Cov Lus Qhia Txog:Peb tau tsim ib lub 1550 nm insulator-based lithium tantalate waveguide nrog qhov poob ntawm 0.28 dB/cm2 thiab lub nplhaib resonator zoo ntawm 1.1 lab. Daim ntawv thov ntawm χ(3) nonlinearity hauv nonlinear photonics tau raug kawm. Qhov zoo ntawm lithium niobate ntawm insulator (LNoI), uas qhia tau zoo heev χ(2) thiab χ(3) nonlinear khoom nrog rau kev kaw optical muaj zog vim nws cov qauv "insulator-on", tau ua rau muaj kev nce qib tseem ceeb hauv waveguide technology rau ultrafast modulators thiab integrated nonlinear photonics [1-3]. Ntxiv rau LN, lithium tantalate (LT) kuj tau raug tshawb nrhiav ua ib yam khoom siv nonlinear photonic. Piv rau LN, LT muaj qhov siab dua optical puas threshold thiab lub qhov rais optical transparency dav dua [4, 5], txawm hais tias nws cov optical parameters, xws li refractive index thiab nonlinear coefficients, zoo ib yam li LN [6, 7]. Yog li, LToI sawv tawm ua lwm cov khoom siv muaj zog rau kev siv hluav taws xob siab nonlinear photonic. Ntxiv mus, LToI tab tom dhau los ua cov khoom siv tseem ceeb rau cov khoom siv lim dej acoustic nthwv dej (SAW), siv tau rau hauv cov thev naus laus zis ceev ceev thiab wireless. Hauv cov ntsiab lus no, LToI wafers yuav dhau los ua cov khoom siv ntau dua rau cov ntawv thov photonic. Txawm li cas los xij, txog niaj hnub no, tsuas yog ob peb lub cuab yeej photonic raws li LToI tau tshaj tawm, xws li microdisk resonators [8] thiab electro-optic phase shifters [9]. Hauv daim ntawv no, peb nthuav qhia LToI waveguide qis-poob thiab nws daim ntawv thov hauv lub nplhaib resonator. Tsis tas li ntawd, peb muab cov χ (3) nonlinear yam ntxwv ntawm LToI waveguide.
Cov Ntsiab Lus Tseem Ceeb:
• Muab 4-nti mus rau 6-nti LToI wafers, nyias-zaj duab xis lithium tantalate wafers, nrog rau sab saum toj txheej thicknesses xws li 100 nm mus rau 1500 nm, siv cov thev naus laus zis hauv tsev thiab cov txheej txheem paub tab.
• SINOI: Cov wafers nyias nyias uas tsis tshua muaj kev poob silicon nitride.
• SICOI: Cov khoom siv nyias nyias uas muaj cov khoom siv semi-insulating silicon carbide uas muaj purity siab rau cov circuits photonic integrated silicon carbide.
• LTOI: Ib tug neeg sib tw muaj zog rau lithium niobate, thin-film lithium tantalate wafers.
• LNOI: 8-nti LNOI txhawb nqa kev tsim khoom loj ntawm cov khoom siv lithium niobate nyias nyias loj dua.
Kev tsim khoom ntawm Insulator Waveguides:Hauv kev tshawb fawb no, peb siv 4-nti LToI wafers. Lub txheej LT sab saum toj yog lub lag luam 42 ° tig Y-txiav LT substrate rau SAW cov khoom siv, uas tau txuas ncaj qha rau Si substrate nrog 3 µm tuab thermal oxide txheej, siv cov txheej txheem txiav ntse. Daim duab 1 (a) qhia txog qhov pom sab saum toj ntawm LToI wafer, nrog rau sab saum toj LT txheej tuab ntawm 200 nm. Peb tau soj ntsuam qhov roughness ntawm qhov saum npoo ntawm LT txheej sab saum toj siv atomic force microscopy (AFM).
Daim Duab 1.(a) Saib sab saum toj ntawm LToI wafer, (b) AFM duab ntawm qhov chaw ntawm txheej LT sab saum toj, (c) PFM duab ntawm qhov chaw ntawm txheej LT sab saum toj, (d) Schematic cross-section ntawm LToI waveguide, (e) Xam cov qauv TE hom profile, thiab (f) SEM duab ntawm LToI waveguide core ua ntej SiO2 overlayer deposition. Raws li pom hauv Daim Duab 1 (b), qhov roughness ntawm qhov chaw yog tsawg dua 1 nm, thiab tsis muaj kab kos tau pom. Tsis tas li ntawd, peb tau tshuaj xyuas lub xeev polarization ntawm txheej LT sab saum toj siv piezoelectric response force microscopy (PFM), raws li tau piav qhia hauv Daim Duab 1 (c). Peb tau lees paub tias kev sib xyaw polarization tau tswj hwm txawm tias tom qab cov txheej txheem sib txuas.
Siv cov khoom siv LToI no, peb tau tsim cov waveguide raws li hauv qab no. Ua ntej, ib txheej hlau npog tau tso rau tom qab etching qhuav ntawm LT. Tom qab ntawd, electron beam (EB) lithography tau ua tiav los txhais cov qauv waveguide core rau saum cov txheej hlau npog. Tom ntej no, peb tau hloov cov qauv EB resist rau cov txheej hlau npog ntawm kev etching qhuav. Tom qab ntawd, LToI waveguide core tau tsim los ntawm kev siv electron cyclotron resonance (ECR) plasma etching. Thaum kawg, cov txheej hlau npog tau raug tshem tawm los ntawm cov txheej txheem ntub dej, thiab SiO2 overlayer tau tso siv plasma-enhanced chemical vapor deposition. Daim duab 1 (d) qhia txog qhov schematic cross-section ntawm LToI waveguide. Tag nrho qhov siab ntawm lub hauv paus, qhov siab ntawm lub phaj, thiab qhov dav ntawm lub hauv paus yog 200 nm, 100 nm, thiab 1000 nm, feem. Nco ntsoov tias qhov dav ntawm lub hauv paus nthuav dav mus rau 3 µm ntawm ntug waveguide rau kev sib txuas fiber ntau.
Daim Duab 1 (e) qhia txog qhov kev faib tawm ntawm lub zog ntawm lub teeb pom kev zoo ntawm hom hluav taws xob transverse (TE) ntawm 1550 nm. Daim Duab 1 (f) qhia txog daim duab scanning electron microscope (SEM) ntawm LToI waveguide core ua ntej kev tso SiO2 overlayer.
Cov yam ntxwv ntawm Waveguide:Peb xub soj ntsuam cov yam ntxwv ntawm kev poob linear los ntawm kev nkag mus rau TE-polarized lub teeb los ntawm 1550 nm wavelength amplified spontaneous emission qhov chaw rau hauv LToI waveguides ntawm ntau qhov ntev. Qhov kev poob propagation tau txais los ntawm qhov nqes hav ntawm kev sib raug zoo ntawm qhov ntev waveguide thiab kev sib kis ntawm txhua qhov wavelength. Qhov kev poob propagation ntsuas tau yog 0.32, 0.28, thiab 0.26 dB / cm ntawm 1530, 1550, thiab 1570 nm, raws li qhia hauv Daim Duab 2 (a). Cov LToI waveguides tsim tau pom qhov kev ua tau zoo sib xws rau cov LNoI waveguides niaj hnub [10].
Tom ntej no, peb tau soj ntsuam qhov χ(3) nonlinearity los ntawm kev hloov pauv wavelength uas tsim los ntawm cov txheej txheem sib xyaw plaub-yoj. Peb tau muab lub teeb twj tso kua dej txuas ntxiv ntawm 1550.0 nm thiab lub teeb liab ntawm 1550.6 nm rau hauv 12 hli ntev waveguide. Raws li pom hauv Daim Duab 2 (b), lub teeb liab theem-conjugate (idler) lub teeb liab nce ntxiv nrog rau kev nce zog nkag. Daim duab ntxig hauv Daim Duab 2 (b) qhia txog cov zis tawm spectrum ntawm plaub-yoj sib xyaw. Los ntawm kev sib raug zoo ntawm lub zog nkag thiab kev hloov pauv zoo, peb kwv yees tias qhov tsis yog linear parameter (γ) yuav tsum yog kwv yees li 11 W ^-1m.
Daim Duab 3.(a) Duab thaij los ntawm lub tshuab microscope ntawm lub nplhaib resonator uas tau tsim. (b) Cov spectra kis tau ntawm lub nplhaib resonator nrog ntau yam kev sib txawv. (c) Cov spectrum kis tau ntsuas thiab Lorentzian-fitted ntawm lub nplhaib resonator nrog qhov sib txawv ntawm 1000 nm.
Tom ntej no, peb tau tsim lub LToI ring resonator thiab soj ntsuam nws cov yam ntxwv. Daim duab 3 (a) qhia cov duab ntawm lub tshuab microscope ntawm lub ring resonator uas tau tsim. Lub ring resonator muaj qhov "racetrack" configuration, uas muaj thaj chaw nkhaus nrog lub vojvoog ntawm 100 µm thiab thaj chaw ncaj ntawm 100 µm ntev. Qhov dav ntawm lub nplhaib thiab lub plawv waveguide sib txawv ntawm 200 nm, tshwj xeeb ntawm 800, 1000, thiab 1200 nm. Daim duab 3 (b) qhia cov spectra kis rau txhua qhov sib txawv, qhia tias qhov piv txwv extinction hloov pauv nrog qhov loj me ntawm qhov sib txawv. Los ntawm cov spectra no, peb tau txiav txim siab tias qhov sib txawv 1000 nm muab cov xwm txheej sib txuas tseem ceeb, vim nws qhia txog qhov piv txwv extinction siab tshaj plaws ntawm -26 dB.
Siv lub resonator sib txuas ua ke, peb kwv yees qhov zoo tshaj plaws (Q factor) los ntawm kev haum cov kab sib kis kab nrog Lorentzian nkhaus, tau txais qhov sab hauv Q factor ntawm 1.1 lab, raws li pom hauv Daim Duab 3 (c). Raws li peb paub, qhov no yog thawj qhov kev ua qauv qhia ntawm waveguide-coupled LToI nplhaib resonator. Qhov tseem ceeb, qhov txiaj ntsig Q factor uas peb tau txais yog siab dua li ntawm cov fiber-coupled LToI microdisk resonators [9].
Xaus lus:Peb tau tsim ib lub LToI waveguide nrog qhov poob ntawm 0.28 dB / cm ntawm 1550 nm thiab lub nplhaib resonator Q factor ntawm 1.1 lab. Qhov kev ua tau zoo tau zoo ib yam li cov ntawm cov khoom siv qis qis LNoI waveguides. Tsis tas li ntawd, peb tau tshawb nrhiav qhov χ (3) nonlinearity ntawm LToI waveguide tsim tawm rau cov ntawv thov nonlinear ntawm on-chip.
Lub sijhawm tshaj tawm: Kaum Ib Hlis-20-2024