Crystal dav hlau thiab siv lead ua taw qhia yog ob lub ntsiab lus tseem ceeb hauv crystallography, ze ze rau cov qauv siv lead ua hauv silicon-based integrated circuit technology.
1.Definition thiab Properties of Crystal Orientation
Crystal orientation sawv cev rau ib qho kev taw qhia tshwj xeeb hauv ib qho siv lead ua, feem ntau qhia los ntawm cov khoom siv lead ua taw qhia. Crystal orientation yog txhais los ntawm kev sib txuas ib qho ntawm ob lub ntsiab lus nyob rau hauv cov qauv siv lead ua, thiab nws muaj cov yam ntxwv hauv qab no: txhua qhov kev taw qhia siv lead ua muaj cov ntsiab lus tsis kawg ntawm lattice; ib qho kev qhia siv lead ua ib leeg tuaj yeem muaj ntau qhov sib npaug ntawm cov siv lead ua kev taw qhia ua ib tsev neeg siv lead ua; siv lead ua orientation tsev neeg npog tag nrho cov ntsiab lus lattice hauv cov siv lead ua.
Qhov tseem ceeb ntawm crystal orientation nyob rau hauv qhov qhia txog kev taw qhia ntawm atoms hauv cov siv lead ua. Piv txwv li, lub [111] siv lead ua orientation sawv cev rau ib qho kev taw qhia tshwj xeeb uas qhov kev kwv yees piv ntawm peb qhov kev sib koom tes yog 1: 1: 1.
2. Kev txhais thiab cov khoom ntawm Crystal Planes
Lub dav hlau siv lead ua yog lub dav hlau ntawm atom kev npaj nyob rau hauv ib lub siv lead ua, sawv cev los ntawm siv lead ua dav hlau indices (Miller indices). Piv txwv li, (111) qhia tias qhov sib cuam tshuam ntawm kev cuam tshuam ntawm lub dav hlau siv lead ua nyob rau hauv qhov sib piv ntawm 1: 1: 1. Lub dav hlau siv lead ua muaj cov khoom nram qab no: txhua lub dav hlau siv lead ua muaj cov ntsiab lus tsis kawg ntawm lattice; txhua lub dav hlau siv lead ua muaj tus lej tsis kawg ntawm cov dav hlau sib txuas ua ib lub dav hlau siv lead ua tsev neeg; siv lead ua dav hlau tsev neeg npog tag nrho cov siv lead ua.
Kev txiav txim siab ntawm Miller indices suav nrog kev cuam tshuam ntawm lub dav hlau siv lead ua ntawm txhua qhov kev sib koom ua ke, nrhiav lawv cov kev sib raug zoo, thiab hloov lawv mus rau qhov tsawg tshaj plaws tus lej sib piv. Piv txwv li, (111) siv lead ua dav hlau muaj kev cuam tshuam ntawm x, y, thiab z axes hauv qhov sib piv ntawm 1: 1: 1.
3. Kev sib raug zoo ntawm Crystal Planes thiab Crystal Orientation
Crystal dav hlau thiab siv lead ua orientation yog ob txoj kev sib txawv ntawm kev piav qhia cov qauv geometric ntawm cov siv lead ua. Crystal orientation yog hais txog kev npaj ntawm atoms raws li ib qho kev taw qhia, thaum lub dav hlau siv lead ua hais txog kev npaj ntawm atoms ntawm ib lub dav hlau tshwj xeeb. Ob qho no muaj qee qhov kev sib txuas lus, tab sis lawv sawv cev rau lub cev sib txawv.
Kev sib raug zoo tseem ceeb: Cov vector ib txwm ntawm lub dav hlau siv lead ua (piv txwv li, vector perpendicular mus rau lub dav hlau) sib raug rau cov qauv siv lead ua. Piv txwv li, ib txwm vector ntawm (111) siv lead ua dav hlau sib haum mus rau [111] siv lead ua orientation, txhais tau hais tias atomic kev npaj raws [111] kev taw qhia yog perpendicular rau lub dav hlau.
Hauv cov txheej txheem semiconductor, kev xaiv cov dav hlau siv lead ua cuam tshuam rau kev ua haujlwm ntawm cov cuab yeej. Piv txwv li, nyob rau hauv silicon-based semiconductors, feem ntau siv cov dav hlau siv lead ua yog lub dav hlau (100) thiab (111) vim tias lawv muaj cov txheej txheem sib txawv atomic thiab kev sib txuas lus sib txawv. Cov khoom xws li kev txav hluav taws xob thiab lub zog saum npoo sib txawv ntawm cov dav hlau siv lead ua sib txawv, cuam tshuam rau kev ua haujlwm thiab kev loj hlob ntawm cov khoom siv semiconductor.
4. Kev siv tswv yim hauv cov txheej txheem semiconductor
Hauv kev tsim khoom ntawm silicon-based semiconductor, siv lead ua orientation thiab siv lead ua dav hlau siv ntau yam:
Crystal Growth: Semiconductor crystals feem ntau loj hlob raws li cov qauv siv lead ua. Silicon crystals feem ntau loj hlob raws li [100] lossis [111] kev taw qhia vim tias kev ruaj khov thiab atomic kev npaj hauv cov kev taw qhia no yog qhov zoo rau kev loj hlob siv lead ua.
Etching txheej txheem: Hauv ntub dej etching, sib txawv siv lead ua dav hlau muaj qhov sib txawv etching tus nqi. Piv txwv li, etching tus nqi ntawm (100) thiab (111) dav hlau ntawm silicon txawv, ua rau anisotropic etching teebmeem.
Ntaus yam ntxwv: Cov khoom siv hluav taws xob hauv MOSFET cuam tshuam los ntawm lub dav hlau siv lead ua. Feem ntau, kev txav mus los yog siab dua ntawm (100) dav hlau, uas yog vim li cas niaj hnub silicon-based MOSFETs feem ntau siv (100) wafers.
Hauv cov ntsiab lus, cov dav hlau siv lead ua thiab cov qauv siv lead ua yog ob txoj hauv kev los piav qhia cov qauv ntawm cov muaju hauv crystallography. Crystal orientation sawv cev rau cov khoom taw qhia hauv cov siv lead ua, thaum lub dav hlau siv lead ua piav qhia cov dav hlau tshwj xeeb hauv cov siv lead ua. Ob lub ntsiab lus no muaj kev sib raug zoo hauv kev tsim khoom semiconductor. Kev xaiv ntawm cov dav hlau siv lead ua cuam tshuam ncaj qha rau cov khoom siv lub cev thiab tshuaj lom neeg, thaum siv lead ua orientation cuam tshuam rau kev loj hlob thiab kev ua cov txheej txheem. Kev nkag siab txog kev sib raug zoo ntawm cov dav hlau siv lead ua thiab kev taw qhia yog qhov tseem ceeb rau kev txhim kho cov txheej txheem semiconductor thiab txhim kho cov cuab yeej ua haujlwm.
Post lub sij hawm: Oct-08-2024