SPC (Kev Tswj Xyuas Txheej Txheem Txheeb Cais) yog ib qho cuab yeej tseem ceeb hauv cov txheej txheem tsim khoom wafer, siv los saib xyuas, tswj, thiab txhim kho kev ruaj khov ntawm ntau theem hauv kev tsim khoom.
1. Kev Txheeb Xyuas Txog Lub Txheej Txheem SPC
SPC yog ib txoj kev siv cov txheej txheem suav lej los saib xyuas thiab tswj cov txheej txheem tsim khoom. Nws lub luag haujlwm tseem ceeb yog nrhiav pom qhov tsis zoo hauv cov txheej txheem tsim khoom los ntawm kev sau thiab tshuaj xyuas cov ntaub ntawv tiag tiag, pab cov engineers hloov kho thiab txiav txim siab raws sijhawm. Lub hom phiaj ntawm SPC yog kom txo qhov sib txawv hauv cov txheej txheem tsim khoom, xyuas kom meej tias cov khoom zoo tseem ruaj khov thiab ua tau raws li cov lus qhia.
SPC siv rau hauv cov txheej txheem etching rau:
Saib xyuas cov khoom siv tseem ceeb (piv txwv li, tus nqi etch, lub zog RF, lub siab hauv chav, qhov kub thiab txias, thiab lwm yam)
Tshuaj xyuas cov cim qhia tseem ceeb ntawm cov khoom zoo (piv txwv li, qhov dav ntawm kab, qhov tob ntawm kev txiav, qhov ntxhib ntawm ntug, thiab lwm yam)
Los ntawm kev saib xyuas cov kev ntsuas no, cov engineers tuaj yeem ntes tau cov qauv qhia txog kev ua haujlwm ntawm cov khoom siv tsis zoo lossis kev hloov pauv hauv cov txheej txheem tsim khoom, yog li txo cov nqi pov tseg.
2. Cov Cheebtsam Tseem Ceeb ntawm SPC System
SPC system muaj ntau yam tseem ceeb:
Cov Qauv Sau Cov Ntaub Ntawv: Sau cov ntaub ntawv tiag tiag los ntawm cov khoom siv thiab cov txheej txheem (piv txwv li, los ntawm FDC, EES systems) thiab sau cov kev ntsuas tseem ceeb thiab cov txiaj ntsig ntawm kev tsim khoom.
Daim Ntawv Qhia Tswj: Siv cov ntawv qhia tswj kev suav lej (piv txwv li, daim ntawv qhia X-Bar, daim ntawv qhia R, daim ntawv qhia Cp/Cpk) los pom qhov ruaj khov ntawm cov txheej txheem thiab pab txiav txim siab seb cov txheej txheem puas tswj tau.
Lub Tshuab Ceeb Toom: Ua rau muaj kev ceeb toom thaum cov kev ntsuas tseem ceeb tshaj qhov txwv kev tswj hwm lossis qhia txog kev hloov pauv, ua rau cov engineers ua haujlwm.
Kev Tshuaj Xyuas thiab Kev Tshaj Tawm Module: Tshuaj xyuas qhov ua rau muaj qhov tsis zoo raws li daim ntawv qhia SPC thiab tsim cov ntawv qhia kev ua tau zoo rau cov txheej txheem thiab cov khoom siv tsis tu ncua.
3. Kev piav qhia ntxaws txog Daim Ntawv Qhia Tswj hauv SPC
Cov duab qhia kev tswj yog ib qho ntawm cov cuab yeej siv ntau tshaj plaws hauv SPC, pab kom paub qhov txawv ntawm "kev hloov pauv ib txwm muaj" (ua los ntawm kev hloov pauv ntawm cov txheej txheem ntuj) thiab "kev hloov pauv txawv txav" (ua los ntawm kev ua tsis tiav ntawm cov khoom siv lossis kev hloov pauv ntawm cov txheej txheem). Cov duab qhia kev tswj feem ntau suav nrog:
Cov Duab Qhia X-Bar thiab R: Siv los saib xyuas qhov nruab nrab thiab ntau yam hauv cov pawg ntau lawm kom pom seb cov txheej txheem puas ruaj khov.
Cov Cim Qhia Cp thiab Cpk: Siv los ntsuas qhov muaj peev xwm ua haujlwm, piv txwv li, seb cov zis ntawm cov txheej txheem puas tuaj yeem ua tau raws li cov kev cai tshwj xeeb. Cp ntsuas qhov muaj peev xwm ua tau, thaum Cpk xav txog qhov sib txawv ntawm qhov chaw ua haujlwm los ntawm cov kev txwv tshwj xeeb.
Piv txwv li, hauv cov txheej txheem etching, koj yuav saib xyuas cov kev ntsuas xws li tus nqi etch thiab qhov roughness ntawm qhov chaw. Yog tias tus nqi etch ntawm ib qho khoom siv tshaj qhov txwv tswj, koj tuaj yeem siv cov ntawv qhia tswj kom txiav txim siab seb qhov no puas yog qhov sib txawv ntuj lossis qhov qhia txog kev ua haujlwm tsis zoo ntawm cov khoom siv.
4. Daim ntawv thov ntawm SPC hauv Etching Equipment
Hauv cov txheej txheem etching, kev tswj cov khoom siv yog qhov tseem ceeb, thiab SPC pab txhim kho kev ruaj khov ntawm cov txheej txheem hauv qab no:
Kev Saib Xyuas Cov Khoom Siv: Cov txheej txheem zoo li FDC sau cov ntaub ntawv tiag tiag ntawm cov yam ntxwv tseem ceeb ntawm cov khoom siv etching (piv txwv li, lub zog RF, roj ntws) thiab muab cov ntaub ntawv no ua ke nrog SPC daim ntawv qhia kev tswj hwm kom pom cov teeb meem khoom siv. Piv txwv li, yog tias koj pom tias lub zog RF ntawm daim ntawv qhia kev tswj hwm maj mam hloov pauv ntawm tus nqi teeb tsa, koj tuaj yeem ua qhov kev nqis tes ua thaum ntxov rau kev hloov kho lossis kev saib xyuas kom tsis txhob cuam tshuam rau qhov zoo ntawm cov khoom.
Kev Saib Xyuas Qhov Zoo ntawm Cov Khoom: Koj tuaj yeem sau cov yam ntxwv tseem ceeb ntawm cov khoom zoo (piv txwv li, qhov tob ntawm cov khoom, qhov dav ntawm cov kab) rau hauv SPC system los saib xyuas lawv qhov ruaj khov. Yog tias qee cov cim qhia tseem ceeb ntawm cov khoom maj mam hloov pauv ntawm cov nqi uas tau teem tseg, SPC system yuav tshaj tawm lub tswb ceeb toom, qhia tias xav tau kev hloov kho cov txheej txheem.
Kev Txij Nkawm Tiv Thaiv (PM): SPC tuaj yeem pab txhim kho lub voj voog txij nkawm tiv thaiv rau cov khoom siv. Los ntawm kev tshuaj xyuas cov ntaub ntawv mus sij hawm ntev ntawm kev ua haujlwm ntawm cov khoom siv thiab cov txiaj ntsig ntawm cov txheej txheem, koj tuaj yeem txiav txim siab lub sijhawm zoo tshaj plaws rau kev txij nkawm cov khoom siv. Piv txwv li, los ntawm kev saib xyuas lub zog RF thiab lub neej ntawm ESC, koj tuaj yeem txiav txim siab thaum twg xav tau kev ntxuav lossis hloov khoom, txo cov nqi ua tsis tiav ntawm cov khoom siv thiab lub sijhawm tsis ua haujlwm ntawm cov khoom siv.
5. Cov Lus Qhia Siv Txhua Hnub rau SPC System
Thaum siv SPC system hauv kev ua haujlwm txhua hnub, cov kauj ruam hauv qab no tuaj yeem ua raws li:
Txhais Cov Kev Tswj Xyuas Tseem Ceeb (KPI): Txheeb xyuas cov kev ntsuas tseem ceeb tshaj plaws hauv cov txheej txheem tsim khoom thiab suav nrog lawv hauv kev saib xyuas SPC. Cov kev ntsuas no yuav tsum muaj feem cuam tshuam nrog qhov zoo ntawm cov khoom thiab kev ua haujlwm ntawm cov khoom siv.
Teem Cov Kev Txwv Tswj thiab Cov Kev Txwv Ceeb Toom: Raws li cov ntaub ntawv keeb kwm thiab cov txheej txheem xav tau, teem cov kev txwv tswj thiab cov kev txwv ceeb toom rau txhua qhov parameter. Cov kev txwv tswj feem ntau yog teem rau ntawm ±3σ (tus qauv deviations), thaum cov kev txwv ceeb toom yog raws li cov xwm txheej tshwj xeeb ntawm cov txheej txheem thiab cov khoom siv.
Kev Soj Ntsuam thiab Kev Tshawb Fawb Tsis Tu Ncua: Saib xyuas cov ntawv qhia tswj hwm SPC tas li kom tshuaj xyuas cov qauv thiab kev hloov pauv ntawm cov ntaub ntawv. Yog tias qee qhov kev ntsuas tshaj qhov txwv ntawm kev tswj hwm, yuav tsum muaj kev nqis tes ua tam sim ntawd, xws li kho cov kev ntsuas ntawm cov khoom siv lossis ua kev saib xyuas cov khoom siv.
Kev Tswj Xyuas Qhov Tsis Zoo thiab Kev Tshawb Fawb Txog Qhov Ua Rau Muaj Teeb Meem: Thaum muaj teeb meem tshwm sim, SPC system yuav sau cov ntaub ntawv qhia txog qhov teeb meem. Koj yuav tsum daws teeb meem thiab tshawb xyuas qhov ua rau muaj teeb meem raws li cov ntaub ntawv no. Feem ntau nws muaj peev xwm los muab cov ntaub ntawv los ntawm FDC systems, EES systems, thiab lwm yam los tshuaj xyuas seb qhov teeb meem puas yog vim cov khoom siv tsis ua haujlwm, kev hloov pauv ntawm cov txheej txheem, lossis cov yam ntxwv ib puag ncig sab nraud.
Kev Txhim Kho Txuas Ntxiv Mus: Siv cov ntaub ntawv keeb kwm uas SPC system tau sau tseg, txheeb xyuas cov ntsiab lus tsis muaj zog hauv cov txheej txheem thiab tawm tswv yim cov phiaj xwm txhim kho. Piv txwv li, hauv cov txheej txheem etching, tshuaj xyuas qhov cuam tshuam ntawm ESC lub neej thiab cov txheej txheem ntxuav rau cov voj voog txij nkawm khoom siv thiab txuas ntxiv txhim kho cov kev ua haujlwm ntawm cov khoom siv.
6. Cov Ntaub Ntawv Siv Tau
Ua piv txwv ua tau, xav tias koj yog tus saib xyuas cov khoom siv etching E-MAX, thiab lub cathode chamber tab tom muaj kev hnav ua ntej lub sijhawm, ua rau muaj kev nce ntxiv ntawm D0 (BARC defect) tus nqi. Los ntawm kev saib xyuas lub zog RF thiab tus nqi etch los ntawm SPC system, koj pom ib qho kev hloov pauv uas cov kev ntsuas no maj mam hloov pauv ntawm lawv cov nqi teeb tsa. Tom qab lub tswb ceeb toom SPC raug qhib, koj muab cov ntaub ntawv los ntawm FDC system ua ke thiab txiav txim siab tias qhov teeb meem yog tshwm sim los ntawm kev tswj qhov kub tsis ruaj khov hauv lub chamber. Tom qab ntawd koj siv cov txheej txheem ntxuav tshiab thiab cov tswv yim txij nkawm, thaum kawg txo tus nqi D0 los ntawm 4.3 mus rau 2.4, yog li txhim kho cov khoom zoo.
7.Hauv XINKEHUI koj tuaj yeem tau txais.
Ntawm XINKEHUI, koj tuaj yeem ua tiav qhov wafer zoo meej, txawm tias nws yog silicon wafer lossis SiC wafer. Peb tshwj xeeb hauv kev xa cov wafers zoo tshaj plaws rau ntau yam lag luam, tsom mus rau qhov tseeb thiab kev ua tau zoo.
(silicon wafer)
Peb cov silicon wafers yog tsim los nrog kev ntshiab thiab kev sib xws, ua kom muaj zog hluav taws xob zoo rau koj cov kev xav tau semiconductor.
Rau cov ntawv thov uas xav tau ntau dua, peb cov SiC wafers muaj kev ua tau zoo heev ntawm thermal conductivity thiab kev siv hluav taws xob zoo dua, zoo tagnrho rau cov khoom siv hluav taws xob thiab cov chaw kub siab.
(SiC wafer)
Nrog XINKEHUI, koj tau txais cov thev naus laus zis tshiab thiab kev txhawb nqa txhim khu kev qha, lav cov wafers uas ua tau raws li cov qauv kev lag luam siab tshaj plaws. Xaiv peb rau koj qhov kev ua tiav wafer!
Lub sijhawm tshaj tawm: Lub Kaum Hli-16-2024