Nrog rau kev txhim kho tas mus li ntawm cov thev naus laus zis semiconductor, hauv kev lag luam semiconductor thiab txawm tias kev lag luam photovoltaic, cov kev cai rau qhov zoo ntawm qhov chaw ntawm wafer substrate lossis epitaxial sheet kuj nruj heev. Yog li, cov kev cai zoo rau wafers yog dab tsi? Kev nojsapphire waferPiv txwv li, cov ntsuas twg siv tau los ntsuas qhov zoo ntawm cov wafers?
Cov ntsuas kev ntsuam xyuas wafers yog dab tsi?
Peb yam qhia
Rau cov sapphire wafers, nws cov ntsuas kev ntsuam xyuas yog qhov sib txawv ntawm qhov tuab tag nrho (TTV), khoov (Bow) thiab Warp (Warp). Peb qhov kev ntsuas no ua ke qhia txog qhov tiaj tiaj thiab qhov tuab sib xws ntawm cov silicon wafer, thiab tuaj yeem ntsuas qhov degree ntawm ripple ntawm cov wafer. Qhov corrugation tuaj yeem ua ke nrog qhov tiaj tiaj los ntsuas qhov zoo ntawm qhov chaw wafer.
TTV, BOW, Warp yog dab tsi?
TTV (Tag Nrho Thickness Variation)
TTV yog qhov sib txawv ntawm qhov tuab siab tshaj plaws thiab qhov tuab tsawg tshaj plaws ntawm lub wafer. Cov txheej txheem no yog ib qho tseem ceeb uas siv los ntsuas qhov tuab ntawm lub wafer. Hauv cov txheej txheem semiconductor, qhov tuab ntawm lub wafer yuav tsum sib npaug heev thoob plaws tag nrho qhov chaw. Kev ntsuas feem ntau yog ua ntawm tsib qhov chaw ntawm lub wafer thiab qhov sib txawv raug suav. Thaum kawg, tus nqi no yog lub hauv paus tseem ceeb rau kev txiav txim siab qhov zoo ntawm lub wafer.
Hneev
Hneev hauv kev tsim khoom semiconductor txhais tau tias qhov khoov ntawm lub wafer, tso qhov kev ncua deb ntawm qhov nruab nrab ntawm lub wafer unclamped thiab lub dav hlau siv. Lo lus no tej zaum los ntawm kev piav qhia txog cov duab ntawm ib yam khoom thaum nws khoov, zoo li cov duab nkhaus ntawm lub hneev. Tus nqi Hneev yog txhais los ntawm kev ntsuas qhov sib txawv ntawm qhov nruab nrab thiab ntug ntawm lub silicon wafer. Tus nqi no feem ntau yog qhia hauv micrometers (µm).
Ua kom nkhaus
Warp yog ib qho khoom thoob ntiaj teb ntawm cov wafers uas ntsuas qhov sib txawv ntawm qhov siab tshaj plaws thiab qhov tsawg kawg nkaus ntawm nruab nrab ntawm cov wafer uas tsis muaj clamped thiab lub dav hlau siv. Sawv cev rau qhov deb ntawm qhov chaw ntawm silicon wafer mus rau lub dav hlau.
Qhov txawv ntawm TTV, Bow, thiab Warp yog dab tsi?
TTV tsom mus rau kev hloov pauv ntawm qhov tuab thiab tsis txhawj xeeb txog qhov khoov lossis kev cuam tshuam ntawm lub wafer.
Hneev tsom mus rau qhov khoov tag nrho, feem ntau xav txog qhov khoov ntawm qhov chaw nruab nrab thiab ntug.
Warp muaj ntau yam ntxiv, suav nrog kev khoov thiab ntswj ntawm tag nrho cov wafer nto.
Txawm hais tias peb yam kev ntsuas no muaj feem cuam tshuam rau cov duab thiab cov khoom geometric ntawm silicon wafer, lawv raug ntsuas thiab piav qhia sib txawv, thiab lawv qhov cuam tshuam rau cov txheej txheem semiconductor thiab kev ua wafer kuj sib txawv.
Qhov me dua peb qhov parameter, qhov zoo dua, thiab qhov loj dua qhov parameter, qhov ntau dua qhov cuam tshuam tsis zoo rau cov txheej txheem semiconductor. Yog li ntawd, ua tus kws kho semiconductor, peb yuav tsum paub txog qhov tseem ceeb ntawm cov qauv wafer profile rau tag nrho cov txheej txheem txheej txheem, ua cov txheej txheem semiconductor, yuav tsum tau them sai sai rau cov ntsiab lus.
(kev tswj xyuas)
Lub sijhawm tshaj tawm: Lub Rau Hli-24-2024