2 nti 4 nti 6 nti Patterned Sapphire Substrate (PSS) uas GaN cov khoom loj hlob tuaj yeem siv rau LED teeb pom kev zoo

Lus piav qhia luv luv:

Patterned sapphire substrate (PSS) yog lub npog ntsej muag rau qhuav etching ntawm sapphire substrate, lub npog ntsej muag yog engraved nrog tus qauv los ntawm cov txheej txheem lithography, thiab tom qab ntawd cov sapphire yog etched los ntawm ICP etching technology, thiab lub npog ntsej muag raug tshem tawm, thiab thaum kawg GaN cov ntaub ntawv loj hlob ntawm nws, kom cov khoom siv longitudinal epista. Tus txheej txheem no suav nrog ntau kauj ruam xws li cov txheej txheem photoresist, kauj ruam raug, tsim cov qauv raug, icp qhuav etching thiab tu.

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Khoom cim npe

Cov yam ntxwv tseem ceeb

1. Cov yam ntxwv ntawm tus qauv:
PSS nto muaj lub khob zoo li lub khob lossis daim duab peb sab conical uas nws cov duab, qhov loj me thiab kev faib tawm tuaj yeem tswj tau los ntawm kev kho cov txheej txheem etching.
Cov duab nraaj no pab hloov txoj kev nthuav tawm ntawm lub teeb thiab txo tag nrho cov kev xav ntawm lub teeb, yog li txhim kho cov txiaj ntsig ntawm lub teeb rho tawm.

2. Khoom yam ntxwv:
PSS siv cov sapphire zoo li cov khoom siv substrate, uas muaj cov yam ntxwv ntawm siab hardness, siab thermal conductivity, zoo tshuaj stability thiab optical transparency.
Cov yam ntxwv no ua rau PSS tuaj yeem tiv taus qhov hnyav ib puag ncig xws li kub thiab txias thaum tswj kev ua haujlwm kho qhov muag zoo.

3. Optical kev ua tau zoo:
Los ntawm kev hloov ntau qhov tawg ntawm qhov sib cuam tshuam ntawm GaN thiab sapphire substrate, PSS ua rau cov photons uas tau cuam tshuam tag nrho hauv GaN txheej muaj txoj hauv kev kom dim ntawm sapphire substrate.
Qhov no feature ho txhim kho lub teeb extraction efficiency ntawm LED thiab txhim khu lub luminous siv ntawm LED.

4. Txheej txheem yam ntxwv:
Cov txheej txheem tsim khoom ntawm PSS yog qhov nyuaj, suav nrog ntau cov kauj ruam xws li lithography thiab etching, thiab yuav tsum muaj cov cuab yeej siv siab thiab tswj cov txheej txheem.
Txawm li cas los xij, nrog kev nce qib ntawm kev siv thev naus laus zis thiab txo cov nqi, cov txheej txheem tsim khoom ntawm PSS tau maj mam ua kom zoo dua qub thiab txhim kho.

Core kom zoo dua

1. Txhim kho lub teeb extraction efficiency: PSS ho txhim kho lub teeb extraction efficiency ntawm LED los ntawm kev hloov lub teeb propagation txoj kev thiab txo tag nrho cov reflection.

2.Prolong LED lub neej: PSS tuaj yeem txo qhov dislocation ceev ntawm GaN epitaxial cov ntaub ntawv, yog li txo qhov tsis-radiative recombination thiab thim rov qab xau tam sim no hauv cheeb tsam nquag, txuas lub neej ntawm LED.

3.Txhim kho qhov ci ci ntawm LED: Vim qhov kev txhim kho ntawm lub teeb pom kev zoo thiab qhov txuas ntxiv ntawm LED lub neej, LED luminous siv ntawm PSS yog qhov zoo dua.

4.Txo cov nqi tsim khoom: Txawm hais tias cov txheej txheem tsim khoom ntawm PSS yog qhov nyuaj, nws tuaj yeem txhim kho lub luminous efficiency thiab lub neej ntawm LED, yog li txo cov nqi tsim khoom rau qee yam thiab txhim kho kev sib tw ntawm cov khoom.

Cov chaw siv tseem ceeb

1. LED teeb pom kev zoo: PSS raws li cov khoom siv substrate rau LED chips, tuaj yeem txhim kho lub luminous efficiency thiab lub neej ntawm LED.
Nyob rau hauv lub tshav pob ntawm LED teeb pom kev zoo, PSS yog dav siv nyob rau hauv ntau yam teeb pom kev zoo khoom, xws li txoj kev teeb, rooj teeb, tsheb teeb thiab thiaj li nyob.

2.Semiconductor li: Ntxiv nrog rau LED teeb pom kev zoo, PSS kuj tseem tuaj yeem siv los tsim lwm yam khoom siv semiconductor, xws li lub teeb pom kev, lasers, thiab lwm yam. Cov khoom siv no muaj ntau yam kev siv hauv kev sib txuas lus, kev kho mob, tub rog thiab lwm yam kev lag luam.

3.Optoelectronic kev koom ua ke: Cov khoom siv kho qhov muag thiab kev ruaj ntseg ntawm PSS ua rau nws yog ib qho ntawm cov khoom siv zoo tshaj plaws hauv kev sib koom ua ke ntawm optoelectronic.In optoelectronic kev koom ua ke, PSS tuaj yeem siv los ua optical waveguides, optical keyboards thiab lwm yam khoom kom paub txog kev sib kis thiab kev ua haujlwm ntawm optical signals.

Technical parameters

Yam khoom	Patterned Sapphire Substrate (2 ~ 6 nti)
Txoj kab uas hla	50.8 ± 0.1 hli	100.0 ± 0.2 hli	150.0 ± 0.3 hli
Thickness	430 ± 25μm	650 ± 25μm	1000 ± 25μm
Surface Orientation	C-plane (0001) tawm-lub kaum sab xis rau M-axis (10-10) 0.2 ± 0.1 °
	C-plane (0001) tawm-lub kaum sab xis rau A-axis (11-20) 0 ± 0.1 °
Thawj Txoj Kev Ncaj Ncees	A-Plaev (11-20) ± 1.0 °
Qhov Loj Loj Loj	16.0 ± 1.0 hli	30.0 ± 1.0 hli	47.5 ± 2.0 hli
R-Plane	9:o ib
Pem hauv ntej nto tiav	Qauv
Back Surface Finish	SSP: Fine-av, Ra = 0.8-1.2um; DSP: Epi-polished, Ra <0.3nm
Laser Mark	Sab nraum qab
TTV	≤ 8m	≤10μm	≤ 20μm
HUV	≤10μm	≤15μm	≤ 25μm
WARP	≤12μm	≤ 20μm	≤30μm
Ntug Exclusion	≤ 2 hli
Qauv Specification	Cov qauv zoo	Dome, Cone, Pyramid
	Qauv Qhov siab	1.6 ~ 1.8 hli
	Qauv Diameter	2.75 ~ 2.85 hli
	Qauv Chaw	0.1 ~ 0.3 hli

XKH tsom mus rau kev txhim kho, tsim khoom thiab muag cov qauv sapphire substrate (PSS), thiab tau cog lus los muab cov khoom zoo, kev ua haujlwm siab PSS rau cov neeg siv khoom thoob ntiaj teb. XKH muaj cov cuab yeej tsim khoom siab heev thiab pab pawg tshaj lij, uas tuaj yeem hloov kho PSS cov khoom lag luam nrog cov qauv sib txawv thiab cov qauv sib txawv raws li cov neeg siv khoom xav tau. Nyob rau tib lub sijhawm, XKH saib xyuas cov khoom zoo thiab kev pabcuam zoo, thiab tau cog lus los muab cov neeg siv khoom nrog ntau yam kev txhawb nqa thiab kev daws teeb meem. Hauv kev ua haujlwm ntawm PSS, XKH tau sau cov kev paub dhau los thiab qhov zoo, thiab tos ntsoov yuav ua haujlwm nrog cov neeg koom tes thoob ntiaj teb los koom tes txhawb kev tsim kho tshiab ntawm LED teeb pom kev zoo, cov khoom siv semiconductor thiab lwm yam lag luam.