Cov Khoom Siv Semiconductor Tiam Tom Ntej: Sapphire, Silicon, thiab Silicon Carbide

Hauv kev lag luam semiconductor, cov substrates yog cov khoom siv tseem ceeb uas kev ua haujlwm ntawm lub cuab yeej nyob ntawm. Lawv cov khoom siv lub cev, thermal, thiab hluav taws xob cuam tshuam ncaj qha rau kev ua haujlwm zoo, kev ntseeg siab, thiab qhov dav ntawm daim ntawv thov. Ntawm txhua txoj kev xaiv, sapphire (Al₂O₃), silicon (Si), thiab silicon carbide (SiC) tau dhau los ua cov substrates siv dav tshaj plaws, txhua tus zoo heev hauv ntau qhov chaw thev naus laus zis. Tsab xov xwm no tshawb nrhiav lawv cov yam ntxwv ntawm cov khoom siv, cov toj roob hauv pes ntawm daim ntawv thov, thiab cov qauv kev txhim kho yav tom ntej.

Sapphire: Lub Optical Workhorse

Sapphire yog ib daim ntawv siv lead ua los ntawm txhuas oxide nrog lub lattice hexagonal. Nws cov khoom tseem ceeb suav nrog qhov nyuaj tshwj xeeb (Mohs hardness 9), kev pom tseeb dav dav los ntawm ultraviolet mus rau infrared, thiab kev tiv taus tshuaj lom neeg muaj zog, ua rau nws zoo tagnrho rau cov khoom siv optoelectronic thiab cov chaw ib puag ncig hnyav. Cov txheej txheem kev loj hlob siab heev xws li Heat Exchange Method thiab Kyropoulos method, ua ke nrog kev txhuam tshuaj lom neeg (CMP), tsim cov wafers nrog qhov roughness ntawm sub-nanometer.

Cov khoom siv sapphire siv dav hauv LEDs thiab Micro-LEDs ua GaN epitaxial txheej, qhov twg cov qauv sapphire substrates (PSS) txhim kho kev ua haujlwm ntawm lub teeb. Lawv kuj siv rau hauv cov khoom siv RF zaus siab vim lawv cov khoom siv hluav taws xob rwb thaiv tsev, thiab hauv cov khoom siv hluav taws xob thiab cov ntawv thov aerospace ua cov qhov rai tiv thaiv thiab cov npog sensor. Cov kev txwv suav nrog kev ua kom sov tsawg (35–42 W / m·K) thiab lattice mismatch nrog GaN, uas xav tau cov khaubncaws sab nraud povtseg kom txo qis qhov tsis zoo.

Silicon: Lub Tuam Txhab Microelectronics

Silicon tseem yog lub hauv paus ntawm cov khoom siv hluav taws xob ib txwm muaj vim nws lub ecosystem kev lag luam uas loj hlob tuaj, kev hloov pauv hluav taws xob los ntawm kev doping, thiab cov khoom siv thermal nruab nrab (thermal conductivity ~ 150 W / m · K, melting point 1410 ° C). Ntau tshaj 90% ntawm cov integrated circuits, suav nrog CPUs, nco, thiab cov khoom siv logic, yog tsim los ntawm silicon wafers. Silicon kuj tseem yog cov photovoltaic cells thiab siv dav hauv cov khoom siv hluav taws xob qis-rau-nruab nrab xws li IGBTs thiab MOSFETs.

Txawm li cas los xij, silicon ntsib teeb meem hauv kev siv high-voltage thiab high-frequency vim nws qhov bandgap nqaim (1.12 eV) thiab indirect bandgap, uas txwv qhov ua haujlwm ntawm lub teeb.

Silicon Carbide: Tus Tsim Kho Tshiab Muaj Zog Siab

SiC yog ib yam khoom siv semiconductor tiam thib peb uas muaj qhov dav bandgap (3.2 eV), qhov hluav taws xob tawg siab (3 MV/cm2), qhov ua kom sov siab (~490 W/m·K), thiab qhov ceev ntawm electron saturation (~2 × 10⁷ cm/s). Cov yam ntxwv no ua rau nws zoo tagnrho rau cov khoom siv hluav taws xob siab, muaj zog ntau, thiab muaj zaus ntau. Cov khoom siv SiC feem ntau yog cog los ntawm kev thauj mus los ntawm lub cev (PVT) ntawm qhov kub tshaj 2000°C, nrog rau cov kev xav tau ua tiav nyuaj thiab meej.

Cov ntawv thov suav nrog cov tsheb fais fab, qhov twg SiC MOSFETs txhim kho kev ua haujlwm ntawm inverter los ntawm 5–10%, 5G kev sib txuas lus siv semi-insulating SiC rau GaN RF cov khoom siv, thiab smart grids nrog high-voltage direct current (HVDC) kis tau txo qhov poob zog los ntawm txog li 30%. Cov kev txwv yog cov nqi siab (6-nti wafers kim dua 20–30 npaug ntau dua li silicon) thiab cov teeb meem ua tiav vim muaj qhov nyuaj heev.

Lub Luag Haujlwm Sib Txuas thiab Kev Cia Siab Yav Tom Ntej

Sapphire, silicon, thiab SiC tsim ib lub ecosystem substrate sib txuas hauv kev lag luam semiconductor. Sapphire tswj hwm optoelectronics, silicon txhawb nqa cov microelectronics ib txwm muaj thiab cov khoom siv hluav taws xob qis-rau-nruab nrab, thiab SiC ua tus thawj coj hauv cov khoom siv hluav taws xob siab-voltage, siab-zaus, thiab ua haujlwm siab.

Kev txhim kho yav tom ntej suav nrog kev nthuav dav cov ntawv thov sapphire hauv cov LEDs UV tob thiab micro-LEDs, ua rau Si-based GaN heteroepitaxy txhim kho kev ua haujlwm siab, thiab nce SiC wafer ntau lawm mus rau 8 nti nrog kev txhim kho cov txiaj ntsig thiab kev siv nyiaj zoo. Ua ke, cov ntaub ntawv no tab tom tsav tsheb tsim kho tshiab thoob plaws 5G, AI, thiab kev txav mus los hluav taws xob, tsim cov tiam tom ntej ntawm cov thev naus laus zis semiconductor.