconductor, cov ntaub ntawv kho qhov muag, ceramics, thiab lwm yam kev lag luam khoom siv crystalline.
Cov cuab yeej no txiav txim siab qhov kev taw qhia ntawm cov siv lead ua ke thiab coj cov txheej txheem txiav lossis txhuam kom raug. Cov yam ntxwv tseem ceeb suav nrog:
- Kev ntsuas siab precision:Muaj peev xwm daws teeb meem crystallographic dav hlau nrog cov kev daws teeb meem angular txog li 0.001 °.
- Kev sib xws ntawm cov qauv loj:Txhawb nqa cov wafers txog li 450 hli hauv txoj kab uas hla thiab qhov hnyav ntawm 30 kg, tsim rau cov ntaub ntawv xws li silicon carbide (SiC), sapphire, thiab silicon (Si).
- Kev tsim qauv modular:Cov kev ua haujlwm uas nthuav dav suav nrog kev tsom xam cov kab nkhaus, 3D qhov tsis xws luag ntawm qhov chaw, thiab cov khoom siv stacking rau kev ua ntau yam qauv.
Cov Txheej Txheem Tseem Ceeb
| Pawg Parameter | Cov Nqi/Kev Teeb Tsa Ib Txwm Muaj |
| Qhov chaw ntawm X-ray | Cu-Kα (0.4 × 1 hli qhov chaw tsom), 30 kV qhov hluav taws xob nrawm, 0–5 mA qhov hluav taws xob hloov kho tau |
| Lub kaum sab xis | θ: -10° txog +50°; 2θ: -10° txog +100° |
| Kev tseeb | Kev daws teeb meem ntawm lub kaum sab xis: 0.001°, kev kuaj pom qhov tsis zoo ntawm qhov chaw: ±30 arcseconds (kab nkhaus co) |
| Kev ceev ntawm kev luam theej duab | Omega scan ua tiav tag nrho cov kev taw qhia lattice hauv 5 vib nas this; Theta scan siv sijhawm ~ 1 feeb |
| Qauv theem | V-groove, pneumatic suction, multi-angle rotation, sib xws nrog 2–8-nti wafers |
| Cov Haujlwm Uas Nthuav Tau | Kev tshuaj xyuas cov kab nkhaus co, 3D mapping, stacking device, optical detection (khawb, GBs) |
Txoj Cai Ua Haujlwm
1. Lub hauv paus ntawm X-ray Diffraction
- Cov duab xoo hluav taws xob sib cuam tshuam nrog cov nuclei atomic thiab electrons hauv cov crystal lattice, tsim cov qauv diffraction. Txoj Cai Bragg (nλ = 2d sinθ) tswj hwm kev sib raug zoo ntawm cov kaum sab xis diffraction (θ) thiab qhov sib nrug ntawm lattice (d).
Cov cuab yeej ntes tau cov qauv no, uas raug tshuaj xyuas kom rov tsim cov qauv crystallographic.
2. Kev Siv Tshuab Omega Scanning
- Lub siv lead ua tig tas li ib ncig ntawm ib txoj kab ruaj khov thaum X-rays ci ntsa iab rau nws.
- Cov cuab yeej ntes tau sau cov teeb liab diffraction hla ntau lub dav hlau crystallographic, ua rau kev txiav txim siab tag nrho cov kev taw qhia lattice hauv 5 vib nas this.
3. Kev Tshuaj Xyuas Qhov Coov Ntawm Qhov
- Kho lub kaum sab xis siv lead ua ke nrog cov kaum sab xis X-ray sib txawv los ntsuas qhov dav ntawm lub ncov (FWHM), ntsuas qhov tsis zoo ntawm cov lattice thiab kev ntxhov siab.
4. Kev Tswj Xyuas Tsis Siv Neeg
- PLC thiab touchscreen interfaces ua rau muaj kev txiav ua ntej, kev tawm tswv yim tiag tiag, thiab kev koom ua ke nrog cov tshuab txiav rau kev tswj hwm kaw-voj.
Cov txiaj ntsig thiab cov yam ntxwv
1. Kev Ua Tau Zoo thiab Kev Ua Haujlwm Zoo
- Qhov tseeb ntawm lub kaum sab xis ± 0.001 °, qhov kev daws teeb meem nrhiav qhov tsis zoo <30 arcseconds.
- Qhov ceev ntawm Omega scan yog 200 × sai dua li cov Theta scans ib txwm muaj.
2. Kev hloov kho thiab kev nthuav dav
- Nthuav dav rau cov ntawv thov tshwj xeeb (piv txwv li, SiC wafers, turbine blades).
- Sib koom ua ke nrog MES systems rau kev saib xyuas kev tsim khoom tiag tiag.
3. Kev Sib Haum Xeeb thiab Kev Ruaj Ntseg
- Haum rau cov qauv kuaj uas tsis sib xws (piv txwv li, cov pob zeb sapphire tawg).
- Kev tsim cua txias txo cov kev xav tau txij nkawm.
4. Kev Ua Haujlwm Txawj Ntse
- Kev kho kom raug ib zaug nias thiab ua ntau yam haujlwm.
- Kev ntsuas tus kheej nrog cov siv lead ua siv los txo qhov yuam kev ntawm tib neeg.
Cov ntawv thov
1. Kev Tsim Khoom Siv Semiconductor
- Kev taw qhia ntawm kev txiav wafer: Txheeb xyuas qhov kev taw qhia ntawm Si, SiC, GaN wafer rau kev txiav kom zoo tshaj plaws.
- Kev kos duab qhov tsis zoo: Txheeb xyuas cov khawb lossis qhov tawg ntawm qhov chaw kom txhim kho cov khoom tawg.
2. Cov Khoom Siv Kho Qhov Muag
- Cov siv lead ua nonlinear (piv txwv li, LBO, BBO) rau cov khoom siv laser.
- Sapphire wafer siv rau qhov chaw cim rau LED substrates.
3. Cov Khoom Siv Ua Los Ntawm Av nplaum thiab Cov Khoom Sib Xyaws
- Tshuaj xyuas qhov kev taw qhia ntawm cov noob hauv Si3N4 thiab ZrO2 rau cov ntawv thov kub siab.
4. Kev Tshawb Fawb thiab Kev Tswj Xyuas Zoo
- Cov tsev kawm qib siab/chaw kuaj mob rau kev tsim cov khoom siv tshiab (piv txwv li, cov hlau nplaum siab).
- Kev Ua Haujlwm QC kom ntseeg tau tias muaj kev sib xws.
Cov Kev Pabcuam ntawm XKH
XKH muab kev pab txhawb nqa rau cov cuab yeej siv wafer orientation, suav nrog kev teeb tsa, kev ua kom zoo dua qub, kev tshuaj xyuas cov kab nkhaus, thiab kev kos duab 3D qhov tsis xws luag ntawm qhov chaw. Cov kev daws teeb meem tshwj xeeb (piv txwv li, thev naus laus zis ingot stacking) tau muab los txhim kho kev ua haujlwm ntawm semiconductor thiab optical khoom ntau dua 30%. Ib pab neeg mob siab rau kev cob qhia hauv qhov chaw, thaum kev txhawb nqa 24/7 thiab kev hloov khoom seem sai sai ua kom ntseeg tau tias cov khoom siv ntseeg tau.
