Optical-Qib Silicon Carbide Waveguide AR Glasses: Kev Npaj ntawm High-Purity Semi-Insulating Substrates

Tawm tsam keeb kwm yav dhau los ntawm AI kiv puag ncig, AR tsom iav tau maj mam nkag mus rau pej xeem kev nco qab. Raws li ib qho piv txwv uas seamlessly blends virtual thiab lub ntiaj teb tiag tiag, AR tsom iav txawv ntawm VR cov khoom siv los ntawm kev tso cai rau cov neeg siv pom ob qho tib si digitally projected dluab thiab ambient ib puag ncig lub teeb ib txhij. Txhawm rau ua tiav qhov kev ua haujlwm thib ob - nthuav tawm cov duab microdisplay rau hauv lub qhov muag thaum khaws cia sab nraud kev sib kis - kho qhov muag-qib silicon carbide (SiC)-raws li AR tsom iav siv lub waveguide (lightguide) architecture. Qhov kev tsim qauv no siv tag nrho cov kev xav sab hauv kom xa cov duab, piv rau kev sib kis ntawm fiber ntau, raws li tau piav qhia hauv daim duab schematic.

Feem ntau, ib qho 6-nti high-purity semi-insulating substrate tuaj yeem tawm tau 2 khub iav, thaum lub 8-nti substrate haum rau 3-4 khub. Kev txais yuav cov ntaub ntawv SiC muab peb qhov zoo tseem ceeb:

1. Exceptional refractive index (2.7): Ua kom> 80 ° puv xim ntawm qhov pom (FOV) nrog ib txheej txheej lens, tshem tawm cov duab zaj duab xis uas muaj nyob rau hauv cov qauv AR.
2. Integrated tri-xim (RGB) waveguide: Hloov ntau txheej waveguide pawg, txo cov cuab yeej loj thiab qhov hnyav.
3. Superior thermal conductivity (490 W / m·K): Mitigates tshav kub tsub zuj zuj-induced optical degradation.

Cov txiaj ntsig zoo no tau ua rau muaj kev lag luam xav tau zoo rau SiC-raws li AR tsom iav. Cov khoom siv kho qhov muag-qib SiC siv feem ntau muaj cov khoom siv hluav taws xob siab-purity semi-insulating (HPSI), uas nws cov kev npaj nruj yuav ua rau cov nqi siab tam sim no. Yog li ntawd, txoj kev loj hlob ntawm HPSI SiC substrates yog qhov tseem ceeb.

1. Synthesis ntawm Semi-Insulating SiC hmoov
Kev lag luam-teev ntau lawm feem ntau siv high-temperature self-propagating synthesis (SHS), txheej txheem xav tau kev tswj xyuas zoo:

• Raw khoom: 99.999% ntshiab carbon / silicon hmoov nrog particle loj ntawm 10-100 μm.
• Crucible purity: Graphite Cheebtsam undergo high-temperature purification kom txo cov hlau impurity diffusion.
• Kev tswj huab cua: 6N-purity argon (nrog rau hauv kab purifiers) suppresses nitrogen incorporation; taug qab HCl / H₂ gases yuav raug qhia kom volatilize boron tebchaw thiab txo nitrogen, txawm hais tias H₂ concentration yuav tsum optimization los tiv thaiv graphite corrosion.
• Cov txheej txheem khoom siv: Cov tshuab hluav taws xob sib txuas yuav tsum ua kom tiav <10⁻⁴ Pa lub hauv paus nqus tsev vacuum, nrog cov txheej txheem soj ntsuam nruj heev.

2. Kev Sib Tw Loj Loj Loj
HPSI SiC kev loj hlob qhia zoo sib xws cov kev cai purity:

• Feedstock: 6N +-purity SiC hmoov nrog B / Al / N <10¹⁶ cm⁻³, Fe / Ti / O hauv qab qhov kev txwv, thiab cov hlau alkali tsawg (Na / K).
• Gas systems: 6N argon / hydrogen blends txhim khu kev tiv thaiv.
• Khoom siv: Molecular twj tso kua mis kom lub tshuab nqus tsev ultrahigh (<10⁻⁶ Pa); crucible pre-treatment thiab nitrogen purging yog qhov tseem ceeb.

Substrate Processing Innovations
Piv rau silicon, SiC qhov kev loj hlob mus ntev thiab muaj kev ntxhov siab (ua rau tawg / ntug chipping) yuav tsum tau ua tiav:

• Laser slicing: nce yield los ntawm 30 wafers (350 μm, hlau pom) mus rau> 50 wafers ib 20-mm boule, nrog rau tej zaum 200-μm thinning. Lub sijhawm ua haujlwm poob los ntawm 10-15 hnub (xaim pom) mus rau <20 min / wafer rau 8-nti crystals.

3. Kev sib koom ua lag luam

Meta's Orion pab pawg tau pioneered optical-qib SiC waveguide saws, txhawb nqa R & D kev nqis peev. Kev koom tes tseem ceeb suav nrog:

• TankeBlue & MUDI Micro: Kev sib koom ua ke ntawm AR diffractive waveguide lo ntsiab muag.
• Jingsheng Mech, Longqi Tech, XREAL, & Kunyou Optoelectronics: Strategic alliance for AI/AR supply chain integration.

Kev ua lag luam kwv yees kwv yees li 500,000 SiC-based AR units txhua xyoo los ntawm 2027, siv 250,000 6-nti (lossis 125,000 8-nti) substrates. Qhov kev sib tw no qhia txog SiC lub luag haujlwm hloov pauv hauv AR optics tiam tom ntej.

XKH tshwj xeeb hauv kev muab cov khoom zoo 4H-semi-insulating (4H-SEMI) SiC substrates nrog customizable diameters xws li 2-nti mus rau 8-nti, tailored kom tau raws li cov kev thov tshwj xeeb hauv RF, hluav taws xob hluav taws xob, thiab AR / VR optics. Peb lub zog muaj xws li cov khoom ntim txhim khu kev qha, precision customization (thickness, orientation, deg tiav), thiab tag nrho hauv tsev ua los ntawm siv lead ua loj hlob mus rau polishing. Tshaj li 4H-SEMI, peb kuj muab 4H-N-hom, 4H / 6H-P-hom, thiab 3C-SiC substrates, txhawb kev sib txawv semiconductor thiab optoelectronic innovation.