4inch 6inch Lithium niobate ib leeg siv lead ua zaj duab xis LNOI wafer

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Lithium niobate muaj zoo heev electro-optical, nonlinear thiab piezoelectric zog. Nrog kev pab los ntawm advanced micro thiab nano ua technology, integrated photonics pab kiag li lawm raws li lithium niobate nyias films (LNOI) ntawm insulators tau dav tsim. Nyob rau hauv lub neej yav tom ntej, cov ntaub ntawv ua tau zoo LNOI yuav txhawb kev txhim kho ntxiv ntawm LNOI-based micro-nano optics, kev sib xyaw ua ke, thiab microwave photonics. Kev tsim cov khoom siv LNOI ua haujlwm siab yuav yog ib kauj ruam tseem ceeb hauv kev tsim cov khoom siv lithium niobate optoelectronics.

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Cov txheej txheem npaj ntawm LNOI cov ntaub ntawv feem ntau yog muab faib ua plaub kauj ruam hauv qab no

(1) Nws ions tau txhaj rau hauv X-txiav lithium niobate cov khoom ntawm ib lub zog, thiab nkag mus rau hauv cov txheej txheem tsis xws luag ntawm qhov tob hauv qab txheej txheej ntawm lithium niobate;

(2) Cov ion implanted lithium niobate khoom yog sib koom ua ke rau hauv silicon substrate nrog oxide txheej los tsim cov qauv kev sib txuas;

(3) Cov qauv kev sib txuas yog annealed los ua qhov tsis xws luag qhia los ntawm Nws ion implantation evolve thiab aggregate rau cov kab nrib pleb. Thaum kawg, cov lithium niobate tau sib cais raws cov txheej txheem tsis zoo los tsim cov lithium niobate seem thiab LNOI wafers.

Kev siv thiab qhov zoo ntawm LNOI wafer

1--Lithium niobate piezoelectric films (LNOI) muaj siab piezoelectric coefficient thiab dielectric tas li, uas tuaj yeem hloov kho lub zog rau hauv hluav taws xob lossis hluav taws xob hluav taws xob rau hauv lub zog siv tshuab. Yog li ntawd, nws yog dav siv nyob rau hauv lub tshav pob ntawm sensors, xws li siab sensors, acceleration sensors, kub sensors thiab thiaj li nyob. Tsis tas li ntawd, lithium niobate piezoelectric zaj duab xis kuj tuaj yeem siv rau hauv cov khoom siv acoustic thiab kev co, xws li piezoelectric ceramic transducer complex piezoelectric ceramic lim.

2-Kev ruaj ntseg ntawm lithium niobate piezoelectric zaj duab xis kuj yog ib qho ntawm nws qhov zoo. Vim nws cov qauv siv lead ua ruaj khov thiab cov tshuaj inertness, lithium niobate piezoelectric zaj duab xis tuaj yeem ua haujlwm hauv qhov kub thiab txias, cov av noo, muaj zog acid, muaj zog alkali thiab lwm qhov chaw hnyav, nrog kev tiv thaiv corrosion zoo thiab kav ntev.

3-Lithium niobate piezoelectric zaj duab xis yog cov khoom siv piezoelectric tshiab nrog kev ua haujlwm zoo thiab ruaj khov, thiab muaj kev cia siab rau daim ntawv thov dav. Nrog rau kev txhim kho txuas ntxiv ntawm kev tshawb fawb thiab thev naus laus zis, lithium niobate piezoelectric zaj duab xis yuav raug siv hauv ntau lub nroog, nqa kev yooj yim dua thiab kev tsim kho tshiab rau tib neeg lub neej.