HPSI SiC wafer dia: 3 nti tuab: 350um ± 25 µm rau Fais Fab Electronics
Daim Ntawv Thov
HPSI SiC wafers siv rau ntau yam kev siv hluav taws xob, suav nrog:
Cov Khoom Siv Hluav Taws Xob Semiconductor:SiC wafers feem ntau siv rau hauv kev tsim cov diodes fais fab, transistors (MOSFETs, IGBTs), thiab thyristors. Cov semiconductors no siv dav hauv cov ntawv thov hloov pauv fais fab uas xav tau kev ua haujlwm siab thiab kev ntseeg siab, xws li hauv kev tsav tsheb hauv kev lag luam, cov khoom siv fais fab, thiab cov inverters rau cov kab ke zog rov ua dua tshiab.
Cov Tsheb Fais Fab (EVs):Hauv cov tsheb fais fab, cov khoom siv fais fab raws li SiC muab kev hloov pauv sai dua, kev siv hluav taws xob zoo dua, thiab txo qhov poob cua sov. Cov khoom SiC zoo tagnrho rau cov ntawv thov hauv cov txheej txheem tswj roj teeb (BMS), cov khoom siv them nqi, thiab cov chargers hauv tsheb (OBCs), qhov twg qhov hnyav tsawg thiab kev ua kom muaj zog hloov pauv tau zoo tshaj plaws yog qhov tseem ceeb.
Cov Txheej Txheem Fais Fab Rov Ua Dua Tshiab:Cov wafer SiC feem ntau siv rau hauv cov inverters hnub ci, cov tshuab hluav taws xob cua, thiab cov tshuab khaws cia hluav taws xob, qhov twg kev ua haujlwm zoo thiab kev ruaj khov yog qhov tseem ceeb. Cov khoom siv SiC ua rau muaj zog ntau dua thiab kev ua tau zoo dua hauv cov ntawv thov no, txhim kho kev hloov pauv hluav taws xob tag nrho.
Kev Lag Luam Fais Fab Hluav Taws Xob:Hauv cov ntawv thov kev lag luam ua tau zoo, xws li kev tsav tsheb, kev siv neeg hlau, thiab cov khoom siv hluav taws xob loj, kev siv SiC wafers tso cai rau kev ua tau zoo dua hauv kev ua haujlwm zoo, kev ntseeg siab, thiab kev tswj hwm thermal. Cov khoom siv SiC tuaj yeem tswj tau cov zaus hloov pauv siab thiab qhov kub siab, ua rau lawv haum rau cov chaw xav tau.
Cov Chaw Sib Txuas Lus thiab Cov Ntaub Ntawv:SiC siv rau hauv cov khoom siv fais fab rau cov khoom siv sib txuas lus thiab cov chaw khaws ntaub ntawv, qhov twg kev ntseeg siab siab thiab kev hloov pauv hluav taws xob zoo yog qhov tseem ceeb. Cov khoom siv fais fab raws li SiC ua rau muaj kev ua haujlwm zoo dua ntawm qhov me me, uas txhais tau tias kev siv hluav taws xob tsawg dua thiab kev ua kom txias zoo dua hauv cov chaw tsim kho loj.
Qhov hluav taws xob tawg siab, qhov tsis kam tiv thaiv qis, thiab kev ua kom sov zoo ntawm SiC wafers ua rau lawv yog lub substrate zoo tagnrho rau cov ntawv thov siab heev no, ua rau muaj kev txhim kho cov khoom siv hluav taws xob txuag hluav taws xob tiam tom ntej.
Cov Khoom
| Vaj tse | Tus nqi |
| Wafer Txoj Kab uas hla | 3 nti (76.2 hli) |
| Wafer Thickness | 350 µm ± 25 µm |
| Kev Taw Qhia Wafer | <0001> ntawm-axis ± 0.5° |
| Qhov Ceev ntawm Cov Kav Dej Me Me (MPD) | ≤ 1 cm⁻² |
| Kev Tiv Thaiv Hluav Taws Xob | ≥ 1E7 Ω·cm |
| Cov tshuaj lom | Tsis muaj tshuaj lom |
| Kev Taw Qhia Tiaj Tus Thawj Coj | {11-20} ± 5.0° |
| Qhov Ntev Tiaj Tus Thawj | 32.5 hli ± 3.0 hli |
| Qhov Ntev Thib Ob | 18.0 hli ± 2.0 hli |
| Kev Taw Qhia Qib Thib Ob | Si tig rau saum: 90° CW ntawm lub tiaj tiaj thawj ± 5.0° |
| Kev Tshem Tawm Ntug | 3 hli |
| LTV/TTV/Hneev/Warp | 3 µm / 10 µm / ± 30 µm / 40 µm |
| Qhov Roughness ntawm qhov chaw | C-ntsej muag: Polished, Si-ntsej muag: CMP |
| Cov kab nrib pleb (tshuaj xyuas los ntawm lub teeb ci ntsa iab) | Tsis muaj dab tsi |
| Cov Phaj Hex (tshuaj xyuas los ntawm lub teeb ci ntsa iab) | Tsis muaj dab tsi |
| Cov Cheeb Tsam Polytype (tshuaj xyuas los ntawm lub teeb ci ntsa iab) | Thaj chaw sib sau ua ke 5% |
| Cov khawb (tshuaj xyuas los ntawm lub teeb ci ntsa iab) | ≤ 5 khawb, qhov ntev tag nrho ≤ 150 hli |
| Kev Txiav Ntug | Tsis pub muaj ≥ 0.5 hli dav thiab tob |
| Kev Ua Phem Ntawm Qhov Chaw (tshuaj xyuas los ntawm lub teeb ci ntsa iab) | Tsis muaj dab tsi |
Cov Txiaj Ntsig Tseem Ceeb
Kev Ua Haujlwm Thermal Siab:Cov wafer SiC paub txog lawv lub peev xwm tshwj xeeb los tso cua sov, uas tso cai rau cov khoom siv fais fab kom ua haujlwm tau zoo dua thiab tswj tau cov dej ntws siab dua yam tsis muaj cua sov dhau. Qhov no yog qhov tseem ceeb hauv cov khoom siv hluav taws xob uas kev tswj cua sov yog qhov nyuaj heev.
Lub zog tawg siab:Qhov bandgap dav ntawm SiC ua rau cov khoom siv tuaj yeem tiv taus cov qib voltage siab dua, ua rau lawv zoo tagnrho rau cov ntawv thov high-voltage xws li cov fais fab grids, tsheb fais fab, thiab cov tshuab kev lag luam.
Kev Ua Haujlwm Zoo:Qhov kev sib xyaw ua ke ntawm cov zaus hloov pauv siab thiab qhov tsis kam tiv thaiv qis ua rau cov khoom siv nrog kev poob zog qis dua, txhim kho qhov ua tau zoo ntawm kev hloov pauv hluav taws xob thiab txo qhov xav tau rau cov txheej txheem txias nyuaj.
Kev Ntseeg Tau Hauv Qhov Chaw Nyuaj Siab:SiC muaj peev xwm ua haujlwm ntawm qhov kub siab (txog li 600 ° C), uas ua rau nws tsim nyog rau kev siv hauv cov chaw uas yuav ua rau cov khoom siv silicon ib txwm puas tsuaj.
Kev Txuag Hluav Taws Xob:Cov khoom siv fais fab SiC txhim kho kev hloov pauv hluav taws xob zoo, uas yog qhov tseem ceeb hauv kev txo kev siv hluav taws xob, tshwj xeeb tshaj yog nyob rau hauv cov kab ke loj xws li cov hloov pauv hluav taws xob hauv kev lag luam, tsheb fais fab, thiab cov khoom siv hluav taws xob rov ua dua tshiab.
Daim duab qhia ntxaws ntxaws
