SPC (Kev Tswj Xyuas Txheej Txheem Txheej Txheem) yog cov cuab yeej tseem ceeb hauv cov txheej txheem tsim khoom wafer, siv los saib xyuas, tswj, thiab txhim kho kev ruaj ntseg ntawm ntau theem hauv kev tsim khoom.
1. Txheej txheem cej luam ntawm SPC System
SPC yog ib txoj hauv kev uas siv cov txheej txheem txheeb xyuas los saib xyuas thiab tswj cov txheej txheem tsim khoom. Nws lub luag haujlwm tseem ceeb yog txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau txhawm rau ua qhov tsis sib xws tsis muaj qhov tsis zoo, cov txheej txheem kev tsim khoom tsis yog qhov tsis zoo ntawm cov txheej txheem ntau lawm. Lub hom phiaj ntawm SPC yog txhawm rau txo qhov kev hloov pauv hauv cov txheej txheem tsim khoom, ua kom cov khoom lag luam zoo nyob ruaj khov thiab ua tau raws li cov lus qhia tshwj xeeb.
SPC yog siv rau hauv cov txheej txheem etching rau:
Saib xyuas cov khoom siv tseem ceeb (piv txwv li, etch tus nqi, RF zog, chamber siab, kub, thiab lwm yam)
Tshawb xyuas cov khoom tseem ceeb ntawm cov khoom lag luam zoo (xws li linewidth, etch tob, ntug roughness, thiab lwm yam)
Los ntawm kev saib xyuas cov kev txwv no, cov kws tsim khoom tuaj yeem tshawb xyuas cov ncauj lus qhia txog kev ua haujlwm ntawm cov khoom siv degradation lossis sib txawv hauv cov txheej txheem tsim khoom, yog li txo cov nqi seem.
2. Cov Cheebtsam tseem ceeb ntawm SPC System
SPC system yog tsim los ntawm ntau qhov tseem ceeb modules:
Cov Ntaub Ntawv Sau Module: Sau cov ntaub ntawv hauv lub sijhawm los ntawm cov khoom siv thiab cov txheej txheem ntws (xws li, los ntawm FDC, EES systems) thiab sau cov ntaub ntawv tseem ceeb thiab cov txiaj ntsig kev tsim khoom.
Control Chart Module: Siv cov kab kos duab tswj (xws li, X-Bar chart, R chart, Cp/Cpk chart) kom pom cov txheej txheem kev ruaj ntseg thiab pab txiav txim seb cov txheej txheem puas tswj tau.
Tswb System: Ua rau lub tswb ceeb toom thaum qhov tseem ceeb tsis dhau kev tswj hwm kev txwv lossis qhia cov kev hloov pauv, ua rau cov kws ua haujlwm ua haujlwm.
Kev Ntsuam Xyuas thiab Kev Tshaj Tawm Module: Txheeb xyuas lub hauv paus ua rau muaj kev tsis txaus ntseeg raws li SPC kab kos thiab tsis tu ncua ua cov ntaub ntawv qhia txog kev ua tau zoo rau cov txheej txheem thiab cov khoom siv.
3. Kev piav qhia ntxaws txog cov kab kos tswj hauv SPC
Cov kab kos tswj yog ib qho ntawm cov cuab yeej siv feem ntau hauv SPC, pab kom paub qhov txawv ntawm "variation" (ua los ntawm cov txheej txheem ntuj variations) thiab " txawv txav txawv txav" (tshwj xeeb los ntawm cov cuab yeej tsis ua hauj lwm lossis cov txheej txheem sib txawv). Cov kab ntawv tswj cov kab kos muaj xws li:
X-Bar thiab R Daim Ntawv Qhia: Siv los saib xyuas qhov nruab nrab thiab ntau yam hauv cov khoom tsim los saib xyuas yog tias cov txheej txheem ruaj khov.
Cp thiab Cpk Indices: Siv los ntsuas cov txheej txheem muaj peev xwm, piv txwv li, seb cov txheej txheem tso tawm tuaj yeem ua tau raws li cov kev cai tshwj xeeb. Cp ntsuas lub peev xwm muaj peev xwm, thaum Cpk txiav txim siab qhov sib txawv ntawm qhov chaw ua haujlwm los ntawm cov kev txwv tshwj xeeb.
Piv txwv li, hauv cov txheej txheem etching, koj tuaj yeem saib xyuas qhov tsis xws li etch tus nqi thiab qhov roughness ntawm qhov chaw. Yog hais tias tus nqi etch ntawm ib qho khoom siv ntau tshaj qhov kev txwv, koj tuaj yeem siv cov kab kos los txiav txim seb qhov no yog qhov txawv txav los yog qhov qhia txog kev ua haujlwm tsis zoo.
4. Daim ntawv thov ntawm SPC hauv Etching Equipment
Hauv cov txheej txheem etching, kev tswj cov khoom siv tsis yog qhov tseem ceeb, thiab SPC pab txhim kho cov txheej txheem kev ruaj ntseg hauv cov hauv qab no:
Cov Khoom Siv Saib Xyuas Kev Kho Mob: Cov Txheej Txheem zoo li FDC sau cov ntaub ntawv hauv lub sijhawm ntawm cov khoom tseem ceeb ntawm cov khoom siv etching (piv txwv li, RF fais fab, roj ntws) thiab muab cov ntaub ntawv no nrog SPC tswj kab kos kom pom cov teeb meem muaj peev xwm. Piv txwv li, yog tias koj pom tias lub zog RF ntawm daim ntawv tswj tau maj mam sib txawv ntawm cov nqi teev, koj tuaj yeem ua haujlwm ntxov rau kev hloov kho lossis kev saib xyuas kom tsis txhob cuam tshuam cov khoom zoo.
Kev soj ntsuam xyuas cov khoom zoo: Koj tuaj yeem nkag mus rau qhov tseem ceeb ntawm cov khoom tsis zoo (piv txwv li, qhov tob tob, kab dav) rau hauv SPC system los saib xyuas lawv cov kev ruaj ntseg. Yog tias qee qhov kev ntsuas tseem ceeb ntawm cov khoom lag luam maj mam sib txawv ntawm lub hom phiaj qhov tseem ceeb, SPC system yuav tshaj tawm lub tswb, qhia tias yuav tsum tau hloov cov txheej txheem.
Kev Tiv Thaiv Kev Tiv Thaiv (PM): SPC tuaj yeem pab txhim kho kev tiv thaiv kev tiv thaiv rau cov khoom siv. Los ntawm kev txheeb xyuas cov ntaub ntawv mus sij hawm ntev ntawm cov cuab yeej ua haujlwm thiab cov txheej txheem ua tau zoo, koj tuaj yeem txiav txim siab lub sijhawm zoo rau kev tu cov cuab yeej. Piv txwv li, los ntawm kev saib xyuas RF lub zog thiab ESC lub neej, koj tuaj yeem txiav txim siab thaum yuav tsum tau ntxuav lossis hloov cov khoom siv, txo cov khoom siv tsis ua haujlwm thiab cov sijhawm ua haujlwm.
5. Cov lus qhia siv niaj hnub rau SPC System
Thaum siv SPC system hauv kev ua haujlwm txhua hnub, cov kauj ruam hauv qab no tuaj yeem ua raws:
Txhais Cov Ntsiab Cai Tswjfwm (KPI): Txheeb xyuas qhov tseem ceeb tshaj plaws hauv cov txheej txheem tsim khoom thiab suav nrog hauv SPC saib xyuas. Cov kev txwv no yuav tsum muaj kev sib raug zoo nrog cov khoom zoo thiab kev ua haujlwm ntawm cov khoom siv.
Teem Tswj Kev Txwv thiab Tswb Txwv: Raws li cov ntaub ntawv keeb kwm thiab cov txheej txheem yuav tsum tau ua, teeb tsa cov kev txwv tsim nyog thiab lub tswb txwv rau txhua qhov ntsuas. Kev txwv txwv feem ntau yog teem rau ntawm ± 3σ (tus qauv sib txawv), thaum lub tswb txwv yog raws li cov xwm txheej tshwj xeeb ntawm cov txheej txheem thiab cov khoom siv.
Kev soj ntsuam tas mus li thiab Kev Ntsuam Xyuas: Tsis tu ncua tshuaj xyuas SPC cov kab kos los ntsuas cov ntaub ntawv sib txawv thiab kev hloov pauv. Yog tias qee qhov kev txwv tsis pub dhau kev tswj hwm, yuav tsum tau ua tam sim ntawd, xws li kho cov cuab yeej tsis siv lossis ua cov cuab yeej tu.
Kev Kho Mob Tsis Txaus Siab thiab Kev Tshawb Fawb Txog Kev Tshawb Fawb: Thaum muaj qhov txawv txav tshwm sim, SPC system sau cov ncauj lus kom ntxaws txog qhov xwm txheej. Koj yuav tsum tau teeb meem thiab txheeb xyuas lub hauv paus ua rau qhov txawv txav raws li cov ntaub ntawv no. Nws yog feem ntau tuaj yeem ua ke cov ntaub ntawv los ntawm FDC systems, EES systems, thiab lwm yam, los tshuaj xyuas seb qhov teeb meem yog vim li cas cov khoom siv tsis ua haujlwm, kev sib txawv ntawm cov txheej txheem, lossis lwm yam ib puag ncig.
Kev Txhim Kho Nruam: Siv cov ntaub ntawv keeb kwm sau tseg los ntawm SPC system, txheeb xyuas cov ntsiab lus tsis muaj zog hauv cov txheej txheem thiab npaj cov phiaj xwm txhim kho. Piv txwv li, nyob rau hauv cov txheej txheem etching, txheeb xyuas qhov cuam tshuam ntawm ESC lifespan thiab ntxuav cov txheej txheem ntawm kev tu cov khoom siv thiab txuas ntxiv txhim kho cov cuab yeej ua haujlwm tsis zoo.
6. Cov ntaub ntawv siv tau
Raws li ib qho piv txwv zoo, xav tias koj yog lub luag haujlwm rau cov khoom siv E-MAX, thiab lub chamber cathode tab tom ntsib kev hnav ntxov ntxov, ua rau muaj qhov nce ntawm D0 (BARC tsis xws luag) qhov tseem ceeb. Los ntawm kev saib xyuas lub zog ntawm RF thiab etch tus nqi los ntawm SPC system, koj pom qhov sib txawv uas cov kev txwv no maj mam sib txawv ntawm lawv cov nqi teev. Tom qab lub tswb SPC tau tshwm sim, koj muab cov ntaub ntawv los ntawm FDC system thiab txiav txim siab tias qhov teeb meem yog tshwm sim los ntawm qhov ntsuas kub tsis ruaj khov hauv lub chamber. Tom qab ntawd koj siv txoj kev tu tshiab thiab cov tswv yim tu, thaum kawg txo tus nqi D0 los ntawm 4.3 txog 2.4, yog li txhim kho cov khoom zoo.
7.Hauv XINKEHUI koj tuaj yeem tau txais.
Ntawm XINKEHUI, koj tuaj yeem ua tiav qhov zoo tshaj plaws wafer, txawm tias nws yog silicon wafer lossis SiC wafer. Peb tshwj xeeb hauv kev xa cov khoom zoo tshaj plaws wafers rau ntau yam kev lag luam, tsom mus rau qhov tseeb thiab kev ua tau zoo.
(silicon wafer)
Peb cov silicon wafers yog crafted nrog superior purity thiab uniformity, kom ntseeg tau zoo heev hluav taws xob khoom rau koj semiconductor xav tau kev pab.
Rau cov ntawv thov ntau dua, peb cov SiC wafers muaj qhov tshwj xeeb thermal conductivity thiab ua haujlwm siab dua, zoo tagnrho rau hluav taws xob hluav taws xob thiab qhov chaw kub kub.
(SiC wafer)
Nrog XINKEHUI, koj tau txais kev siv thev naus laus zis thiab kev txhawb nqa txhim khu kev qha, lav wafers uas ua tau raws li cov qauv kev lag luam siab tshaj plaws. Xaiv peb rau koj wafer perfection!
Post lub sij hawm: Oct-16-2024