8inch SiC Ntau lawm qib wafer 4H-N SiC substrate

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8-nti SiC substrates yog siv rau hauv cov khoom siv hluav taws xob siab, xws li lub zog MOSFETs (Metal Oxide Semiconductor Field Effect Transistors), Schottky diodes thiab lwm yam khoom siv hluav taws xob semiconductor.

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Cov lus hauv qab no qhia txog qhov tshwj xeeb ntawm peb 8inch SiC wafers:

8 nti N-hom SiC DSP Specs
Tus lej	Yam khoom	Chav tsev	Ntau lawm	Kev tshawb fawb	Dummy
1: parameter
1.1	polytype	--	4H	4H	4H
1.2	nto orientation	°	<11-20>4 ± 0.5	<11-20>4 ± 0.5	<11-20>4 ± 0.5
2: Hluav taws xob parameter
2.1	dopant	--	n-hom Nitrogen	n-hom Nitrogen	n-hom Nitrogen
2.2	tiv taus	ohm · cm	0.015 ~ 0.025 hli	0.01-0.03 Nws	NA
3: Mechanical Parameter
3.1	txoj kab uas hla	mm	200 ± 0.2	200 ± 0.2	200 ± 0.2
3.2	tuab	ib m	500 ± 25	500 ± 25	500 ± 25
3.3	Notch orientation	°	[1-100] ± 5	[1-100] ± 5	[1-100] ± 5
3.4	Notch Qhov tob	mm	1 ~ 1.5 hli	1 ~ 1.5 hli	1 ~ 1.5 hli
3.5	LTV	ib m	≤5 (10mm * 10mm)	≤5 (10mm * 10mm)	≤10 (10mm * 10mm)
3.6	TTV	ib m	≤10	≤10	≤ 15
3.7	Hneev	ib m	- 25-25	-45-45	-65-65
3.8	Warp	ib m	≤ 30	≤ 50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4: Qauv
4.1	micropipe ceev	ua/cm2	≤ 2	≤10	≤ 50
4.2	cov ntsiab lus hlau	atom/cm2	≤1E11	≤1E11	NA
4.3	TSD	ua/cm2	≤500	≤1000	NA
4.4	BPD	ua/cm2	≤2000	≤5000	NA
4.5	TED	ua/cm2	≤7000	≤10000	NA
5.Pem hauv ntej zoo
5.1	pem hauv ntej	--	Si	Si	Si
5.2	nto tiav	--	Lub ntsej muag CMP	Lub ntsej muag CMP	Lub ntsej muag CMP
5.3	particle	ua/wafer	≤100 (qhov loj me ≥0.3μm)	NA	NA
5.4	khawb	ua/wafer	≤5, Tag Nrho Ntev ≤200mm	NA	NA
5.5	Ntug chips/indents/cracks/stains/contamination	--	Tsis muaj	Tsis muaj	NA
5.6	Polytype cheeb tsam	--	Tsis muaj	Thaj tsam ≤10%	Thaj tsam ≤30%
5.7	pem hauv ntej cim	--	Tsis muaj	Tsis muaj	Tsis muaj
6: Rov qab zoo
6.1	rov qab ua tiav	--	C-ntsej muag MP	C-ntsej muag MP	C-ntsej muag MP
6.2	khawb	mm	NA	NA	NA
6.3	Back defects ntug chips/indents	--	Tsis muaj	Tsis muaj	NA
6.4	Rov qab roughness	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Back marking	--	Ntsig	Ntsig	Ntsig
7 :qab
7.1	ntug	--	Chamfer	Chamfer	Chamfer
8: Pob
8.1	ntim	--	Epi-npaj nrog lub tshuab nqus tsev ntim	Epi-npaj nrog lub tshuab nqus tsev ntim	Epi-npaj nrog lub tshuab nqus tsev ntim
8.2	ntim	--	Multi-wafer ntim cassette	Multi-wafer ntim cassette	Multi-wafer ntim cassette