N-Type SiC Composite Substrates Dia6inch High quality monocrystalline thiab qis zoo substrate

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N-Type SiC Composite Substrates yog cov khoom siv semiconductor siv los tsim cov khoom siv hluav taws xob. Cov substrates no yog tsim los ntawm silicon carbide (SiC), ib tug compound paub txog nws zoo heev thermal conductivity, siab tawg voltage, thiab tsis kam mus rau hnyav ib puag ncig tej yam kev mob.


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N-Type SiC Composite Substrates Common parameter table

项目Cov khoom 指标Specification 项目Cov khoom 指标Specification
直径Txoj kab uas hla 150 ± 0.2 hli ( 硅 面 ) 粗 糙 度
Pem hauv ntej (Si-face) roughness
Ra≤0.2nm (5μm * 5μm)
晶型Polytype 4H Ntug Chip, khawb, tawg (pom kev tshuaj xyuas) Tsis muaj
电阻率Kev tiv thaiv 0.015-0.025ohm · cm 总厚度变化TTV ≤ 3μm
Hloov txheej Thickness ≥ 0.4 m 翘曲度Warp ≤35μm
空洞Tsis muaj ≤5ea / wafer (2mm> D> 0.5mm) 总厚度Thickness 350 ± 25 hli

Kev xaiv "N-hom" yog hais txog hom doping siv hauv SiC cov ntaub ntawv. Nyob rau hauv semiconductor physics, doping yuav tsum txhob txwm qhia impurities rau hauv ib tug semiconductor los hloov nws cov khoom hluav taws xob. N-hom doping qhia cov ntsiab lus uas muab ntau tshaj ntawm cov hluav taws xob dawb, muab cov khoom tsis zoo rau cov neeg nqa khoom concentration.

Qhov zoo ntawm N-hom SiC composite substrates suav nrog:

1. Kev ua haujlwm siab kub: SiC muaj cov thermal conductivity siab thiab tuaj yeem ua haujlwm ntawm qhov kub thiab txias, ua rau nws tsim nyog rau kev siv hluav taws xob ntau thiab siv hluav taws xob ntau.

2. High breakdown voltage: SiC cov ntaub ntawv muaj lub siab tawg voltage, ua rau lawv tiv taus hluav taws xob siab tsis muaj hluav taws xob tawg.

3. Tshuaj thiab ib puag ncig tsis kam: SiC yog tshuaj tiv thaiv thiab tuaj yeem tiv taus ib puag ncig hnyav, ua rau nws tsim nyog siv rau hauv cov ntawv thov nyuaj.

4. Txo cov hluav taws xob poob: Piv nrog cov khoom siv silicon ib txwm siv, SiC substrates ua kom muaj zog hloov pauv tau zoo dua thiab txo cov hluav taws xob poob hauv cov khoom siv hluav taws xob.

5. Wide bandgap: SiC muaj qhov dav bandgap, tso cai rau kev txhim kho cov khoom siv hluav taws xob uas tuaj yeem ua haujlwm ntawm qhov kub thiab txias dua thiab muaj zog dua.

Zuag qhia tag nrho, N-hom SiC composite substrates muab qhov zoo tshaj plaws rau kev txhim kho cov khoom siv hluav taws xob ua haujlwm siab, tshwj xeeb tshaj yog nyob rau hauv cov ntawv thov uas kub kub ua haujlwm, siab zog ceev, thiab kev hloov hluav taws xob zoo yog qhov tseem ceeb.


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