6inch SiC Epitaxiy wafer N / P hom txais customized

Kev npaj cov txheej txheem ntawm silicon carbide epitaxial wafer yog ib txoj hauv kev siv Chemical Vapor Deposition (CVD) technology. Cov hauv qab no yog cov ntsiab lus tseem ceeb thiab cov txheej txheem kev npaj:

Technical txoj cai:

Chemical Vapor Deposition: Siv cov khoom siv roj rau hauv cov pa roj, raws li cov xwm txheej tshwj xeeb, nws tau decomposed thiab tso rau ntawm lub substrate los tsim cov duab nyias nyias.

Gas-theem cov tshuaj tiv thaiv: Los ntawm pyrolysis los yog cracking cov tshuaj tiv thaiv, ntau yam raw khoom gases nyob rau hauv cov roj theem yog chemically hloov nyob rau hauv cov tshuaj tiv thaiv chamber.

Cov kauj ruam ntawm kev npaj:

Kev kho substrate: Lub substrate yog raug rau saum npoo tu thiab pretreatment kom paub meej qhov zoo thiab crystallinity ntawm epitaxial wafer.

Cov tshuaj tiv thaiv chamber debugging: kho qhov kub thiab txias, siab thiab ntws tus nqi ntawm cov tshuaj tiv thaiv chamber thiab lwm yam tsis ua kom muaj kev ruaj ntseg thiab tswj cov tshuaj tiv thaiv.

Cov khoom siv raw: muab cov khoom siv roj uas xav tau rau hauv cov tshuaj tiv thaiv chamber, sib tov thiab tswj tus nqi ntws raws li xav tau.

Cov txheej txheem tshuaj tiv thaiv: Los ntawm cua sov cov tshuaj tiv thaiv chamber, cov khoom noj roj gaseous muaj cov tshuaj tiv thaiv hauv lub chamber los tsim cov khoom xav tau, piv txwv li silicon carbide zaj duab xis.

Txias thiab tshem tawm: Thaum kawg ntawm cov tshuaj tiv thaiv, qhov kub thiab txias yog maj mam txo kom txias thiab solidify cov deposits nyob rau hauv cov tshuaj tiv thaiv chamber.

Epitaxial wafer annealing thiab tom qab ua tiav: qhov tso tawm epitaxial wafer yog annealed thiab tom qab ua tiav los txhim kho nws cov khoom hluav taws xob thiab kho qhov muag.

Cov kauj ruam tshwj xeeb thiab cov xwm txheej ntawm silicon carbide epitaxial wafer txheej txheem kev npaj yuav txawv nyob ntawm cov khoom tshwj xeeb thiab cov kev xav tau. Cov saum toj no tsuas yog cov txheej txheem dav dav thiab cov hauv paus ntsiab lus, cov haujlwm tshwj xeeb yuav tsum tau hloov kho thiab ua kom zoo raws li qhov tseeb.