4H-N/6H-N SiC Wafer Tshawb Nrhiav Kev Tsim Khoom Dummy qib Dia150mm Silicon carbide substrate
Cov lus qhia tshwj xeeb ntawm 6 nti txoj kab uas hla silicon carbide (SiC) substrate
| Qib | MPD xoom | Kev tsim khoom | Qib Kev Tshawb Fawb | Qib Dummy |
| Txoj kab uas hla | 150.0 hli ± 0.25 hli | |||
| Qhov tuab | 4H-N | 350um ± 25um | ||
| 4H-SI | 500um ± 25um | |||
| Kev Taw Qhia Wafer | Nyob rau ntawm axis: <0001> ± 0.5 ° rau 4H-SI | |||
| Chav Tsev Tseem Ceeb | {10-10}±5.0° | |||
| Qhov Ntev Tiaj Tus Thawj | 47.5mm ± 2.5mm | |||
| Kev zam ntug | 3 hli | |||
| TTV/Hneev/Warp | ≤15um / ≤40um / ≤60um | |||
| Qhov Ceev ntawm Micropipe | ≤1cm-2 | ≤5cm-2 | ≤15cm-2 | ≤50cm-2 |
| Kev Tiv Thaiv 4H-N 4H-SI | 0.015~0.028Ω!cm | |||
| ≥1E5Ω!cm | ||||
| Kev ntxhib | Polish Ra ≤1nm CMP Ra≤0.5nm | |||
| #Cov kab nrib pleb los ntawm lub teeb ci ntsa iab heev | Tsis muaj dab tsi | 1 tso cai, ≤2mm | Tag nrho ntev ≤10mm, ib qho ntev ≤2mm | |
| * Hex phaj los ntawm lub teeb ci ntsa iab | Thaj chaw sib sau ua ke ≤1% | Thaj chaw sib sau ua ke ≤ 2% | Thaj chaw sib sau ua ke ≤ 5% | |
| * Cov cheeb tsam Polytype los ntawm lub teeb ci ntsa iab | Tsis muaj dab tsi | Thaj chaw sib sau ua ke ≤ 2% | Thaj chaw sib sau ua ke ≤ 5% | |
| *&Kos los ntawm lub teeb ci ntsa iab | 3 qhov khawb rau 1 x wafer txoj kab uas hla sib sau ua ke ntev | 5 qhov khawb rau 1 x wafer txoj kab uas hla sib sau ua ke ntev | 5 qhov khawb rau 1 x wafer txoj kab uas hla sib sau ua ke ntev | |
| Ntug nti | Tsis muaj dab tsi | 3 tso cai, ≤0.5 hli txhua | 5 tso cai, ≤1mm txhua | |
| Kev kis kab mob los ntawm lub teeb ci ntsa iab | Tsis muaj dab tsi
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Kev Muag Khoom & Kev Pabcuam Rau Cov Neeg Siv Khoom
Kev Yuav Khoom Siv
Lub chaw yuav khoom siv yog lub luag haujlwm sau tag nrho cov khoom siv raw uas xav tau los tsim koj cov khoom. Kev taug qab tag nrho ntawm txhua yam khoom thiab cov ntaub ntawv, suav nrog kev tshuaj xyuas tshuaj lom neeg thiab lub cev yeej ib txwm muaj.
Zoo
Thaum lub sijhawm thiab tom qab kev tsim khoom lossis kev ua haujlwm ntawm koj cov khoom, lub chaw tswj xyuas zoo koom nrog kev ua kom ntseeg tau tias txhua yam khoom siv thiab kev kam rau ua tau raws li lossis tshaj koj cov lus qhia.
Kev Pabcuam
Peb zoo siab uas peb muaj cov neeg ua haujlwm tsim khoom muag khoom uas muaj ntau tshaj 5 xyoos kev paub hauv kev lag luam semiconductor. Lawv tau kawm los teb cov lus nug txog kev siv tshuab thiab muab cov lus hais raws sijhawm rau koj cov kev xav tau.
peb nyob ntawm koj ib sab txhua lub sijhawm thaum koj muaj teeb meem, thiab daws nws hauv 10 teev.
Daim duab qhia ntxaws ntxaws
