4H-N / 6H-N SiC Wafer Reeasearch ntau lawm Dummy qib Dia150mm Silicon carbide substrate

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Peb tuaj yeem muab cov khoom kub superconducting nyias zaj duab xis substrate, sib nqus nyias zaj duab xis thiab ferroelectric nyias zaj duab xis substrate, semiconductor siv lead ua, optical siv lead ua, laser siv lead ua cov ntaub ntawv, tib lub sij hawm muab kev taw qhia, siv lead ua txiav, sib tsoo, polishing thiab lwm yam kev pab cuam.Peb SiC substrates tuaj ntawm Tankeblue Factory hauv Suav teb.

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6 nti inch silicon carbide (SiC) substrate specification

Qib	Zero MPD	Ntau lawm	Qib tshawb fawb	Dummy Qib
Txoj kab uas hla	150.0mm ± 0.25 hli
Thickness	4 H-N	350um ± 25um
	4 H-SI	500um ± 25um
Wafer Orientation	Ntawm axis: <0001> ± 0.5 ° rau 4H-SI Tawm axis: 4.0 ° mus rau <1120> ± 0.5 ° rau 4H-N
Lub Tsev Loj	{10-10} ± 5.0°
Qhov Loj Loj Loj	47.5mm ± 2.5mm
Ntug cais tawm	3mm ib
TTV/Bow/Warp	≤15um / ≤40um / ≤60um
Micropipe ntom ntom	≤1cm-2	≤5cm-2	≤15cm-2	≤50cm-2
Resistivity 4H-N 4H-SI	0.015 ~ 0.028Ω!
	≥1E5Ω!cm
Roughness	Polish Ra ≤1nm CMP Ra≤0.5nm
#Tshem tawm los ntawm lub teeb ci siab	Tsis muaj		1 tso cai, ≤2mm	Qhov ntev ≤10mm, ib leeg ntev≤2mm
* Hex daim hlau los ntawm kev siv lub teeb ci siab	Qhov ntau thiab tsawg ≤ 1%		Cov cheeb tsam sib sau ≤ 2%	Qhov ntau thiab tsawg ≤ 5%
* Polytype thaj chaw los ntawm kev siv lub teeb ci siab	Tsis muaj		Cov cheeb tsam sib sau ≤ 2%	Qhov ntau thiab tsawg ≤ 5%
* & khawb los ntawm kev siv lub teeb siab	3 khawb rau 1 x wafer txoj kab uas hla cumulative length		5 khawb rau 1 x wafer inch cumulative length	5 khawb rau 1 x wafer txoj kab uas hla cumulative length
Ntug nti	Tsis muaj		3 tso cai, ≤0.5mm txhua	5 pub, ≤1mm txhua
Kev kis kab mob los ntawm lub teeb ci siab	Tsis muaj

Kev Muag Khoom & Kev Pabcuam Cov Neeg Siv Khoom

Kev yuav khoom

Lub chaw yuav khoom yog lub luag haujlwm los sau tag nrho cov ntaub ntawv raw xav tau los tsim koj cov khoom.Ua kom tiav traceability ntawm tag nrho cov khoom thiab cov ntaub ntawv, nrog rau cov tshuaj lom neeg thiab lub cev tsom xam yeej ib txwm muaj.

Zoo

Thaum lub sij hawm thiab tom qab lub chaw tsim khoom lossis machining ntawm koj cov khoom, lub tuam tsev tswj xyuas zoo tau koom nrog hauv kev ua kom tag nrho cov ntaub ntawv thiab kev kam rau ua tau raws li koj qhov kev qhia tshwj xeeb.

Kev pabcuam

Peb txaus siab rau peb tus kheej hauv kev muag khoom engineering nrog ntau tshaj 5 xyoo kev paub hauv kev lag luam semiconductor.Lawv raug cob qhia los teb cov lus nug txog kev ua haujlwm nrog rau muab cov lus hais raws sijhawm rau koj cov kev xav tau.

peb nyob ntawm koj ib sab los ntawm txhua lub sijhawm thaum koj muaj teeb meem, thiab daws nws hauv 10 teev.