Loj hlob ib txheej ntxiv ntawm silicon atoms ntawm silicon wafer substrate muaj ntau yam zoo:
Hauv CMOS silicon cov txheej txheem, kev loj hlob ntawm epitaxial (EPI) ntawm wafer substrate yog cov txheej txheem tseem ceeb.
1 、 Txhim kho crystal zoo
Thawj substrate defects thiab impurities: Thaum lub sij hawm tsim cov txheej txheem, lub wafer substrate tej zaum yuav muaj tej yam tsis xws luag thiab impurities. Kev loj hlob ntawm epitaxial txheej tuaj yeem tsim cov txheej txheem zoo monocrystalline silicon uas tsis muaj qhov tsis xws luag thiab impurities ntawm lub substrate, uas yog qhov tseem ceeb rau kev tsim khoom siv tom ntej.
Uniform siv lead ua qauv: Epitaxial kev loj hlob ua kom muaj cov qauv siv lead ua ntau dua, txo qhov cuam tshuam ntawm cov ciam teb thiab qhov tsis xws luag hauv cov khoom siv substrate, yog li txhim kho tag nrho cov siv lead ua zoo ntawm wafer.
2, txhim kho hluav taws xob ua haujlwm.
Optimizing cov yam ntxwv ntawm cov cuab yeej: Los ntawm kev loj hlob ib txheej epitaxial ntawm lub substrate, doping concentration thiab hom silicon tuaj yeem tswj tau meej, optimizing hluav taws xob ua haujlwm ntawm lub cuab yeej. Piv txwv li, cov doping ntawm epitaxial txheej tuaj yeem raug kho kom zoo los tswj qhov pib voltage ntawm MOSFETs thiab lwm yam hluav taws xob tsis zoo.
Txo cov dej xau tam sim no: Cov txheej txheem zoo epitaxial muaj qhov qis qis, uas yuav pab txo cov dej ntws tawm hauv cov khoom siv, yog li txhim kho cov cuab yeej ua haujlwm thiab kev ntseeg tau.
3, txhim kho hluav taws xob ua haujlwm.
Txo Cov Cim Loj: Hauv cov txheej txheem me me (xws li 7nm, 5nm), qhov loj me ntawm cov khoom siv txuas ntxiv mus, yuav tsum tau ua kom zoo dua thiab cov khoom zoo. Epitaxial kev loj hlob thev naus laus zis tuaj yeem ua tau raws li cov kev xav tau no, txhawb kev tsim cov kev ua haujlwm siab thiab kev sib koom ua ke siab.
Txhim khu kev tawg Voltage: Epitaxial txheej tuaj yeem tsim nrog ntau dua kev tawg voltages, uas yog qhov tseem ceeb rau kev tsim cov khoom siv hluav taws xob siab thiab cov khoom siv hluav taws xob siab. Piv txwv li, hauv cov khoom siv hluav taws xob, cov txheej txheem epitaxial tuaj yeem txhim kho cov cuab yeej tawg hluav taws xob, ua kom muaj kev nyab xeeb ntawm kev ua haujlwm.
4, Txheej txheem Compatibility thiab Multilayer Structures
Multilayer Structures: Epitaxial kev loj hlob thev naus laus zis tso cai rau kev loj hlob ntawm ntau cov txheej txheem ntawm substrates, nrog cov txheej txheem sib txawv muaj qhov sib txawv doping ntau thiab ntau hom. Qhov no muaj txiaj ntsig zoo rau kev tsim cov khoom siv CMOS nyuaj thiab ua kom muaj kev sib koom ua ke ntawm peb sab.
Compatibility: Cov txheej txheem kev loj hlob ntawm epitaxial yog sib xws nrog cov txheej txheem tsim khoom CMOS uas twb muaj lawm, ua rau nws yooj yim rau kev koom ua ke rau hauv kev tsim khoom ua haujlwm tam sim no yam tsis tas yuav tsum muaj kev hloov pauv tseem ceeb rau cov txheej txheem.
Cov ntsiab lus: Daim ntawv thov kev loj hlob ntawm epitaxial hauv CMOS silicon cov txheej txheem feem ntau yog txhawm rau txhim kho wafer siv lead ua zoo, txhim kho cov cuab yeej hluav taws xob ua haujlwm zoo, txhawb nqa cov txheej txheem siab heev, thiab ua tau raws li qhov xav tau ntawm kev ua haujlwm siab thiab high-density integrated circuit manufacturing. Epitaxial kev loj hlob thev naus laus zis tso cai rau kev tswj hwm cov khoom siv doping thiab cov qauv, txhim kho tag nrho cov kev ua tau zoo thiab kev ntseeg siab ntawm cov khoom siv.
Post lub sij hawm: Oct-16-2024