8inch LNOI (LiNbO3 ntawm Insulator) Wafer rau Optical Modulators Waveguides Integrated Circuits
Daim duab qhia ntxaws
Taw qhia
Lithium Niobate ntawm Insulator (LNOI) wafers yog cov khoom siv siv hauv ntau yam kev siv kho qhov muag thiab hluav taws xob. Cov wafers no yog tsim los ntawm kev hloov cov txheej nyias ntawm lithium niobate (LiNbO₃) mus rau ib qho chaw insulating, feem ntau silicon los yog lwm yam khoom siv, siv cov tswv yim zoo li ion implantation thiab wafer bonding. LNOI thev naus laus zis sib koom ntau qhov sib xws nrog Silicon ntawm Insulator (SOI) wafer thev naus laus zis tab sis siv kom zoo dua ntawm cov khoom siv kho qhov muag tshwj xeeb ntawm lithium niobate, cov khoom siv paub txog nws cov piezoelectric, pyroelectric, thiab cov yam ntxwv tsis zoo ntawm qhov muag.
LNOI wafers tau txais kev saib xyuas tseem ceeb hauv thaj chaw xws li kev sib txuas lus optics, kev sib txuas lus, thiab kev suav quantum vim lawv qhov kev ua tau zoo tshaj plaws hauv cov ntawv thov siab thiab kev kub ceev. Cov wafers tau tsim los siv cov txheej txheem "Smart-cut", uas ua rau muaj kev tswj xyuas meej ntawm cov tuab ntawm lithium niobate nyias zaj duab xis, ua kom cov wafers ua tau raws li qhov yuav tsum tau ua rau ntau yam kev siv.
Txoj Cai
Cov txheej txheem ntawm kev tsim LNOI wafers pib nrog ib tug loj lithium niobate siv lead ua. Cov siv lead ua tau txais ion implantation, qhov twg high-zog helium ions tau nkag mus rau hauv qhov chaw ntawm lithium niobate siv lead ua. Cov ions no nkag mus rau cov siv lead ua rau qhov tob thiab cuam tshuam cov qauv siv lead ua, tsim kom muaj lub dav hlau tsis yooj yim uas tuaj yeem siv los cais cov siv lead ua rau nyias txheej. Lub zog tshwj xeeb ntawm helium ions tswj qhov tob ntawm kev cog qoob loo, uas cuam tshuam ncaj qha rau cov tuab ntawm txheej txheej lithium niobate kawg.
Tom qab ion implantation, lub lithium niobate siv lead ua yog sib txuas rau lub substrate siv cov txheej txheem hu ua wafer bonding. Cov txheej txheem kev sib txuas feem ntau yog siv txoj kev sib txuas ncaj qha, qhov twg ob qhov chaw (ion-implanted lithium niobate crystal thiab substrate) raug nias ua ke nyob rau hauv qhov kub thiab txias los tsim kom muaj kev sib raug zoo. Qee zaum, cov khoom siv nplaum zoo li benzocyclobutene (BCB) tuaj yeem siv rau kev txhawb nqa ntxiv.
Tom qab kev sib raug zoo, lub wafer tau dhau los ua cov txheej txheem annealing los kho cov kev puas tsuaj los ntawm ion implantation thiab txhim kho kev sib raug zoo ntawm cov txheej txheem. Cov txheej txheem annealing tseem pab cov txheej txheej nyias nyias ntawm lithium niobate kom tshem tawm ntawm cov khoom siv lead ua qub, tawm hauv qab nyias txheej txheej ntawm lithium niobate uas tuaj yeem siv rau kev tsim khoom.
Specifications
LNOI wafers yog tus cwj pwm los ntawm ntau qhov tshwj xeeb tseem ceeb uas ua kom lawv haum rau kev ua haujlwm siab. Cov no suav nrog:
Khoom Specificationscov
| covKhoom sivcov | covSpecificationscov |
| Khoom siv | Homogeneous: LiNbO3 |
| Khoom zoo | Cov npuas los yog suav nrog <100μm |
| Kev taw qhia | Y-txiav ± 0.2 ° |
| Qhov ntom | 4.65 g / cm³ |
| Curie Kub | 1142 ± 1 ° C |
| Pob tshab | > 95% nyob rau hauv 450-700 nm (10 hli thickness) |
Manufacturing Specificationscov
| covParametercov | covSpecificationcov |
| Txoj kab uas hla | 150mm ± 0.2 hli |
| Thickness | 350 μm ± 10 μm |
| Flatness | <1.3 hli |
| Tag nrho Thickness Variation (TTV) | Warp <70 μm @ 150 hli wafer |
| Local Thickness Variation (LTV) | <70 μm @ 150 hli wafer |
| Roughness | Rq ≤0.5 nm (AFM RMS tus nqi) |
| Nto Zoo | 40-20 |
| Particles (Non-removable) | 100-200 μm ≤3 hais |
| Chips | <300 μm (tag nrho wafer, tsis muaj kev cais tawm) |
| Kev tawg | Tsis muaj kab nrib pleb (tag nrho wafer) |
| Kev kis kab mob | Tsis muaj cov stains tshem tau (tag nrho wafer) |
| Parallelism | <30 arcseconds |
| Orientation Reference Plane (X-axis) | 47 ± 2 hli |
Daim ntawv thov
LNOI wafers yog siv rau ntau yam kev siv vim lawv cov khoom tshwj xeeb, tshwj xeeb tshaj yog nyob rau hauv kev lag luam photonics, kev sib txuas lus, thiab quantum technologies. Qee qhov kev siv tseem ceeb suav nrog:
Integrated Optics:LNOI wafers tau siv dav hauv kev sib txuas kho qhov muag, qhov chaw uas lawv ua kom muaj kev ua tau zoo photonic li modulators, waveguides, thiab resonators. Lub siab nonlinear optical zog ntawm lithium niobate ua rau nws yog ib qho kev xaiv zoo tshaj plaws rau cov ntawv thov uas yuav tsum tau siv lub teeb pom kev zoo.
Kev Sib Txuas Lus:LNOI wafers yog siv nyob rau hauv optical modulators, uas yog ib qho tseem ceeb Cheebtsam nyob rau hauv high-ceev kev sib txuas lus systems, nrog rau fiber optic networks. Lub peev xwm los hloov lub teeb ntawm cov zaus siab ua rau LNOI wafers zoo tagnrho rau kev sib txuas lus niaj hnub.
Quantum suav:Hauv quantum technologies, LNOI wafers yog siv los tsim cov khoom siv rau quantum computers thiab quantum kev sib txuas lus. Lub nonlinear optical zog ntawm LNOI yog leveraged los tsim entangled photon khub, uas yog ib qho tseem ceeb rau quantum key faib thiab quantum cryptography.
Sensors:LNOI wafers yog siv rau hauv ntau daim ntawv thov kev paub, suav nrog cov khoom siv kho qhov muag thiab acoustic sensors. Lawv lub peev xwm los cuam tshuam nrog ob qho tib si lub teeb thiab lub suab ua rau lawv muaj ntau yam rau ntau hom kev paub txog technologies.
FAQ
Q:LNOI technology yog dab tsi?
A: LNOI thev naus laus zis cuam tshuam nrog kev hloov pauv ntawm nyias lithium niobate zaj duab xis mus rau hauv cov txheej txheem insulating, feem ntau silicon. Cov thev naus laus zis no siv cov khoom tshwj xeeb ntawm lithium niobate, xws li nws cov yam ntxwv tsis zoo ntawm qhov muag pom, piezoelectricity, thiab pyroelectricity, ua rau nws zoo tagnrho rau kev sib txuas ntawm optics thiab kev sib txuas lus.
Q:Qhov txawv ntawm LNOI thiab SOI wafers yog dab tsi?
A: Ob qho tib si LNOI thiab SOI wafers zoo ib yam uas lawv muaj cov txheej nyias nyias ntawm cov khoom sib txuas rau lub substrate. Txawm li cas los xij, LNOI wafers siv lithium niobate ua cov ntaub ntawv nyias nyias, thaum SOI wafers siv silicon. Qhov sib txawv tseem ceeb nyob hauv cov khoom ntawm cov khoom siv zaj duab xis nyias, nrog LNOI muab cov khoom siv kho qhov muag zoo tshaj thiab piezoelectric zog.
Q:Dab tsi yog qhov zoo ntawm kev siv LNOI wafers?
A: Cov txiaj ntsig tseem ceeb ntawm LNOI wafers suav nrog lawv cov khoom siv kho qhov muag zoo, xws li cov khoom siv kho qhov muag tsis zoo, thiab lawv lub zog txhua yam. Cov yam ntxwv no ua rau LNOI wafers zoo tagnrho rau kev siv hauv high-speed, high-frequency, thiab quantum applications.
Q:LNOI wafers puas tuaj yeem siv rau kev siv quantum?
A: Yog lawm, LNOI wafers tau siv dav hauv quantum technologies vim lawv lub peev xwm los tsim entangled photon khub thiab lawv kev sib raug zoo nrog kev sib koom ua ke photonics. Cov khoom no tseem ceeb heev rau cov ntawv thov hauv quantum xam, kev sib txuas lus, thiab cryptography.
Q:Dab tsi yog qhov tuab ntawm LNOI zaj duab xis?
A: LNOI cov yeeb yaj kiab feem ntau yog los ntawm ob peb puas nanometers mus rau ob peb micrometers hauv tuab, nyob ntawm daim ntawv thov tshwj xeeb. Lub thickness yog tswj thaum lub sij hawm ion implantation txheej txheem.
