Nyias-film lithium tantalate (LTOI) cov ntaub ntawv tau tshwm sim los ua lub zog tshiab tseem ceeb hauv kev sib koom ua ke optics. Xyoo no, ntau qhov kev ua haujlwm siab ntawm LTOI modulators tau luam tawm, nrog cov khoom zoo LTOI wafers muab los ntawm Xin Ou los ntawm Shanghai Institute of Microsystem thiab Information Technology, thiab cov txheej txheem zoo waveguide etching txheej txheem tsim los ntawm xibfwb Kippenberg pawg ntawm EPFL , Switzerland. Lawv txoj kev sib koom tes tau nthuav tawm cov txiaj ntsig zoo. Tsis tas li ntawd, pawg tshawb fawb los ntawm Zhejiang University coj los ntawm xibfwb Liu Liu thiab Harvard University coj los ntawm xibfwb Loncar kuj tau tshaj tawm txog kev kub ceev, kev ruaj ntseg LTOI modulators.
Raws li ib tus txheeb ze ze ntawm nyias zaj duab xis lithium niobate (LNOI), LTOI khaws cov kev hloov pauv siab ceev thiab cov yam ntxwv qis ntawm lithium niobate thaum tseem muab cov txiaj ntsig zoo xws li tus nqi qis, qis birefringence, thiab txo cov teebmeem photorefractive. Kev sib piv ntawm cov yam ntxwv tseem ceeb ntawm ob cov ntaub ntawv tau nthuav tawm hauv qab no.
◆ Zoo sib xws ntawm Lithium Tantalate (LTOI) thiab Lithium Niobate (LNOI)
①Refractive Index:2.12 vs 2.21 TSİ
Qhov no txhais tau hais tias ib hom waveguide qhov ntev, dabtsi yog khoov vojvoog, thiab cov khoom siv passive feem ntau raws li ob qho tib si cov ntaub ntawv zoo sib xws, thiab lawv cov kev sib txuas fiber ntau kuj sib piv. Nrog zoo waveguide etching, ob qho tib si cov ntaub ntawv tuaj yeem ua tiav qhov poob ntawm<0.1 dB/cm. EPFL qhia txog kev poob ntawm 5.6 dB / m.
②Electro-optic Coefficient:30.5 pm / V vs 30.9 pm / V
Lub modulation efficiency yog piv rau ob qho tib si cov ntaub ntawv, nrog rau kev hloov kho raws li Pockels nyhuv, tso cai rau siab bandwidth. Tam sim no, LTOI modulators muaj peev xwm ua tiav 400G ib txoj kab kev ua haujlwm, nrog lub bandwidth tshaj 110 GHz.
③Bandgap:3.93 eV vs 3.78 eV
Ob qho khoom siv muaj lub qhov rais dav dav, txhawb cov ntawv thov los ntawm pom mus rau infrared wavelengths, tsis muaj kev nqus hauv kev sib txuas lus.
④Qhov thib ob-Order Nonlinear Coefficient (d33):21 p.m./V vs 27pm/V
Yog tias siv rau cov ntawv tsis sib xws xws li thib ob kev sib haum xeeb (SHG), qhov sib txawv-zaum zaus (DFG), lossis qhov sib npaug zaus (SFG), qhov kev hloov pauv ntawm ob cov ntaub ntawv yuav tsum zoo sib xws.
◆ Tus nqi zoo ntawm LTOI vs LNOI
①Tsawg Wafer Npaj Tus Nqi
LNOI xav kom Nws ion implantation rau txheej sib cais, uas muaj tsawg ionization efficiency. Nyob rau hauv sib piv, LTOI siv H ion implantation rau kev sib cais, zoo ib yam li SOI, nrog ib tug delamination efficiency tshaj 10 npaug tshaj LNOI. Qhov no ua rau muaj qhov sib txawv ntawm tus nqi tseem ceeb rau 6-nti wafers: $ 300 vs. $ 2000, txo tus nqi 85%.
②Nws twb tau siv dav hauv kev lag luam khoom siv hluav taws xob rau cov lim dej acoustic(750,000 units ib xyoos twg, siv los ntawm Samsung, Kua, Sony, thiab lwm yam).
◆ Kev Ua Tau Zoo ntawm LTOI vs LNOI
①Cov khoom siv tsawg dua, Cov nyhuv Photorefractive tsis muaj zog, ntau ruaj khov
Thaum xub thawj, LNOI modulators feem ntau nthuav tawm kev tsis ncaj ncees taw tes drift, feem ntau yog vim cov nqi sib txuam los ntawm qhov tsis xws luag ntawm lub waveguide interface. Yog tias tsis kho, cov cuab yeej no tuaj yeem siv sijhawm ntev txog ib hnub kom ruaj khov. Txawm li cas los xij, ntau txoj hauv kev tau tsim los daws qhov teeb meem no, xws li siv hlau oxide cladding, substrate polarization, thiab annealing, ua rau qhov teeb meem loj tam sim no.
Hauv qhov sib piv, LTOI muaj tsawg dua cov khoom tsis xws luag, ua rau txo qis drift phenomena. Txawm tias tsis muaj kev ua haujlwm ntxiv, nws qhov chaw ua haujlwm tseem nyob ruaj khov. Cov txiaj ntsig zoo sib xws tau tshaj tawm los ntawm EPFL, Harvard, thiab Zhejiang University. Txawm li cas los xij, kev sib piv feem ntau siv cov LNOI modulators uas tsis kho, uas tej zaum yuav tsis ncaj ncees; nrog kev ua haujlwm, kev ua haujlwm ntawm ob qho khoom siv yuav zoo sib xws. Qhov sib txawv tseem ceeb nyob hauv LTOI xav tau tsawg dua cov kauj ruam ua tiav.
②Qhov qis dua Birefringence: 0.004 vs 0.07
Lub siab birefringence ntawm lithium niobate (LNOI) tuaj yeem nyuaj rau qee lub sijhawm, tshwj xeeb tshaj yog vim kev khoov waveguide tuaj yeem ua rau hom kev sib txuas thiab hom hybridization. Hauv nyias LNOI, khoov hauv lub waveguide tuaj yeem hloov pauv TE lub teeb rau hauv TM lub teeb, ua rau nyuaj rau kev tsim cov khoom siv tsis zoo, xws li cov ntxaij lim dej.
Nrog LTOI, qhov qis birefringence tshem tawm qhov teeb meem no, uas ua rau nws yooj yim dua los tsim cov khoom siv ua haujlwm siab. EPFL tseem tau tshaj tawm cov txiaj ntsig tseem ceeb, leveraging LTOI's low birefringence thiab tsis muaj hom-hloov kom ua tiav ultra-wide-spectrum electro-optic zaus zuag tiam nrog tiaj dispersion tswj nyob rau hauv ib tug dav spectral ntau yam. Qhov no ua rau muaj kev zoo siab 450 nm comb bandwidth nrog ntau tshaj 2000 comb kab, ob peb zaug loj dua qhov tuaj yeem ua tiav nrog lithium niobate. Piv rau Kerr optical zaus combs, electro-optic combs muab qhov zoo ntawm qhov pib-dawb thiab ruaj khov dua, txawm tias lawv xav tau lub zog hluav taws xob microwave input.
③Siab dua Optical Damage Threshold
Qhov kev puas tsuaj kho qhov muag ntawm LTOI yog ob npaug ntawm LNOI, muab qhov zoo dua hauv cov ntawv thov tsis muaj kab (thiab tej zaum yav tom ntej Coherent Perfect Absorption (CPO) daim ntawv thov). Tam sim no optical module fais fab theem tsis zoo li yuav ua rau lithium niobate puas.
④Low Raman Effect
Qhov no kuj muaj feem xyuam rau cov ntawv thov nonlinear. Lithium niobate muaj zog Raman nyhuv, uas nyob rau hauv Kerr optical zaus zuag daim ntaub ntawv tuaj yeem ua rau lub teeb Raman tsis xav tau thiab tau txais kev sib tw, tiv thaiv x-txiav lithium niobate optical zaus combs los ntawm kev mus txog lub xeev soliton. Nrog LTOI, cov nyhuv Raman tuaj yeem cuam tshuam los ntawm kev tsim qauv siv lead ua, tso cai rau x-txiav LTOI kom ua tiav cov khoom siv kho qhov muag ntau zaus. Qhov no ua rau kev sib koom ua ke ntawm monolithic ntawm soliton optical zaus combs nrog kev kub ceev modulators, ib qho kev ua tsis tiav nrog LNOI.
◆ Vim li cas thiaj tsis Nyias-Film Lithium Tantalate (LTOI) tau hais dhau los?
Lithium tantalate muaj Curie kub qis dua lithium niobate (610 ° C vs. 1157 ° C). Ua ntej txoj kev loj hlob ntawm heterointegration technology (XOI), lithium niobate modulators tau tsim siv titanium diffusion, uas yuav tsum tau annealing ntawm tshaj 1000 ° C, ua LTOI tsis haum. Txawm li cas los xij, nrog kev hloov pauv niaj hnub no mus rau kev siv insulator substrates thiab waveguide etching rau modulator tsim, qhov kub ntawm 610 ° C Curie yog ntau tshaj qhov txaus.
◆ Yuav Nyias-Film Lithium Tantalate (LTOI) Yuav Hloov Nyias-Film Lithium Niobate (TFLN)?
Raws li kev tshawb fawb tam sim no, LTOI muab cov txiaj ntsig zoo hauv kev ua haujlwm tsis zoo, kev ruaj ntseg, thiab cov nqi tsim khoom loj, tsis muaj qhov tsis zoo. Txawm li cas los xij, LTOI tsis dhau lithium niobate hauv kev ua haujlwm ntawm kev hloov kho, thiab teeb meem kev ruaj ntseg nrog LNOI tau paub cov kev daws teeb meem. Rau kev sib txuas lus DR modules, muaj tsawg kawg nkaus thov rau cov khoom siv passive (thiab silicon nitride tuaj yeem siv yog tias xav tau). Tsis tas li ntawd, kev nqis peev tshiab yuav tsum tau rov tsim cov txheej txheem wafer-theem etching, cov txheej txheem heterointegration, thiab kev ntsuam xyuas kev ntseeg tau (qhov nyuaj nrog lithium niobate etching tsis yog waveguide tab sis ua tiav high-yield wafer-level etching). Yog li ntawd, txhawm rau sib tw nrog lithium niobate txoj haujlwm tsim, LTOI yuav tsum tau nthuav tawm cov txiaj ntsig ntxiv. Kev kawm, txawm li cas los xij, LTOI muaj cov kev tshawb fawb tseem ceeb rau kev sib koom ua ke ntawm cov tshuab hluav taws xob, xws li octave-spanning electro-optic combs, PPLT, soliton thiab AWG wavelength division devices, thiab array modulators.
Post lub sij hawm: Nov-08-2024