Nyob rau hauv txoj kev loj hlob ntawm kev lag luam semiconductor, polished ib leeg siv lead uasilicon wafersua lub luag haujlwm tseem ceeb. Lawv ua cov khoom siv tseem ceeb rau kev tsim ntau yam khoom siv microelectronic. Los ntawm complex thiab meej kev sib xyaw ua ke mus rau high-speed microprocessors thiab multifunctional sensors, polished ib leeg siv lead uasilicon wafersyog qhov tseem ceeb. Qhov sib txawv ntawm lawv cov kev ua tau zoo thiab cov specifications ncaj qha cuam tshuam qhov zoo thiab kev ua tau zoo ntawm cov khoom kawg. Hauv qab no yog cov kev qhia tshwj xeeb thiab cov kev txwv ntawm polished ib leeg siv lead ua silicon wafers:

Txoj kab uas hla: Qhov loj ntawm semiconductor ib leeg siv lead ua silicon wafers yog ntsuas los ntawm lawv txoj kab uas hla, thiab lawv tuaj nyob rau hauv ntau yam specifications. Cov kab uas muaj xws li 2 nti (50.8mm), 3 nti (76.2mm), 4 nti (100mm), 5 nti (125mm), 6 nti (150mm), 8 nti (200mm), 12 nti (300mm), thiab 18 nti (450mm). Txawv diameters haum rau ntau yam kev xav tau ntau lawm thiab cov txheej txheem yuav tsum tau ua. Piv txwv li, me me txoj kab uas hla wafers feem ntau yog siv rau tshwj xeeb, me me-ntim microelectronic li, thaum loj txoj kab uas hla wafers qhia ntau lawm efficiency thiab nqi zoo nyob rau hauv loj-scale integrated circuit manufacturing. Cov kev cai saum npoo yog categorized li ib sab polished (SSP) thiab ob sab polished (DSP). Ib leeg-sab polished wafers yog siv rau cov khoom siv uas xav tau siab flatness ntawm ib sab, xws li qee qhov sensors. Ob chav-sab polished wafers feem ntau yog siv rau kev sib xyaw ua ke thiab lwm yam khoom uas yuav tsum tau muaj siab precision ntawm ob qhov chaw. Deg Yuav Tsum Tau (Tiav): Ib leeg-sab polished SSP / Ob sab polished DSP.

Hom / Dopant: (1) N-hom Semiconductor: Thaum qee yam impurity atoms tau nkag mus rau hauv cov khoom siv hluav taws xob, lawv hloov nws cov conductivity. Piv txwv li, thaum pentavalent ntsiab zoo li nitrogen (N), phosphorus (P), arsenic (As), los yog antimony (Sb) ntxiv, lawv cov valence electrons tsim covalent bonds nrog cov valence electrons ntawm ib puag ncig silicon atoms, tawm hauv ib qho hluav taws xob ntxiv tsis khi los ntawm covalent daim ntawv cog lus. Qhov no ua rau ib qho electron concentration ntau dua qhov concentration, tsim N-hom semiconductor, tseem hu ua electron-type semiconductor. N-hom semiconductors yog qhov tseem ceeb hauv kev tsim cov khoom siv uas xav tau cov khoom siv hluav taws xob ua cov khoom siv tseem ceeb, xws li cov khoom siv hluav taws xob. (2) P-hom Semiconductor: Thaum trivalent impurity ntsiab xws li boron (B), gallium (Ga), los yog indium (In) tau nkag mus rau hauv silicon semiconductor, valence electrons ntawm impurity atoms tsim covalent bonds nrog ib puag ncig silicon atoms, tab sis lawv tsis muaj tsawg kawg yog ib qho khoom siv hluav taws xob thiab tsis tuaj yeem tsim ib daim ntawv cog lus. Qhov no ua rau lub qhov concentration ntau dua li cov electron concentration, tsim P-hom semiconductor, tseem hu ua lub qhov-hom semiconductor. P-hom semiconductors ua lub luag haujlwm tseem ceeb hauv kev tsim cov khoom siv qhov twg qhov chaw ua haujlwm tseem ceeb, xws li diodes thiab qee qhov transistors.

Resistivity: Resistivity yog ib qho tseem ceeb ntawm lub cev uas ntsuas cov hluav taws xob conductivity ntawm polished ib leeg siv lead ua silicon wafers. Nws tus nqi qhia txog cov khoom siv kev ua tau zoo. Qhov qis dua qhov resistivity, qhov zoo dua qhov conductivity ntawm silicon wafer; Ntawm qhov tod tes, qhov siab dua qhov resistivity, qhov conductivity tsis zoo. Lub resistivity ntawm silicon wafers yog txiav txim los ntawm lawv cov khoom siv hauv paus, thiab qhov kub thiab txias muaj qhov cuam tshuam loj heev. Feem ntau, cov resistivity ntawm silicon wafers nce nrog kub. Hauv kev siv cov tswv yim, cov khoom siv microelectronic sib txawv muaj cov kev xav tau sib txawv rau cov silicon wafers. Piv txwv li, wafers siv hauv kev tsim hluav taws xob sib xyaw ua ke xav tau kev tswj hwm ntawm kev tiv thaiv kom ruaj khov thiab txhim khu kev qha ntaus ntawv.

Kev taw qhia: Cov siv lead ua kev taw qhia ntawm lub wafer sawv cev rau cov crystallographic kev taw qhia ntawm silicon lattice, feem ntau teev los ntawm Miller indices xws li (100), (110), (111), thiab lwm yam. Cov kev taw qhia siv lead ua sib txawv muaj cov khoom sib txawv ntawm lub cev, xws li kab ceev, uas txawv raws li kev taw qhia. Qhov sib txawv no tuaj yeem cuam tshuam rau wafer qhov kev ua tau zoo hauv cov kauj ruam tom ntej thiab kev ua haujlwm kawg ntawm cov khoom siv hluav taws xob microelectronic. Hauv kev tsim cov txheej txheem, xaiv cov silicon wafer nrog cov kev taw qhia tsim nyog rau cov khoom siv sib txawv tuaj yeem ua kom zoo dua cov cuab yeej, txhim kho kev tsim khoom, thiab txhim kho cov khoom zoo.

Pav ca / ​​Notch: Lub tiaj tus ntug (Pov) lossis V-notch (Notch) ntawm lub voj voog ntawm silicon wafer plays lub luag haujlwm tseem ceeb hauv kev sib xyaw ua ke siv lead ua thiab yog ib qho tseem ceeb hauv kev tsim thiab ua cov wafer. Wafers ntawm txawv diameters sib txawv raws li cov qauv sib txawv rau qhov ntev ntawm lub tiaj tus los yog Notch. Cov ntug kev sib dhos tau muab faib ua thawj lub tiaj tiaj thiab theem nrab tiaj tiaj. Lub tiaj tiaj yog tsuas yog siv los txiav txim siab qhov yooj yim siv lead ua orientation thiab ua cov ntaub ntawv siv ntawm wafer, thaum lub tiaj tus thib ob pab ntxiv rau hauv kev sib raug zoo thiab kev ua tiav, kom ntseeg tau tias kev ua haujlwm raug thiab sib xws ntawm wafer thoob plaws hauv cov kab ntau lawm.

Thickness: Lub thickness ntawm ib tug wafer feem ntau teev nyob rau hauv micrometers (μm), nrog ntau thickness ranges ntawm 100μm thiab 1000μm. Wafers ntawm txawv thicknesses yog haum rau ntau hom microelectronic li. Thinner wafers (piv txwv li, 100μm - 300μm) feem ntau yog siv rau kev tsim cov chips uas yuav tsum tau tswj cov tuab tuab, txo qhov loj thiab qhov hnyav ntawm cov nti thiab ua kom muaj kev sib xyaw ua ke. Thicker wafers (piv txwv li, 500μm - 1000μm) yog siv dav hauv cov khoom siv uas yuav tsum tau muaj zog dua txhua yam, xws li cov khoom siv hluav taws xob semiconductor, kom muaj kev ruaj ntseg thaum ua haujlwm.

Nto Roughness: Nto roughness yog ib qho tseem ceeb tsis zoo rau kev soj ntsuam wafer zoo, raws li nws ncaj qha cuam tshuam qhov adhesion ntawm wafer thiab tom qab tso cov ntaub ntawv nyias nyias, nrog rau kev ua haujlwm hluav taws xob ntawm lub cuab yeej. Nws yog feem ntau qhia raws li lub hauv paus txhais tau tias square (RMS) roughness (hauv nm). Qhov qis ntawm qhov roughness txhais tau hais tias lub wafer nto yog smoother, uas yuav pab txo cov phenomena xws li electron scattering thiab txhim kho cov cuab yeej kev ua tau zoo thiab kev ntseeg tau. Nyob rau hauv cov txheej txheem tsim khoom semiconductor, cov kev xav tau ntawm qhov roughness tau dhau los ua nruj, tshwj xeeb tshaj yog rau high-end integrated circuit manufacturing, qhov chaw roughness yuav tsum tau tswj mus rau ob peb nanometers los yog qis dua.

Tag Nrho Thickness Variation (TTV): Tag nrho cov thickness variation yog hais txog qhov sib txawv ntawm qhov siab tshaj plaws thiab qhov tsawg kawg nkaus thicknesses ntsuas ntawm ntau lub ntsiab lus ntawm wafer nto, feem ntau hais nyob rau hauv μm. Lub siab TTV yuav ua rau muaj kev sib txawv hauv cov txheej txheem xws li photolithography thiab etching, cuam tshuam cov cuab yeej kev ua tau zoo thiab cov txiaj ntsig. Yog li ntawd, tswj TTV thaum lub sij hawm tsim khoom wafer yog ib kauj ruam tseem ceeb hauv kev ua kom cov khoom zoo. Rau high-precision microelectronic ntaus ntawv tsim, TTV feem ntau yuav tsum tau nyob rau hauv ob peb micrometers.

Hneev: Hneev hais txog qhov sib txawv ntawm qhov wafer nto thiab lub dav hlau zoo tagnrho, feem ntau ntsuas hauv μm. Cov wafers nrog kev hneev ntau dhau tuaj yeem ua rau tawg lossis muaj kev ntxhov siab tsis sib xws thaum lub sijhawm ua haujlwm tom ntej, cuam tshuam rau kev tsim khoom thiab cov khoom zoo. Tshwj xeeb tshaj yog nyob rau hauv cov txheej txheem uas yuav tsum tau siab flatness, xws li photolithography, bowing yuav tsum tau tswj nyob rau hauv ib tug tshwj xeeb ntau yam kom paub meej qhov tseeb thiab sib xws ntawm photolithographic qauv.

Warp: Warp qhia qhov sib txawv ntawm qhov chaw wafer thiab cov duab zoo nkauj kheej kheej, kuj ntsuas hauv μm. Zoo ib yam li hneev nti, warp yog ib qho tseem ceeb qhia ntawm wafer flatness. Ntau dhau warp tsis tsuas yog cuam tshuam qhov kev tso kawm ntawm qhov tseeb ntawm wafer hauv cov khoom siv tab sis kuj tuaj yeem ua rau muaj teeb meem thaum lub sij hawm ntim cov txheej txheem, xws li kev sib txuas tsis zoo ntawm cov nti thiab cov khoom ntim khoom, uas ua rau muaj kev ntseeg siab ntawm cov cuab yeej. Nyob rau hauv high-end semiconductor manufacturing, warp yuav tsum tau ua nruj me ntsis raws li qhov xav tau ntawm advanced nti manufacturing thiab ntim txheej txheem.

Ntug Profile: Ntug profile ntawm wafer yog qhov tseem ceeb rau nws cov txheej txheem tom ntej thiab tuav. Nws feem ntau tau teev tseg los ntawm Edge Exclusion Zone (EEZ), uas txhais tau qhov kev ncua deb ntawm ntug wafer uas tsis muaj kev tso cai. Ib qho qauv tsim qauv zoo nkauj thiab cov EEZ kev tswj xyuas meej pab kom tsis txhob muaj qhov tsis xws luag, kev ntxhov siab, thiab lwm yam teeb meem thaum ua, txhim kho tag nrho wafer zoo thiab tawm los. Hauv qee cov txheej txheem tsim khoom siab heev, ntug profile precision yuav tsum nyob rau ntawm qib micron.

Particle Count: Tus naj npawb thiab qhov loj me ntawm cov khoom siv ntawm qhov chaw wafer cuam tshuam rau kev ua haujlwm ntawm microelectronic li. Ntau dhau los yog cov khoom loj tuaj yeem ua rau cov cuab yeej tsis ua haujlwm, xws li luv luv Circuit Court lossis to, txo cov khoom tawm los. Yog li ntawd, kev suav particle feem ntau yog ntsuas los ntawm kev suav cov khoom hauv ib cheeb tsam, xws li cov khoom loj dua 0.3μm. Kev tswj nruj ntawm cov khoom suav thaum lub sij hawm tsim khoom wafer yog ib qho tseem ceeb rau kev ua kom cov khoom zoo. Cov thev naus laus zis tu siab tshaj plaws thiab ib puag ncig kev tsim khoom huv si yog siv los txo cov kab mob me me rau ntawm qhov chaw wafer.

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