8 nti 200mm 4H-N SiC Wafer Conductive dummy tshawb fawb qib

8Inch 200mm 4H-N SiC Wafer Conductive dummy tshawb fawb qib Featured duab

Lus piav qhia luv luv:

Raws li kev thauj mus los, lub zog thiab kev lag luam kev lag luam hloov zuj zus, kev thov rau kev txhim khu kev qha, kev ua haujlwm siab hluav taws xob hluav taws xob txuas ntxiv mus ntxiv.Yuav kom ua tau raws li qhov xav tau ntawm kev txhim kho semiconductor kev ua tau zoo, cov tuam txhab tsim khoom tab tom nrhiav rau cov ntaub ntawv dav dav ntawm cov khoom siv semiconductor, xws li peb 4H SiC Prime Grade portfolio ntawm 4H n-type silicon carbide (SiC) wafers.

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Product Detail

Khoom cim npe

Vim nws lub cev thiab cov khoom siv hluav taws xob tshwj xeeb, 200mm SiC wafer semiconductor khoom siv los tsim cov khoom siv hluav taws xob ua haujlwm siab, kub kub, hluav taws xob tiv thaiv, thiab cov khoom siv hluav taws xob ntau zaus.8inch SiC substrate tus nqi qis zuj zus raws li cov thev naus laus zis dhau los thiab qhov kev thov loj tuaj.Kev txhim kho thev naus laus zis tsis ntev los no ua rau kev tsim khoom lag luam ntawm 200mm SiC wafers.Cov txiaj ntsig tseem ceeb ntawm SiC wafer semiconductor cov ntaub ntawv sib piv nrog Si thiab GaAs wafers: Lub zog hluav taws xob ntawm 4H-SiC thaum lub caij avalanche tawg yog ntau tshaj qhov kev txiav txim siab ntau dua li qhov sib thooj rau Si thiab GaAs.Qhov no ua rau muaj qhov txo qis hauv lub xeev kev tiv thaiv Ron.Tsawg nyob rau hauv lub xeev resistivity, ua ke nrog siab tam sim no ceev thiab thermal conductivity, tso cai rau siv cov me me tuag rau cov khoom siv fais fab.Lub siab thermal conductivity ntawm SiC txo cov thermal tsis kam ntawm cov nti.Cov khoom siv hluav taws xob ntawm cov khoom siv raws li SiC wafers ruaj khov nyob rau lub sijhawm thiab qhov kub thiab txias, uas ua kom muaj kev ntseeg siab ntawm cov khoom.Silicon carbide tsis tshua muaj zog tiv thaiv hluav taws xob, uas tsis degrade cov khoom hluav taws xob ntawm cov nti.Lub siab txwv kev ua haujlwm kub ntawm cov siv lead ua (ntau tshaj 6000C) tso cai rau koj los tsim cov khoom siv txhim khu kev qha rau kev ua haujlwm hnyav thiab kev siv tshwj xeeb.Tam sim no, peb tuaj yeem muab cov khoom me me 200mmSiC wafers tsis tu ncua thiab tsis tu ncua thiab muaj qee yam khoom hauv lub tsev rau khoom.

Specification

Tus lej	Yam khoom	Chav tsev	Ntau lawm	Kev tshawb fawb	Dummy
1. Parameters
1.1	polytype	--	4H	4H	4H
1.2	nto orientation	°	<11-20>4 ± 0.5	<11-20>4 ± 0.5	<11-20>4 ± 0.5
2. Kev ntsuas hluav taws xob
2.1	dopant	--	n-hom Nitrogen	n-hom Nitrogen	n-hom Nitrogen
2.2	tiv taus	ohm · cm	0.015 ~ 0.025 hli	0.01-0.03 Nws	NA
3. Mechanical parameter
3.1	txoj kab uas hla	mm	200 ± 0.2	200 ± 0.2	200 ± 0.2
3.2	tuab	ib m	500 ± 25	500 ± 25	500 ± 25
3.3	Notch orientation	°	[1-100] ± 5	[1-100] ± 5	[1-100] ± 5
3.4	Notch Qhov tob	mm	1 ~ 1.5 hli	1 ~ 1.5 hli	1 ~ 1.5 hli
3.5	LTV	ib m	≤5 (10mm * 10mm)	≤5 (10mm * 10mm)	≤10 (10mm * 10mm)
3.6	TTV	ib m	≤10	≤10	≤ 15
3.7	Hneev	ib m	- 25-25	-45-45	-65-65
3.8	Warp	ib m	≤ 30	≤ 50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4. Cov qauv
4.1	micropipe ceev	ua/cm2	≤ 2	≤10	≤ 50
4.2	cov ntsiab lus hlau	atom/cm2	≤1E11	≤1E11	NA
4.3	TSD	ua/cm2	≤500	≤1000	NA
4.4	BPD	ua/cm2	≤2000	≤5000	NA
4.5	TED	ua/cm2	≤7000	≤10000	NA
5. Zoo zoo
5.1	pem hauv ntej	--	Si	Si	Si
5.2	nto tiav	--	Lub ntsej muag CMP	Lub ntsej muag CMP	Lub ntsej muag CMP
5.3	particle	ua/wafer	≤100 (qhov loj me ≥0.3μm)	NA	NA
5.4	khawb	ua/wafer	≤5, Tag Nrho Ntev ≤200mm	NA	NA
5.5	Ntug chips/indents/cracks/stains/contamination	--	Tsis muaj	Tsis muaj	NA
5.6	Polytype cheeb tsam	--	Tsis muaj	Thaj tsam ≤10%	Thaj tsam ≤30%
5.7	pem hauv ntej cim	--	Tsis muaj	Tsis muaj	Tsis muaj
6. Rov qab zoo
6.1	rov qab ua tiav	--	C-ntsej muag MP	C-ntsej muag MP	C-ntsej muag MP
6.2	khawb	mm	NA	NA	NA
6.3	Back defects ntug chips/indents	--	Tsis muaj	Tsis muaj	NA
6.4	Rov qab roughness	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Back marking	--	Ntsig	Ntsig	Ntsig
7. Ntug
7.1	ntug	--	Chamfer	Chamfer	Chamfer
8. Pob
8.1	ntim	--	Epi-npaj nrog lub tshuab nqus tsev ntim	Epi-npaj nrog lub tshuab nqus tsev ntim	Epi-npaj nrog lub tshuab nqus tsev ntim
8.2	ntim	--	Multi-wafer ntim cassette	Multi-wafer ntim cassette	Multi-wafer ntim cassette