2 Nti 4 nti 6 nti 6 nti qauv sapphire substrate (pss) ntawm uas gan cov khoom siv tau siv rau kev teeb pom kev zoo

Cov lus piav qhia luv luv:

Txawv sapphire substrate (pss) yog lub ntsej muag rau qhuav ntawm lub sapphood txheej txheem, thiab tom qab ntawd lub ntsej muag yog mus rau ntawm nws, yog li ntawd cov khoom siv gan ntev ntawm Gan cov khoom lag luam tiav. Tus txheej txheem no suav nrog ntau kauj ruam xws li cov txheej txheem photoresist, kauj ruam raug, tsim cov qauv raug, icp qhuav etching thiab tu.


Khoom Qhia Qhia

Khoom Ntawv

Cov yam ntxwv tseem ceeb

1. Cov Qauv Txheej Txheem:
PSs nto muaj ib tug txheej txheem confe los yog kab ke lus qhia txog tus qauv uas nws lub cev, qhov loj me tuaj yeem tswj tau los ntawm kev kho cov txheej txheem etching.
Cov qauv duab duab no pab hloov txoj kev hais tawm ntawm lub teeb thiab txo kev xav txog tag nrho cov kev xav ntawm lub teeb kev rho tawm.

2. Cov yam ntxwv cov yam ntxwv:
PSs siv cov sapphire siab, uas muaj cov yam ntxwv ntawm kev nyuaj, siab thermal condability thiab kho qhov muag.
Cov yam ntxwv no siv cov cim kom tiv thaiv cov chaw hnyav xws li cov kub thiab ntsuas thaum tswj kev ua haujlwm zoo.

3. Kev Ua Haujlwm Kho Mob:
Los ntawm kev hloov ntau qhov tawg ntawm lub interface ntawm gan thiab sapphire substrate, pss ua rau lub photons uas tau pom me me hauv gan muaj sijhawm khiav tawm ntawm sapphire substrate.
Qhov no tshwj xeeb txhim kho lub teeb extraction ntawm lub LED thiab txhim kho kev siv luminous ntawm LED.

4. Txheej Txheem Txheej Txheem:
Cov txheej txheem tsim khoom ntawm cov pss yog qhov sib txawv, koom nrog ntau cov kauj ruam xws li li teb thiab etching, thiab yuav tsum muaj cov cuab yeej siv ntsuas thiab tswj cov txheej txheem siab.
Txawm li cas los xij, nrog kev nce qib nruam ntawm kev siv tshuab thiab kev txo tus nqi, kev tsim khoom ntawm cov pss yog maj mam ua kom zoo thiab txhim kho.

Cov tau zoo dua

1.Qhov teeb tsa lub teeb pom kev ua tau zoo: PSs txhim kho lub teeb extraction ntawm coj los hloov lub teeb pom kev zoo txoj kev thiab txo qhov kev xav txog tag nrho.

2. Crodrolong LED LED cov ntaub ntawv tsis sib haum ntawm Gan cov ntaub ntawv tsis raug, yog li txo qhov chaw so hluav taws xob thiab rov qab ua haujlwm tam sim no, txuas ntxiv lub neej ntawm coj.

3.Cov teeb meem LED BL ci: Vim muaj kev txhim kho ntawm lub teeb kev rho tawm thiab txuas ntxiv ntawm LED lub neej, lub LED luminous siv rau cov pss yog txhim kho.

4.Leduws cov nqi ntau lawm: txawm hais tias kev tsim khoom lag luam ntawm cov pss yog qhov ua tau zoo, nws tuaj yeem txhim kho cov nqi luminous thiab lub neej muaj qee yam thiab txhim kho cov kev sib tw ntawm cov khoom lag luam.

Daim ntawv thov tseem ceeb

1. LED teeb pom kev zoo: PSs raws li cov khoom siv substrate rau cov khoom siv led, tuaj yeem txhim kho lub luminous efficiency thiab lub neej ntawm coj.
Hauv tshav teb ntawm LED teeb pom kev zoo, PSs yog siv nyob rau hauv ntau lub teeb pom kev zoo, xws li txoj kev teeb lub neej, lub rooj teeb, lub tsheb teeb thiab lwm yam.

2.Samsonductor cov cuab yeej: ntxiv rau kev teeb pom kev zoo, pss kuj tseem siv tau lwm yam kev siv hauv kev sib txuas lus, kev kho mob, tub rog thiab lwm daim teb.

3.Txoj kev sib xyaw ua ke: Cov khoom kho tshiab thiab ruaj khov ntawm cov khoom siv uas tsim nyog, PSs kho kom zoo nkauj.

Kev tsis muaj

Yam Patterned Sapphire Substrate (2 ~ 6inch)
Qhov dav 50.8 ± 0.1 hli 100.0 ± 0.2 hli 150.0 ± 0.3 hli
Qhov tuab 430 ± 25μm 650 ± 25μm 1000 ± 25μm
Nto Orientation C-dav hlau (0001) tawm-kaum sab xis rau m-axis (10-10) 0.2 ± 0.1 °
C-dav hlau (0001) tawm-lub kaum sab xis rau Axis (11-20) 0 ± 0.1 °
Thawj kab ke kev cob qhia A-dav hlau (11-20) °
Lub Neej Puab Tswb 16.0 ± 1.0 hli 30.0 ± 1.0 hli 47.5 ± 2.0 hli
R-dav hlau 9-o'clock
Pem Hauv Ntej Ua tiav Tus qauv
Tom qab nto tas SSP: nplua-av, ra = 0.8-1.2um; DSP: Epi-polished, ra <0.3nm
Laser Mark Rov qab sab
Ttv ≤8μm [3μm ≤20μm
Txoj hluas [3μm ≤15μm ≤25μm
Warp PCT12μm ≤20μm ≤30μm
Ntug kev cais tawm I≤2 hli
Qauv Specification Cov qauv qauv Dome, lub khob hliav qab, pyramid
Qauv qhov siab 1.6 ~ 1.8μm
Txawv diam 2.75 ~ 2.85μm
Qhov Chaw Thaj Chaw 0.1 ~ 0.3μm

Xkh tsom rau txoj kev txhim kho, kev tsim khoom ntawm cov qauv sapphire substrate (pss), thiab tau cog lus los muab cov khoom lag luam zoo, siab pss nyob thoob ntiaj teb. XKH muaj cov cuab yeej tsim kev tsim khoom siv tshuab thiab cov khoom ua haujlwm tshaj lij, uas tuaj yeem kho cov khoom PSS nrog cov qauv sib txawv raws cov qauv kev xav tau. Nyob rau tib lub sijhawm, xkh them nyiaj rau cov khoom lag luam zoo thiab cov kev pabcuam zoo, thiab tau cog lus los muab cov neeg siv khoom nrog tag nrho cov kev txhawb nqa kev txhawb nqa thiab daws teeb meem. Hauv daim teb PSs, xkh tau sau cov kev nplua nuj ntau thiab zoo, thiab saib rau pem hauv ntej ua ke txhawb txoj kev txhim kho kev txhim kho ntawm LED teeb meem thiab lwm yam kev lag luam.

Cov duab kos kom ntxaws

Txawv sapphire substrate (pss) 6
Patterned Sapphire Substrate (PSs) 5
Patterned Sapphire Substrate (PSs) 4

  • Yav dhau los:
  • Tom ntej:

  • Sau koj cov lus ntawm no thiab xa mus rau peb