Abstract:Peb tau tsim 1550 nm insulator-based lithium tantalate waveguide nrog qhov poob ntawm 0.28 dB / cm thiab lub nplhaib resonator zoo ntawm 1.1 lab. Daim ntawv thov ntawm χ(3) nonlinearity hauv nonlinear photonics tau kawm. Qhov zoo ntawm lithium niobate ntawm insulator (LNoI), uas qhia tau zoo heev χ(2) thiab χ(3) nonlinear zog nrog rau qhov muaj zog optical confinement vim nws "insulator-on" qauv, tau ua rau muaj kev nce qib hauv waveguide technology rau ultrafast. modulators thiab integrated nonlinear photonics [1-3]. Ntxiv rau LN, lithium tantalate (LT) kuj tau raug tshawb xyuas raws li cov khoom siv photonic nonlinear. Piv rau LN, LT muaj qhov kev puas tsuaj ntau dua qhov chaw pib thiab qhov dav dav qhov pom qhov pom pom [4, 5], txawm hais tias nws qhov kev ntsuas qhov muag pom, xws li qhov ntsuas qhov ntsuas tsis zoo thiab cov coefficients tsis sib xws, zoo ib yam li cov LN [6, 7]. Yog li, LToI sawv tawm los ua lwm tus neeg sib tw cov ntaub ntawv muaj zog rau lub zog kho qhov muag uas tsis yog-linear photonic daim ntaub ntawv. Ntxiv mus, LToI tau dhau los ua cov khoom siv tseem ceeb rau cov khoom siv acoustic nthwv dej (SAW) lim, siv tau rau hauv cov cuab yeej siv hluav taws xob ceev thiab wireless. Hauv cov ntsiab lus no, LToI wafers yuav dhau los ua cov ntaub ntawv ntau dua rau kev siv photonic. Txawm li cas los xij, txog niaj hnub no, tsuas yog ob peb cov khoom siv photonic raws li LToI tau tshaj tawm, xws li microdisk resonators [8] thiab electro-optic theem shifters [9]. Hauv daim ntawv no, peb nthuav qhia qhov tsis tshua muaj LToI waveguide thiab nws daim ntawv thov hauv lub nplhaib resonator. Tsis tas li ntawd, peb muab χ(3) nonlinear yam ntxwv ntawm LToI waveguide.
Cov ntsiab lus tseem ceeb:
• Muab 4-nti mus rau 6-nti LToI wafers, nyias zaj duab xis lithium tantalate wafers, nrog rau sab saum toj txheej thicknesses li ntawm 100 nm mus rau 1500 nm, siv domestic technology thiab mature txheej txheem.
• SINOI: Ultra-tsawg poob silicon nitride nyias-film wafers.
• SICOI: High-purity semi-insulating silicon carbide nyias zaj duab xis substrates rau silicon carbide photonic integrated circuits.
• LTOI: Ib tug muaj zog sib tw rau lithium niobate, nyias-film lithium tantalate wafers.
• LNOI: 8-nti LNOI txhawb cov khoom loj ntawm cov khoom loj dua lithium niobate cov khoom.
Kev tsim khoom ntawm Insulator Waveguides:Hauv txoj kev tshawb no, peb siv 4-nti LToI wafers. Sab saum toj LT txheej yog kev lag luam 42 ° tig Y-txiav LT substrate rau SAW cov cuab yeej, uas yog ncaj qha sib txuas rau Si substrate nrog 3 µm tuab thermal oxide txheej, ua haujlwm cov txheej txheem txiav ntse. Daim duab 1(a) qhia pom sab saum toj ntawm LToI wafer, nrog rau sab saum toj LT txheej thickness ntawm 200 nm. Peb ntsuas qhov roughness ntawm sab saum toj LT txheej siv atomic force microscopy (AFM).
Daim duab 1.(a) Sab saum toj saib ntawm LToI wafer, (b) AFM duab ntawm qhov saum npoo ntawm LT txheej, (c) PFM duab ntawm qhov saum npoo ntawm LT txheej, (d) Schematic hla ntu ntawm LToI waveguide, (e) Muab xam qhov tseem ceeb TE hom profile, thiab (f) SEM duab ntawm LToI waveguide core ua ntej SiO2 overlayer deposition. Raws li pom nyob rau hauv daim duab 1 (b), qhov roughness ntawm qhov saum npoo yog tsawg dua 1 nm, thiab tsis muaj kab kos. Tsis tas li ntawd, peb tau tshuaj xyuas lub xeev polarization ntawm sab saum toj LT txheej siv piezoelectric teb force microscopy (PFM), raws li tau piav qhia hauv daim duab 1 (c). Peb tau lees paub tias tsis tu ncua polarization tau khaws cia txawm tias tom qab cov txheej txheem sib txuas.
Siv LToI substrate no, peb tsim cov waveguide raws li hauv qab no. Ua ntej, txheej txheej hlau npog tau muab tso rau tom qab qhuav etching ntawm LT. Tom qab ntawd, electron beam (EB) lithography tau ua los txhais cov qauv waveguide core nyob rau sab saum toj ntawm daim npog hlau. Tom ntej no, peb xa cov qauv EB tiv thaiv mus rau lub npog ntsej muag hlau los ntawm qhuav etching. Tom qab ntawd, LToI waveguide core tau tsim siv electron cyclotron resonance (ECR) plasma etching. Thaum kawg, txheej txheej hlau npog tau raug tshem tawm los ntawm cov txheej txheem ntub dej, thiab SiO2 overlayer tau muab tso rau siv cov plasma-txhim kho cov tshuaj vapor deposition. Daim duab 1 (d) qhia txog schematic cross-section ntawm LToI waveguide. Tag nrho cov tub ntxhais qhov siab, phaj siab, thiab cov tub ntxhais dav yog 200 nm, 100 nm, thiab 1000 nm, feem. Nco ntsoov tias cov tub ntxhais dav nthuav dav mus rau 3 µm ntawm ntug waveguide rau optical fiber txuas.
Daim duab 1 (e) qhia txog kev faib khoom siv kho qhov muag ntawm lub hauv paus transverse hluav taws xob (TE) hom ntawm 1550 nm. Daim duab 1 (f) qhia cov duab ntawm lub tshuab ntsuas hluav taws xob (SEM) ntawm LToI waveguide core ua ntej tso tawm ntawm SiO2 overlayer.
Waveguide yam ntxwv:Peb thawj zaug ntsuas cov yam ntxwv tsis zoo los ntawm kev nkag mus rau TE-polarized lub teeb los ntawm 1550 nm wavelength amplified spontaneous emission source rau hauv LToI waveguides ntawm qhov sib txawv. Lub propagation poob yog tau los ntawm txoj kab nqes ntawm txoj kev sib raug zoo ntawm waveguide ntev thiab kis tau tus mob ntawm txhua wavelength. Kev ntsuas kev nthuav tawm poob yog 0.32, 0.28, thiab 0.26 dB / cm ntawm 1530, 1550, thiab 1570 nm, raws li pom hauv daim duab 2 (a). Cov ntaub ntawv LToI waveguides nthuav tawm qhov kev sib piv qis-tsis ua haujlwm rau lub xeev-of-the-art LNoI waveguides [10].
Tom ntej no, peb soj ntsuam qhov χ(3) nonlinearity los ntawm kev hloov pauv wavelength uas tsim los ntawm plaub-yoj sib xyaw txheej txheem. Peb muab lub teeb yoj lub twj tso kua mis txuas ntxiv ntawm 1550.0 nm thiab lub teeb liab ntawm 1550.6 nm rau hauv 12 hli ntev waveguide. Raws li pom nyob rau hauv daim duab 2 (b), theem-conjugate (idler) lub teeb yoj lub teeb liab siv zog tau nce ntxiv nrog rau kev siv zog ntxiv. Lub inset nyob rau hauv daim duab 2 (b) qhia tau hais tias ib txwm tso zis spectrum ntawm plaub-yoj sib tov. Los ntawm kev sib raug zoo ntawm input zog thiab conversion efficiency, peb kwv yees lub nonlinear parameter (γ) yog kwv yees li 11 W^-1m.
Daim duab 3.(a) Microscope duab ntawm lub nplhaib fabricated resonator. (b) Transmission spectra ntawm lub nplhaib resonator nrog ntau qhov sib txawv tsis. (c) Ntsuas thiab Lorentzian-tsim kis tau tus mob spectrum ntawm lub nplhaib resonator nrog qhov sib txawv ntawm 1000 nm.
Tom ntej no, peb tsim ib lub nplhaib LToI resonator thiab soj ntsuam nws cov yam ntxwv. Daim duab 3 (a) qhia cov duab kho qhov muag tsom iav ntawm lub nplhaib fabricated resonator. Lub nplhaib resonator nta ib qho "racetrack" configuration, muaj xws li ib tug nkhaus cheeb tsam nrog ib tug vojvoog ntawm 100 µm thiab ib tug ncaj cheeb tsam ntawm 100 µm nyob rau hauv ntev. Qhov dav dav ntawm lub nplhaib thiab lub tsheb npav waveguide core sib txawv hauv qhov nce ntawm 200 nm, tshwj xeeb ntawm 800, 1000, thiab 1200 nm. Daim duab 3 (b) qhia txog qhov kis tau tus mob rau txhua qhov sib txawv, qhia tias qhov kev ploj tuag hloov pauv nrog qhov sib txawv. Los ntawm cov spectra no, peb tau txiav txim siab tias qhov sib txawv ntawm 1000 nm muab ze li qhov tseem ceeb ntawm kev sib txuas, vim nws nthuav tawm qhov kev ploj tuag ntau tshaj plaws ntawm -26 dB.
Siv cov kev sib txuas lus tseem ceeb, peb tau kwv yees qhov zoo tshaj plaws (Q yam) los ntawm kev ua kom haum rau cov kab sib kis tau zoo nrog lub Lorentzian nkhaus, tau txais qhov Q qhov tseem ceeb ntawm 1.1 lab, raws li qhia hauv daim duab 3 (c). Rau peb txoj kev paub, qhov no yog thawj zaug ua qauv qhia ntawm waveguide-coupled LToI nplhaib resonator. Qhov tseem ceeb, tus nqi Q yam peb ua tiav yog qhov siab dua li ntawm fiber ntau txuas LToI microdisk resonators [9].
Xaus:Peb tsim LToI waveguide nrog qhov poob ntawm 0.28 dB / cm ntawm 1550 nm thiab lub nplhaib resonator Q yam ntawm 1.1 lab. Qhov kev ua tau zoo tau muab piv rau lub xeev-ntawm-lub-kos duab uas tsis muaj LNoI waveguides. Tsis tas li ntawd, peb tau tshawb xyuas qhov χ(3) nonlinearity ntawm cov tsim LToI waveguide rau on-chip nonlinear daim ntawv thov.
Post lub sij hawm: Nov-20-2024