Silicon carbide (SiC) yog ib qho zoo kawg nkaus compound uas tuaj yeem pom nyob rau hauv ob qho tib si semiconductor kev lag luam thiab cov khoom siv ceramic siab heev. Qhov no feem ntau ua rau muaj kev tsis sib haum xeeb ntawm cov neeg ua haujlwm uas yuav ua yuam kev rau lawv li tib yam khoom. Hauv kev muaj tiag, thaum sib koom cov tshuaj muaj pes tsawg leeg zoo ib yam, SiC tshwm sim raws li hnav-tiv taus siab heev ceramics los yog high-efficiency semiconductors, ua si sib txawv kiag li hauv cov ntawv thov kev lag luam. Qhov sib txawv tseem ceeb muaj nyob ntawm cov khoom siv ceramic-qib thiab semiconductor-qib SiC raws li cov qauv siv lead ua, kev tsim khoom, cov yam ntxwv ua haujlwm, thiab daim ntawv thov.
- Divergent Purity Requirements rau Raw Materials
Ceramic-qib SiC muaj cov kev cai purity lenient rau nws cov hmoov feedstock. Feem ntau, cov khoom lag luam qib nrog 90% -98% purity tuaj yeem ua tau raws li cov kev xav tau ntawm cov ntawv thov feem ntau, txawm hais tias cov txheej txheem ua haujlwm siab yuav xav tau 98% -99.5% purity (xws li cov tshuaj tiv thaiv-kev sib khi SiC yuav tsum tau tswj cov ntsiab lus dawb silicon). Nws zam qee yam impurities thiab qee zaum txhob txwm koom nrog cov khoom siv sintering xws li txhuas oxide (Al₂O₃) lossis yttrium oxide (Y₂O₃) txhawm rau txhim kho kev ua haujlwm sintering, txo qis sintering kub, thiab txhim kho cov khoom siv kawg.
Semiconductor-qib SiC xav tau ze-zoo meej purity qib. Substrate-qib ib leeg siv lead ua SiC yuav tsum ≥99.9999% (6N) purity, nrog rau qee qhov kev siv high-end xav tau 7N (99.99999%) purity. Epitaxial khaubncaws sab nraud povtseg yuav tsum tuav impurity concentrations hauv qab no 10¹⁶ atoms/cm³ (tshwj xeeb tshaj yog tsis txhob sib sib zog nqus-theem impurities xws li B, Al, thiab V). Txawm tias cov kab mob tsis huv xws li hlau (Fe), txhuas (Al), lossis boron (B) tuaj yeem cuam tshuam cov khoom siv hluav taws xob hnyav los ntawm kev ua kom cov cab kuj tawg, txo cov kev tawg ntawm lub zog, thiab thaum kawg cuam tshuam cov cuab yeej kev ua tau zoo thiab kev ntseeg siab, yuav tsum muaj kev tswj xyuas nruj impurity.
Silicon carbide semiconductor khoom
- Distinct Crystal Structures thiab Zoo
Ceramic-qib SiC feem ntau muaj xws li polycrystalline hmoov los yog sintered lub cev muaj li ntawm ntau randomly oriented SiC microcrystals. Cov khoom siv yuav muaj ntau hom polytypes (piv txwv li, α-SiC, β-SiC) yam tsis muaj kev tswj hwm nruj ntawm cov polytypes tshwj xeeb, nrog rau qhov tseem ceeb ntawm tag nrho cov khoom ntom ntom thiab uniformity. Nws cov qauv sab hauv muaj ntau thaj tsam ntawm cov qoob loo thiab cov pores microscopic, thiab tej zaum yuav muaj cov khoom siv sintering (xws li, Al₂O₃, Y₂O₃).
Semiconductor-qib SiC yuav tsum yog ib leeg-crystal substrates lossis epitaxial txheej nrog cov qauv siv lead ua heev. Nws yuav tsum tau tshwj xeeb polytypes tau los ntawm precision siv lead ua txoj kev loj hlob (xws li, 4H-SiC, 6H-SiC). Cov khoom siv hluav taws xob zoo li electron txav thiab bandgap yog qhov tsis tshua muaj siab rau kev xaiv polytype, yuav tsum muaj kev tswj hwm nruj. Tam sim no, 4H-SiC tseem nyob hauv kev ua lag luam vim nws cov khoom siv hluav taws xob zoo tshaj plaws nrog rau cov neeg nqa khoom siab thiab kev ua kom lub zog tawg, ua rau nws zoo tagnrho rau cov khoom siv fais fab.
- Txheej txheem kev sib piv
Ceramic-qib SiC ntiav cov txheej txheem tsim khoom yooj yim (kev npaj hmoov → sib sau → sintering), piv rau "cib ua." Cov txheej txheem muaj xws li:
- Kev sib xyaw ua lag luam-qib SiC hmoov (feem ntau micron-loj) nrog cov ntawv khi
- Tsim los ntawm nias
- High-temperature sintering (1600-2200 ° C) kom ua tiav densification los ntawm particle diffusion
Cov ntawv thov feem ntau tuaj yeem txaus siab nrog> 90% ntom. Tag nrho cov txheej txheem tsis tas yuav muaj kev tswj xyuas kev loj hlob zoo siv lead ua, tsom mus rau kev tsim thiab sintering sib xws. Qhov zoo muaj xws li cov txheej txheem hloov tau yooj yim rau cov duab nyuaj, txawm hais tias muaj cov kev cai purity qis dua.
Semiconductor-qib SiC koom nrog cov txheej txheem ntau dua (high-purity hmoov npaj → ib leeg-crystal substrate kev loj hlob → epitaxial wafer deposition → ntaus ntawv fabrication). Cov kauj ruam tseem ceeb suav nrog:
- Kev npaj substrate feem ntau ntawm lub cev vapor thauj (PVT) txoj kev
- Sublimation ntawm SiC hmoov ntawm huab cua txias (2200-2400 ° C, lub tshuab nqus tsev siab)
- Precise tswj ntawm kub gradients (± 1 ° C) thiab siab tsis
- Epitaxial txheej kev loj hlob ntawm cov tshuaj vapor deposition (CVD) los tsim uniformly tuab, doped txheej (feem ntau ntau mus rau kaum ntawm microns)
Tag nrho cov txheej txheem yuav tsum muaj qhov chaw huv huv (piv txwv li, Chav Kawm 10 chav huv) txhawm rau tiv thaiv kev sib kis. Cov yam ntxwv muaj xws li cov txheej txheem huab cua precision, yuav tsum tau tswj cov thermal teb thiab cov pa roj ntws, nrog rau cov kev cai nruj rau ob qho tib si raw khoom purity (> 99.9999%) thiab cov khoom siv sophistication.
- Cov nqi sib txawv tseem ceeb thiab kev coj ua lag luam
Ceramic-qib SiC nta:
- Raw khoom: Commercial-qib hmoov
- Cov txheej txheem cuam tshuam yooj yim
- Tus nqi qis: Ntau txhiab txog kaum txhiab RMB ib tuj
- Kev siv dav dav: Abrasives, refractories, thiab lwm yam lag luam raug nqi
Semiconductor-qib SiC nta:
- Ntev substrate loj hlob mus
- Yooj yim tswj tsis xws luag
- Tsawg tawm los
- Tus nqi siab: Ntau txhiab USD rau 6-nti substrate
- Kev lag luam tsom: Cov khoom siv hluav taws xob ua tau zoo xws li cov khoom siv hluav taws xob thiab cov khoom siv RF
Nrog txoj kev loj hlob sai ntawm lub zog tshiab tsheb thiab 5G kev sib txuas lus, kev lag luam xav tau loj hlob tuaj.
- Differentiated Application Scenarios
Ceramic-qib SiC ua haujlwm ua "tus neeg ua haujlwm hauv kev lag luam" feem ntau rau kev siv cov qauv. Leveraging nws cov cuab yeej zoo heev (siab hardness, hnav tsis kam) thiab thermal zog (siab kub tsis kam, oxidation kuj), nws ua tau zoo nyob rau hauv:
- Abrasives (sib tsoo log, sandpaper)
- Refractories (kub kub kub hauv ob sab phlu)
- Hnav / corrosion-resistant Cheebtsam (tswj lub cev, cov yeeb nkab hauv ob sab phlu)
Silicon carbide ceramic structural Cheebtsam
Semiconductor-qib SiC ua tau zoo li "cov neeg tseem ceeb hauv hluav taws xob," siv nws cov khoom siv hluav taws xob dav dav los ua kom pom qhov zoo ntawm cov khoom siv hluav taws xob:
- Cov khoom siv fais fab: EV inverters, daim phiaj converters (txhim kho lub zog hloov dua siab tshiab)
- RF khoom siv: 5G hauv paus chaw nres tsheb, radar systems (ua kom muaj kev ua haujlwm siab dua)
- Optoelectronics: Substrate khoom rau xiav LEDs
200-millimeter SiC epitaxial wafer
Dimension | Ceramic-qib SiC | Semiconductor-qib SiC |
Crystal Structure | Polycrystalline, ntau yam polytypes | Ib leeg siv lead ua, nruj nreem xaiv polytypes |
Txheej txheem tsom | Descification thiab puab tswj | Crystal zoo thiab cov khoom siv hluav taws xob tswj |
Kev ua haujlwm tseem ceeb | Mechanical zog, corrosion kuj, thermal stability | Cov khoom siv hluav taws xob (bandgap, tawg teb, thiab lwm yam) |
Daim ntawv thov Scenario | Cov khoom sib xyaw ua ke, cov khoom hnav-tiv taus, cov khoom kub-kub | Cov khoom siv hluav taws xob siab, cov khoom siv ntau zaus, cov khoom siv optoelectronic |
Tus nqi tsav tsheb | Txheej txheem yooj, raw khoom nqi | Crystal loj hlob tus nqi, khoom precision, raw khoom purity |
Hauv cov ntsiab lus, qhov sib txawv tseem ceeb tshwm sim los ntawm lawv lub hom phiaj ua haujlwm sib txawv: ceramic-qib SiC siv "form (structure)" thaum semiconductor-qib SiC siv "cov khoom (hluav taws xob)." Cov yav tas los caum tus nqi-zoo txhua yam / thermal kev ua tau zoo, thaum yav tas los sawv cev rau qhov kawg ntawm kev npaj cov khoom siv technology raws li high-purity, ib leeg-crystal functional khoom. Txawm hais tias sib koom tib yam tshuaj keeb kwm, ceramic-qib thiab semiconductor-qib SiC qhia meej qhov sib txawv hauv purity, siv lead ua qauv, thiab cov txheej txheem tsim khoom - tsis tau ob qho tib si ua rau muaj txiaj ntsig zoo rau kev tsim khoom lag luam thiab kev lag luam kev vam meej hauv lawv qhov chaw.
XKH yog lub tuam txhab high-tech tshwj xeeb hauv R & D thiab tsim cov khoom siv silicon carbide (SiC), muab kev tsim kho, kev ua haujlwm siab, thiab kev kho deg xws li cov khoom siv siab dawb huv SiC ceramics mus rau semiconductor-qib SiC crystals. Leveraging advanced npaj technologies thiab ntse ntau lawm kab, XKH muab tunable-kev ua tau zoo (90%-7N purity) thiab cov qauv-tswj (polycrystalline/single-crystalline) SiC cov khoom thiab cov kev daws rau cov neeg muas zaub nyob rau hauv semiconductor, tshiab zog, aerospace thiab lwm yam txiav-ntug teb. Peb cov khoom pom muaj kev siv dav hauv cov khoom siv semiconductor, tsheb fais fab, 5G kev sib txuas lus thiab lwm yam lag luam.
Cov hauv qab no yog cov khoom siv silicon carbide ceramic tsim los ntawm XKH.
Post lub sij hawm: Lub Xya hli ntuj-30-2025