Silicon carbide (SiC), raws li ib yam ntawm cov khoom siv dav dav ntawm cov khoom siv semiconductor, ua lub luag haujlwm tseem ceeb hauv kev siv cov kev tshawb fawb niaj hnub thiab thev naus laus zis. Silicon carbide muaj thermal stability zoo heev, siab hluav taws xob teb kam rau ua, txhob txwm conductivity thiab lwm yam zoo heev lub cev thiab kho qhov muag khoom, thiab yog dav siv nyob rau hauv optoelectronic li thiab hnub ci li. Vim tias qhov kev thov nce ntxiv rau cov khoom siv hluav taws xob zoo thiab ruaj khov, kev paub txog kev loj hlob ntawm silicon carbide tau dhau los ua qhov chaw kub.
Yog li koj paub ntau npaum li cas txog SiC txoj kev loj hlob?
Niaj hnub no peb yuav tham txog peb yam tseem ceeb rau kev loj hlob ntawm silicon carbide ib leeg muaju: lub cev vapor thauj (PVT), kua theem epitaxy (LPE), thiab kub tshuaj vapor deposition (HT-CVD).
Lub cev Vapor Hloov Method (PVT)
Txoj kev hloov lub cev vapor yog ib qho ntawm feem ntau siv silicon carbide txheej txheem kev loj hlob. Kev loj hlob ntawm ib leeg siv lead ua silicon carbide feem ntau yog nyob ntawm sublimation ntawm sic hmoov thiab redeposition ntawm noob siv lead ua nyob rau hauv kub kub. Nyob rau hauv lub kaw graphite crucible, silicon carbide hmoov yog rhuab mus rau high kub, los ntawm kev tswj ntawm kub gradient, silicon carbide chav condenses nyob rau saum npoo ntawm cov noob siv lead ua, thiab maj mam loj hlob ib tug loj loj ib tug siv lead ua.
Feem ntau ntawm cov monocrystalline SiC peb tam sim no muab tau ua nyob rau hauv txoj kev loj hlob no. Nws tseem yog txoj hauv kev tseem ceeb hauv kev lag luam.
Liquid Phase Epitaxy (LPE)
Silicon carbide crystals yog npaj los ntawm cov kua theem epitaxy los ntawm cov txheej txheem siv lead ua loj hlob ntawm cov khoom-kua interface. Nyob rau hauv txoj kev no, silicon carbide hmoov yog yaj nyob rau hauv ib tug silicon-carbon tov nyob rau hauv high kub, thiab ces qhov kub thiab txias yog txo kom cov silicon carbide yog precipitated los ntawm cov tshuaj thiab hlob nyob rau hauv lub noob muaju. Qhov txiaj ntsig tseem ceeb ntawm LPE txoj kev yog lub peev xwm kom tau txais cov khoom siv lead ua zoo ntawm qhov kev loj hlob qis, tus nqi qis, thiab nws yog qhov tsim nyog rau kev tsim khoom loj.
Kub Chemical Vapor Deposition (HT-CVD)
Los ntawm kev qhia cov roj uas muaj silicon thiab carbon rau hauv cov tshuaj tiv thaiv chamber ntawm qhov kub thiab txias, ib txheej txheej ntawm silicon carbide tso ncaj qha rau ntawm cov noob siv lead ua los ntawm cov tshuaj tiv thaiv. Qhov kom zoo dua ntawm txoj kev no yog tias tus nqi ntws thiab cov tshuaj tiv thaiv ntawm cov roj tuaj yeem raug tswj tau meej, thiaj li tau txais cov khoom siv lead ua silicon carbide nrog siab purity thiab ob peb yam tsis xws luag. Cov txheej txheem HT-CVD tuaj yeem tsim cov khoom siv silicon carbide nrog cov khoom zoo, uas yog qhov tshwj xeeb tshaj yog muaj txiaj ntsig rau cov ntawv thov uas yuav tsum muaj cov ntaub ntawv zoo heev.
Txoj kev loj hlob ntawm silicon carbide yog lub hauv paus ntawm nws daim ntawv thov thiab kev loj hlob. Los ntawm kev nruam kev thev naus laus zis thiab kev ua kom zoo dua qub, peb txoj hauv kev loj hlob no ua rau lawv lub luag haujlwm kom ua tau raws li qhov xav tau ntawm ntau lub sijhawm, kom ntseeg tau txoj haujlwm tseem ceeb ntawm silicon carbide. Nrog rau kev sib zog ntawm kev tshawb fawb thiab kev siv thev naus laus zis, cov txheej txheem kev loj hlob ntawm cov khoom siv silicon carbide yuav ua kom zoo dua qub, thiab kev ua haujlwm ntawm cov khoom siv hluav taws xob yuav raug txhim kho ntxiv.
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Post lub sij hawm: Jun-23-2024