Kev loj hlob ntxiv ib txheej ntawm cov silicon atoms ntawm lub silicon wafer substrate muaj ntau qhov zoo:
Hauv cov txheej txheem CMOS silicon, kev loj hlob epitaxial (EPI) ntawm lub wafer substrate yog ib kauj ruam tseem ceeb.
1, Txhim kho qhov zoo ntawm cov siv lead ua
Cov teeb meem pib thiab cov khoom tsis huv: Thaum lub sijhawm tsim khoom, lub wafer substrate yuav muaj qee qhov tsis zoo thiab cov khoom tsis huv. Kev loj hlob ntawm cov txheej epitaxial tuaj yeem tsim cov txheej txheem monocrystalline silicon zoo nrog cov khoom tsis zoo thiab cov khoom tsis huv ntawm cov substrate, uas yog qhov tseem ceeb rau kev tsim khoom siv tom qab.
Cov qauv siv lead ua ke: Kev loj hlob ntawm Epitaxial ua kom muaj cov qauv siv lead ua ke ntau dua, txo qhov cuam tshuam ntawm cov ciam teb ntawm cov noob thiab cov qhov tsis zoo hauv cov khoom siv substrate, yog li txhim kho qhov zoo ntawm cov siv lead ua ke ntawm wafer.
2, txhim kho kev ua tau zoo hluav taws xob.
Kev Txhim Kho Cov Yam Ntxim Saib Ntawm Lub Tshuab: Los ntawm kev loj hlob ib txheej epitaxial ntawm lub substrate, qhov concentration ntawm doping thiab hom silicon tuaj yeem tswj tau meej, ua kom zoo dua qhov kev ua haujlwm hluav taws xob ntawm lub tshuab. Piv txwv li, qhov doping ntawm txheej epitaxial tuaj yeem hloov kho kom zoo kom tswj tau qhov voltage ntawm MOSFETs thiab lwm yam kev teeb tsa hluav taws xob.
Txo cov dej xau: Ib txheej epitaxial zoo muaj qhov ceev qis dua, uas pab txo cov dej xau hauv cov khoom siv, yog li txhim kho kev ua haujlwm ntawm cov khoom siv thiab kev ntseeg siab.
3, txhim kho kev ua tau zoo hluav taws xob.
Txo Qhov Loj ntawm Cov Yam Ntxwv: Hauv cov txheej txheem me me (xws li 7nm, 5nm), qhov loj ntawm cov yam ntxwv ntawm cov khoom siv txuas ntxiv mus me dua, xav tau cov khoom siv zoo dua thiab zoo dua. Kev siv tshuab Epitaxial growth technology tuaj yeem ua tau raws li cov kev xav tau no, txhawb kev tsim cov khoom siv high-performance thiab high-density integrated circuits.
Txhim Kho Lub Hwj Chim Hluav Taws Xob: Cov khaubncaws sab nraud povtseg Epitaxial tuaj yeem tsim nrog lub zog hluav taws xob siab dua, uas yog qhov tseem ceeb rau kev tsim cov khoom siv hluav taws xob siab thiab cov khoom siv hluav taws xob siab. Piv txwv li, hauv cov khoom siv hluav taws xob, cov khaubncaws sab nraud povtseg epitaxial tuaj yeem txhim kho lub zog hluav taws xob ntawm lub cuab yeej, ua rau muaj kev nyab xeeb ntau ntxiv.
4, Kev Sib Txuas Lus Txheej Txheem thiab Cov Qauv Ntau Txheej
Cov Qauv Ntau Txheej: Cov thev naus laus zis loj hlob Epitaxial tso cai rau kev loj hlob ntawm cov qauv ntau txheej ntawm cov substrates, nrog rau cov khaubncaws sab nraud povtseg sib txawv muaj cov tshuaj doping sib txawv thiab hom. Qhov no muaj txiaj ntsig zoo rau kev tsim cov khoom siv CMOS nyuaj thiab ua kom muaj kev sib koom ua ke peb-seem.
Kev Sib Xws: Cov txheej txheem loj hlob epitaxial yog sib xws nrog cov txheej txheem tsim khoom CMOS uas twb muaj lawm, ua rau nws yooj yim rau kev koom ua ke rau hauv cov txheej txheem tsim khoom tam sim no yam tsis tas yuav hloov kho tseem ceeb rau cov kab txheej txheem.
Kev Nthuav Qhia: Daim ntawv thov ntawm epitaxial kev loj hlob hauv CMOS silicon cov txheej txheem feem ntau yog lub hom phiaj los txhim kho qhov zoo ntawm wafer crystal, ua kom zoo dua qhov kev ua haujlwm hluav taws xob ntawm cov khoom siv, txhawb nqa cov txheej txheem siab heev, thiab ua tau raws li qhov xav tau ntawm kev ua haujlwm siab thiab kev sib xyaw ua ke ntawm cov khoom siv hluav taws xob. Epitaxial kev loj hlob thev naus laus zis tso cai rau kev tswj hwm qhov tseeb ntawm cov khoom siv doping thiab cov qauv, txhim kho kev ua haujlwm tag nrho thiab kev ntseeg siab ntawm cov khoom siv.
Lub sijhawm tshaj tawm: Lub Kaum Hli-16-2024