Cov Txheej Txheem Txheej Txheem ntawm Monocrystalline Silicon Growth Methods

Cov Txheej Txheem Txheej Txheem ntawm Monocrystalline Silicon Growth Methods

1. Keeb kwm ntawm Monocrystalline Silicon Development

Kev nce qib ntawm kev siv thev naus laus zis thiab kev xav tau loj hlob rau cov khoom siv ntse ntse tau ua kom muaj zog ntxiv rau txoj haujlwm tseem ceeb ntawm kev lag luam kev sib koom ua ke (IC) hauv kev txhim kho hauv lub tebchaws. Raws li lub hauv paus ntawm IC kev lag luam, semiconductor monocrystalline silicon plays lub luag haujlwm tseem ceeb hauv kev tsav tsheb thev naus laus zis thiab kev loj hlob ntawm kev lag luam.

Raws li cov ntaub ntawv los ntawm International Semiconductor Industry Association, lub lag luam thoob ntiaj teb semiconductor wafer tau mus txog qhov muag ntawm $ 12.6 billion, nrog rau kev xa khoom loj hlob mus rau 14.2 billion square inches. Ntxiv mus, qhov kev thov rau silicon wafers tseem nce tsis tu ncua.

Txawm li cas los xij, kev lag luam thoob ntiaj teb silicon wafer yog qhov muaj zog heev, nrog rau tsib tus neeg muag khoom sab saum toj tau tuav ntau dua 85% ntawm kev ua lag luam, raws li qhia hauv qab no:

• Shin-Etsu Chemical (Nyiv)

• SUMCO (Japan)

• Ntiaj teb no Wafers

• Siltronic (Lub teb chaws Yelemees)

• SK Siltron (South Kauslim)

Qhov no oligopoly ua rau Tuam Tshoj qhov hnyav dependence rau imported monocrystalline silicon wafers, uas tau dhau los ua ib qho tseem ceeb fwj txwv tsis pub txoj kev loj hlob ntawm lub teb chaws kev lag luam kev lag luam.

Txhawm rau kov yeej cov kev cov nyom tam sim no hauv semiconductor silicon monocrystal manufacturing sector, kev nqis peev hauv kev tshawb fawb thiab kev tsim kho thiab ntxiv dag zog rau kev tsim khoom hauv tsev yog qhov kev xaiv tsis raug.

2. Txheej txheem cej luam ntawm Monocrystalline Silicon khoom

Monocrystalline silicon yog lub hauv paus ntawm kev lag luam hauv kev lag luam. Txog niaj hnub no, ntau dua 90% ntawm IC chips thiab cov khoom siv hluav taws xob tau tsim los siv monocrystalline silicon ua cov khoom tseem ceeb. Kev thov dav dav rau monocrystalline silicon thiab nws cov ntawv thov kev lag luam sib txawv tuaj yeem raug ntaus nqi rau ntau yam:

1. Kev nyab xeeb thiab Environmentally Friendly: Silicon muaj ntau nyob rau hauv lub ntiaj teb crust, tsis muaj tshuaj lom, thiab ib puag ncig tus phooj ywg.

2. Hluav taws xob rwb thaiv tsev: Silicon ib txwm nthuav tawm cov khoom hluav taws xob rwb thaiv tsev, thiab thaum kho cua sov, nws tsim cov txheej txheem tiv thaiv ntawm silicon dioxide, uas tiv thaiv kom tsis txhob poob ntawm hluav taws xob.

3. Mature Loj hlob Technology: Cov keeb kwm ntev ntawm kev tsim kho thev naus laus zis hauv cov txheej txheem kev loj hlob ntawm silicon tau ua rau nws zoo dua li lwm yam khoom siv semiconductor.

Cov yam tseem ceeb no ua ke kom monocrystalline silicon nyob rau hauv pem hauv ntej ntawm kev lag luam, ua rau nws irreplaceable los ntawm lwm yam ntaub ntawv.

Nyob rau hauv cov nqe lus ntawm cov qauv siv lead ua, monocrystalline silicon yog cov khoom tsim los ntawm silicon atoms teem nyob rau hauv ib lub sij hawm lattice, tsim ib tug nruam qauv. Nws yog lub hauv paus ntawm kev lag luam chip manufacturing.

Daim duab hauv qab no qhia txog cov txheej txheem ua tiav ntawm kev npaj monocrystalline silicon:

Txheej txheem txheej txheem:
Monocrystalline silicon yog muab los ntawm silicon ore los ntawm cov kauj ruam ntawm kev ua kom zoo. Ua ntej, polycrystalline silicon tau txais, uas yog tom qab ntawd loj hlob mus rau hauv monocrystalline silicon ingot nyob rau hauv lub cub tawg siv lead ua. Tom qab ntawd, nws raug txiav, polished, thiab ua tiav rau hauv silicon wafers haum rau chip manufacturing.

Silicon wafers feem ntau muab faib ua ob pawg:photovoltaic qibthiabsemiconductor-qib. Ob hom no txawv tsuas yog nyob rau hauv lawv cov qauv, purity, thiab nto zoo.

• Semiconductor-qib wafersmuaj qhov tshwj xeeb purity siab txog li 99.999999999%, thiab nruj me ntsis yuav tsum yog monocrystalline.

• Photovoltaic-qib waferstsis tshua muaj ntshiab, nrog purity theem ntawm 99.99% mus rau 99.9999%, thiab tsis muaj xws li cov kev cai nruj rau siv lead ua zoo.

Tsis tas li ntawd, semiconductor-qib wafers xav tau ntau dua qhov smoothness thiab huv dua li photovoltaic-qib wafers. Cov qauv siab dua rau semiconductor wafers nce ob qho tib si qhov nyuaj ntawm lawv cov kev npaj thiab lawv cov nqi ntxiv hauv kev siv.

Cov kab ntawv hauv qab no qhia txog kev hloov pauv ntawm cov khoom siv hluav taws xob semiconductor, uas tau nce los ntawm 4-nti (100mm) thiab 6-nti (150mm) wafers rau tam sim no 8-nti (200mm) thiab 12-nti (300mm) wafers.

Nyob rau hauv qhov tseeb silicon monocrystal npaj, wafer loj sib txawv raws li daim ntawv thov hom thiab nqi yam. Piv txwv li, nco chips feem ntau siv 12-nti wafers, thaum lub hwj chim khoom siv feem ntau siv 8-nti wafers.

Hauv cov ntsiab lus, kev hloov pauv ntawm wafer loj yog qhov tshwm sim ntawm Moore Txoj Cai thiab kev lag luam. Qhov loj wafer loj ua rau kev loj hlob ntawm thaj chaw siv tau ntau dua silicon nyob rau hauv tib txoj kev ua haujlwm, txo cov nqi tsim khoom thaum txo cov khoom pov tseg los ntawm cov npoo wafer.

Raws li cov khoom siv tseem ceeb hauv kev tsim kho thev naus laus zis niaj hnub no, semiconductor silicon wafers, los ntawm cov txheej txheem meej xws li photolithography thiab ion implantation, pab kom tsim tau ntau yam khoom siv hluav taws xob, suav nrog cov hluav taws xob hluav taws xob, cov khoom siv hluav taws xob, cov khoom siv hluav taws xob, cov khoom siv hluav taws xob sib txuas, thiab cov khoom siv hloov pauv. Cov cuab yeej no ua lub luag haujlwm tseem ceeb hauv thaj chaw xws li kev txawj ntse txawj ntse, 5G kev sib txuas lus, automotive electronics, Internet of Things, thiab aerospace, tsim lub hauv paus ntawm kev txhim kho kev lag luam hauv tebchaws thiab kev tsim kho tshiab.

3. Monocrystalline Silicon Kev Loj Hlob Technology

CovCzochralski (CZ) Txoj Kevyog cov txheej txheem zoo rau rub cov khoom zoo monocrystalline los ntawm yaj. Tshaj tawm los ntawm Jan Czochralski hauv 1917, txoj kev no tseem hu uaCrystal rubtxoj kev.

Tam sim no, txoj kev CZ tau siv dav hauv kev npaj ntau yam khoom siv semiconductor. Raws li kev txheeb cais tsis tiav, kwv yees li 98% ntawm cov khoom siv hluav taws xob yog tsim los ntawm monocrystalline silicon, nrog 85% ntawm cov khoom siv no ua los ntawm CZ txoj kev.

CZ txoj kev nyiam vim nws cov khoom siv lead ua zoo heev, tswj tau qhov loj me, kev loj hlob sai, thiab kev ua haujlwm siab. Cov yam ntxwv no ua rau CZ monocrystalline silicon yog cov khoom siv zoo tshaj plaws rau kev ua kom tau raws li qhov kev xav tau zoo, loj hauv kev lag luam hluav taws xob.

Txoj cai loj hlob ntawm CZ monocrystalline silicon yog raws li nram no:

Cov txheej txheem CZ yuav tsum muaj qhov kub thiab txias, lub tshuab nqus tsev, thiab qhov chaw kaw. Cov cuab yeej tseem ceeb rau txoj kev no yog qhovCrystal loj hlob rauv, uas yooj yim rau cov xwm txheej no.

Cov duab hauv qab no qhia txog cov qauv ntawm lub cub tawg siv lead ua.

Hauv CZ txheej txheem, silicon ntshiab yog muab tso rau hauv lub crucible, melted, thiab cov noob siv lead ua yog nkag rau hauv silicon molten. Los ntawm kev tswj tsis tau meej xws li kub, rub tus nqi, thiab kev sib hloov ceev ceev, atoms lossis molecules ntawm qhov sib cuam tshuam ntawm cov noob siv lead ua thiab molten silicon tsis tu ncua reorganize, solidifying raws li lub cev txias thiab thaum kawg tsim ib qho siv lead ua.

Cov txheej txheem kev loj hlob siv lead ua no tsim cov khoom lag luam zoo, loj-inch monocrystalline silicon nrog cov qauv siv lead ua tshwj xeeb.

Txoj kev loj hlob muaj ob peb kauj ruam tseem ceeb, suav nrog:

1. Disassembly thiab Loading: Tshem tawm cov khoom siv lead ua kom huv thiab ntxuav lub qhov cub thiab cov khoom ntawm cov khoom paug xws li quartz, graphite, lossis lwm yam impurities.

2. Nqus thiab Melting: Lub kaw lus tau khiav tawm mus rau lub tshuab nqus tsev, ua raws li cov lus qhia ntawm cov roj argon thiab cov cua kub ntawm cov nqi silicon.

3. Crystal rub: Cov noob siv lead ua tau qis rau hauv cov molten silicon, thiab qhov kub thiab txias interface yog ua tib zoo tswj kom ntseeg tau tias crystallization zoo.

4. Lub xub pwg nyom thiab txoj kab uas hla: Raws li cov siv lead ua loj hlob tuaj, nws txoj kab uas hla yog ua tib zoo saib xyuas thiab kho kom ntseeg tau tias kev loj hlob zoo ib yam.

5. Thaum kawg ntawm Kev Loj Hlob thiab Hluav Taws Xob kaw: Thaum qhov xav tau siv lead ua loj tiav lawm, lub cub tawg raug kaw, thiab cov siv lead ua raug tshem tawm.

Cov kauj ruam ntxaws hauv cov txheej txheem no ua kom muaj kev tsim cov khoom zoo, tsis muaj qhov tsis xws luag monocrystals haum rau kev tsim khoom semiconductor.

4. Kev sib tw hauv Monocrystalline Silicon Production

Ib qho ntawm cov teeb meem tseem ceeb hauv kev tsim cov kab loj-diameter semiconductor monocrystals nyob rau hauv kev kov yeej cov kev tsis sib haum xeeb thaum lub sij hawm txoj kev loj hlob, tshwj xeeb tshaj yog hauv kev kwv yees thiab tswj cov khoom siv lead ua tsis xws luag:

1. Tsis sib xws Monocrystal Zoo thiab qis tawm los: Raws li qhov loj ntawm silicon monocrystals nce, qhov nyuaj ntawm kev loj hlob ib puag ncig nce, ua rau nws nyuaj rau kev tswj hwm yam xws li thermal, ntws, thiab sib nqus teb. Qhov no ua rau nyuaj rau txoj haujlwm ua kom tau raws li qhov zoo thiab cov txiaj ntsig siab dua.

2. Cov txheej txheem tswj tsis ruaj khov: Cov txheej txheem kev loj hlob ntawm semiconductor silicon monocrystals yog qhov nyuaj heev, nrog ntau lub cev kev sib cuam tshuam, ua rau kev tswj xyuas qhov tseeb tsis ruaj khov thiab ua rau cov khoom lag luam qis. Cov tswv yim tswj tam sim no feem ntau tsom mus rau qhov loj me ntawm cov siv lead ua, thaum qhov zoo tseem raug hloov kho raws li kev paub dhau los, ua rau nws nyuaj rau ua kom tau raws li qhov yuav tsum tau ua rau micro thiab nano fabrication hauv IC chips.

Txhawm rau daws cov teeb meem no, kev txhim kho ntawm lub sijhawm tiag tiag, kev saib xyuas online thiab kev twv ua ntej rau kev siv lead ua zoo yog qhov xav tau sai sai, nrog rau kev txhim kho hauv kev tswj xyuas kom ruaj khov, ua tau zoo ntawm cov khoom loj ntawm cov monocrystals rau kev siv hauv kev sib xyaw ua ke.