Patterned Sapphire Substrate PSS 2inch 4inch 6inch ICP qhuav etching tuaj yeem siv rau LED chips
Core yam ntxwv
1. Cov yam ntxwv ntawm cov khoom siv: Cov khoom siv substrate yog ib qho siv lead ua sapphire (Al₂O₃), muaj zog hardness, siab kub tsis kam thiab tshuaj stability.
2. Cov qauv saum npoo: Qhov saum npoo yog tsim los ntawm photolithography thiab etching rau hauv cov txheej txheem micro-nano, xws li cones, pyramids lossis hexagonal arrays.
3. Kev ua haujlwm kho qhov muag: Los ntawm kev tsim qauv tsim, tag nrho cov kev xav ntawm lub teeb ntawm lub interface yog txo, thiab lub teeb extraction efficiency yog txhim kho.
4. Thermal kev ua tau zoo: Sapphire substrate muaj thermal conductivity zoo heev, haum rau siab zog LED daim ntaub ntawv.
5. Loj specifications: Feem ntau qhov ntau thiab tsawg yog 2 nti (50.8mm), 4 nti (100mm) thiab 6 nti (150mm).
Cov chaw siv tseem ceeb
1. LED manufacturing:
Txhim kho lub teeb tshem tawm kev ua haujlwm zoo: PSS txo lub teeb poob los ntawm kev tsim qauv, txhim kho LED ci ntsa iab thiab luminous efficiency.
Txhim kho epitaxial kev loj hlob zoo: Cov qauv qauv muab kev loj hlob zoo dua rau GaN epitaxial txheej thiab txhim kho LED kev ua haujlwm.
2. Laser Diode (LD):
Siab zog lasers: Lub siab thermal conductivity thiab stability ntawm PSS yog haum rau siab zog laser diodes, txhim kho tshav kub dissipation kev ua tau zoo thiab kev ntseeg tau.
Tsawg qhov pib tam sim no: Ua kom zoo dua epitaxial kev loj hlob, txo qhov pib tam sim no ntawm laser diode, thiab txhim kho kev ua haujlwm.
3. Photodetector:
Siab rhiab heev: Lub teeb kis tau tus mob siab thiab tsis muaj qhov tsis xws luag ntawm PSS txhim kho qhov rhiab heev thiab teb ceev ntawm photodetector.
Wide spectral teb: haum rau photoelectric nrhiav tau nyob rau hauv lub ultraviolet kom pom ntau yam.
4. Lub zog hluav taws xob:
High voltage kuj: Sapphire lub siab rwb thaiv tsev thiab thermal stability yog haum rau high voltage hwj chim li.
Ua kom muaj cua sov kom zoo: Cov thermal conductivity zoo txhim kho cov cua sov ua haujlwm ntawm cov khoom siv hluav taws xob thiab ua rau lub neej ua haujlwm ntev.
5. rf khoom siv:
Kev ua haujlwm siab: Qhov qis dielectric poob thiab siab thermal stability ntawm PSS yog tsim rau cov khoom siv RF zaus.
Tsis tshua muaj suab nrov: Siab flatness thiab tsis muaj qhov tsis xws luag txo cov suab nrov thiab txhim kho cov teeb liab zoo.
6. Biosensors:
High rhiab heev nrhiav tau: Lub teeb kis tau tus mob siab thiab tshuaj stability ntawm PSS yog haum rau siab rhiab heev biosensors.
Biocompatibility: Lub biocompatibility ntawm sapphire ua rau nws haum rau kev kho mob thiab biodetection daim ntaub ntawv.
Patterned sapphire substrate (PSS) nrog GaN epitaxial khoom:
Patterned sapphire substrate (PSS) yog qhov zoo tshaj plaws substrate rau GaN (gallium nitride) epitaxial kev loj hlob. Lub lattice tas li ntawm sapphire yog ze rau GaN, uas tuaj yeem txo cov lattice mismatches thiab tsis xws luag hauv kev loj hlob ntawm epitaxial. Cov qauv micro-nano ntawm PSS nto tsis tsuas yog txhim kho lub teeb pom kev zoo, tab sis kuj txhim kho cov siv lead ua zoo ntawm GaN epitaxial txheej, yog li txhim kho kev ua haujlwm thiab kev ntseeg siab ntawm LED.
Technical parameters
| Yam khoom | Patterned Sapphire Substrate (2 ~ 6 nti) | ||
| Txoj kab uas hla | 50.8 ± 0.1 hli | 100.0 ± 0.2 hli | 150.0 ± 0.3 hli |
| Thickness | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Surface Orientation | C-plane (0001) tawm-lub kaum sab xis rau M-axis (10-10) 0.2 ± 0.1 ° | ||
| C-plane (0001) tawm-lub kaum sab xis rau A-axis (11-20) 0 ± 0.1 ° | |||
| Thawj Txoj Kev Ncaj Ncees | A-Plaev (11-20) ± 1.0 ° | ||
| Qhov Loj Loj Loj | 16.0 ± 1.0 hli | 30.0 ± 1.0 hli | 47.5 ± 2.0 hli |
| R-Plane | 9:o ib | ||
| Pem hauv ntej nto tiav | Qauv | ||
| Back Surface Finish | SSP: Fine-av, Ra = 0.8-1.2um; DSP: Epi-polished, Ra <0.3nm | ||
| Laser Mark | Sab nraum qab | ||
| TTV | ≤ 8m | ≤10μm | ≤ 20μm |
| HUV | ≤10μm | ≤15μm | ≤ 25μm |
| WARP | ≤12μm | ≤ 20μm | ≤30μm |
| Ntug Exclusion | ≤ 2 hli | ||
| Qauv Specification | Cov qauv zoo | Dome, Cone, Pyramid | |
| Qauv Qhov siab | 1.6 ~ 1.8 hli | ||
| Qauv Diameter | 2.75 ~ 2.85 hli | ||
| Qauv Chaw | 0.1 ~ 0.3 hli | ||
XKH tshwj xeeb hauv kev muab cov khoom lag luam zoo, customized qauv sapphire substrates (PSS) nrog kev txhawb nqa thiab kev pab cuam tom qab muag los pab cov neeg siv khoom ua tiav kev tsim kho tshiab hauv LED, zaub thiab optoelectronics.
1. Cov khoom zoo PSS: Patterned sapphire substrates hauv ntau qhov ntau thiab tsawg (2 ", 4", 6 ") kom tau raws li cov kev xav tau ntawm LED, zaub thiab optoelectronic li.
2. Customized tsim: Customize tus nto micro-nano qauv (xws li lub khob hliav qab, pyramid los yog hexagonal array) raws li cov neeg xav tau kev pab kom optimize lub teeb extraction efficiency.
3. Kev pab txhawb nqa: Muab PSS daim ntawv thov tsim, kev ua kom zoo dua qub thiab kev sib tham ua haujlwm los pab cov neeg siv khoom txhim kho cov khoom lag luam.
4. Kev txhawb nqa kev loj hlob ntawm epitaxial: PSS txuam nrog GaN epitaxial cov khoom yog muab los xyuas kom meej cov txheej txheem epitaxial loj hlob zoo.
5. Kev ntsuam xyuas thiab ntawv pov thawj: Muab PSS daim ntawv ntsuam xyuas zoo los xyuas kom meej tias cov khoom ua tau raws li cov qauv kev lag luam.
Daim duab qhia ntxaws
