Cov dav hlau siv lead ua thiab kev taw qhia siv lead ua yog ob lub tswv yim tseem ceeb hauv crystallography, uas muaj feem cuam tshuam nrog cov qauv siv lead ua hauv cov thev naus laus zis sib xyaw ua ke raws li silicon.
1. Kev Txhais thiab Cov Khoom ntawm Crystal Orientation
Kev taw qhia ntawm cov siv lead ua sawv cev rau ib qho kev taw qhia tshwj xeeb hauv ib lub siv lead ua, feem ntau qhia los ntawm cov ntsuas kev taw qhia ntawm cov siv lead ua. Kev taw qhia ntawm cov siv lead ua yog txhais los ntawm kev txuas ob lub ntsiab lus lattice hauv cov qauv siv lead ua, thiab nws muaj cov yam ntxwv hauv qab no: txhua qhov kev taw qhia ntawm cov siv lead ua muaj ntau lub ntsiab lus lattice tsis kawg; ib qho kev taw qhia ntawm cov siv lead ua tuaj yeem muaj ntau qhov kev taw qhia ntawm cov siv lead ua sib luag uas tsim cov tsev neeg kev taw qhia ntawm cov siv lead ua; tsev neeg kev taw qhia ntawm cov siv lead ua npog txhua lub ntsiab lus lattice hauv cov siv lead ua.
Qhov tseem ceeb ntawm kev taw qhia siv lead ua yog qhia txog kev teeb tsa ntawm cov atoms hauv cov siv lead ua. Piv txwv li, [111] kev taw qhia siv lead ua sawv cev rau qhov kev taw qhia tshwj xeeb uas qhov piv ntawm peb txoj kab sib koom ua ke yog 1: 1: 1.
2. Kev Txhais thiab Cov Khoom ntawm Crystal Planes
Ib lub dav hlau siv lead ua yog ib lub dav hlau ntawm kev npaj atom hauv ib lub siv lead ua, uas sawv cev los ntawm cov ntsuas dav hlau siv lead ua (Miller indices). Piv txwv li, (111) qhia tias qhov sib piv ntawm cov intercepts ntawm lub dav hlau siv lead ua ntawm cov coordinate axes yog nyob rau hauv qhov sib piv ntawm 1: 1: 1. Lub dav hlau siv lead ua muaj cov yam ntxwv hauv qab no: txhua lub dav hlau siv lead ua muaj cov lej tsis kawg ntawm cov ntsiab lus lattice; txhua lub dav hlau siv lead ua muaj cov lej tsis kawg ntawm cov dav hlau sib luag tsim ib tsev neeg siv lead ua; tsev neeg siv lead ua npog tag nrho cov siv lead ua.
Kev txiav txim siab ntawm Miller indices suav nrog kev siv cov intercepts ntawm lub dav hlau siv lead ua ke ntawm txhua qhov coordinate axis, nrhiav lawv cov reciprocals, thiab hloov lawv mus rau hauv qhov sib piv tsawg tshaj plaws. Piv txwv li, lub dav hlau siv lead ua ke (111) muaj intercepts ntawm x, y, thiab z axes hauv qhov sib piv ntawm 1: 1: 1.
3. Kev Sib Raug Zoo Ntawm Cov Dav Hlau Crystal thiab Kev Taw Qhia Crystal
Cov dav hlau siv lead ua thiab cov qauv siv lead ua yog ob txoj hauv kev sib txawv los piav qhia txog cov qauv geometric ntawm cov siv lead ua. Cov qauv siv lead ua hais txog kev teeb tsa ntawm cov atoms raws li ib qho kev taw qhia tshwj xeeb, thaum lub dav hlau siv lead ua hais txog kev teeb tsa ntawm cov atoms ntawm ib qho kev taw qhia tshwj xeeb. Ob qho no muaj qee qhov kev sib raug zoo, tab sis lawv sawv cev rau cov tswv yim sib txawv ntawm lub cev.
Kev sib raug zoo tseem ceeb: Tus vector ib txwm ntawm lub dav hlau siv lead ua (piv txwv li, tus vector perpendicular rau lub dav hlau ntawd) sib raug rau qhov kev taw qhia siv lead ua. Piv txwv li, tus vector ib txwm ntawm (111) lub dav hlau siv lead ua sib raug rau [111] kev taw qhia siv lead ua, txhais tau tias qhov kev npaj atomic raws li qhov kev taw qhia [111] yog perpendicular rau lub dav hlau ntawd.
Hauv cov txheej txheem semiconductor, kev xaiv cov dav hlau siv lead ua rau muaj kev cuam tshuam loj heev rau kev ua haujlwm ntawm cov khoom siv. Piv txwv li, hauv cov semiconductors uas siv silicon, cov dav hlau siv lead ua feem ntau yog cov dav hlau (100) thiab (111) vim tias lawv muaj cov kev npaj atomic sib txawv thiab cov txheej txheem sib txuas hauv cov lus qhia sib txawv. Cov khoom xws li kev txav mus los ntawm hluav taws xob thiab lub zog ntawm qhov chaw sib txawv ntawm cov dav hlau siv lead ua sib txawv, cuam tshuam rau kev ua haujlwm thiab kev loj hlob ntawm cov khoom siv semiconductor.
4. Cov Kev Siv Ua Haujlwm Hauv Cov Txheej Txheem Semiconductor
Hauv kev tsim khoom siv semiconductor raws li silicon, kev taw qhia siv lead ua thiab cov dav hlau siv lead ua siv tau ntau yam:
Kev Loj Hlob ntawm Cov Siv Crystal: Cov siv lead ua semiconductor feem ntau yog loj hlob raws cov kev taw qhia tshwj xeeb ntawm cov siv lead ua. Cov siv lead ua silicon feem ntau loj hlob raws cov kev taw qhia [100] lossis [111] vim tias qhov ruaj khov thiab kev npaj atomic hauv cov kev taw qhia no yog qhov zoo rau kev loj hlob ntawm cov siv lead ua.
Cov Txheej Txheem Etching: Hauv kev etching ntub, cov dav hlau siv lead ua sib txawv muaj cov nqi etching sib txawv. Piv txwv li, cov nqi etching ntawm (100) thiab (111) dav hlau ntawm silicon sib txawv, ua rau muaj cov teebmeem etching anisotropic.
Cov Yam Ntxwv ntawm Lub Cuab Yeej Siv: Kev txav mus los ntawm cov hluav taws xob hauv MOSFET cov khoom siv yog cuam tshuam los ntawm lub dav hlau siv lead ua. Feem ntau, kev txav mus los siab dua ntawm lub dav hlau (100), yog vim li cas cov MOSFETs niaj hnub no feem ntau siv (100) wafers.
Hauv kev xaus, cov dav hlau siv lead ua thiab cov kev taw qhia siv lead ua yog ob txoj hauv kev tseem ceeb los piav qhia txog cov qauv ntawm cov siv lead ua hauv crystallography. Kev taw qhia siv lead ua sawv cev rau cov khoom siv taw qhia hauv cov siv lead ua, thaum cov dav hlau siv lead ua piav qhia txog cov dav hlau tshwj xeeb hauv cov siv lead ua. Ob lub tswv yim no muaj feem cuam tshuam ze rau kev tsim khoom semiconductor. Kev xaiv cov dav hlau siv lead ua cuam tshuam ncaj qha rau cov khoom siv lub cev thiab tshuaj lom neeg, thaum kev taw qhia siv lead ua cuam tshuam rau kev loj hlob ntawm cov siv lead ua thiab cov txheej txheem ua. Kev nkag siab txog kev sib raug zoo ntawm cov dav hlau siv lead ua thiab cov kev taw qhia yog qhov tseem ceeb rau kev ua kom zoo dua cov txheej txheem semiconductor thiab txhim kho kev ua haujlwm ntawm cov khoom siv.
Lub sijhawm tshaj tawm: Lub Kaum Hli-08-2024