Cov Khoom Siv Semiconductor Laser Lift-Off Hloov Pauv Hloov Pauv Ingot Thinning
Daim duab qhia ntxaws ntxaws
Khoom Taw Qhia Txog Semiconductor Laser Lift-Off Equipment
Cov Khoom Siv Semiconductor Laser Lift-Off yog ib qho kev daws teeb meem kev lag luam tshwj xeeb uas tau tsim los rau kev ua kom cov semiconductor ingots nyias thiab tsis sib cuag los ntawm kev siv laser-induced lift-off techniques. Lub kaw lus siab heev no ua lub luag haujlwm tseem ceeb hauv cov txheej txheem semiconductor wafering niaj hnub no, tshwj xeeb tshaj yog hauv kev tsim cov ultra-thin wafers rau cov khoom siv hluav taws xob muaj zog, LEDs, thiab RF. Los ntawm kev ua kom muaj kev sib cais ntawm cov khaubncaws sab nraud povtseg nyias los ntawm cov ingots loj lossis cov khoom pub dawb, Semiconductor Laser Lift-Off Equipment hloov pauv kev ua kom cov ingot nyias los ntawm kev tshem tawm cov kauj ruam sawing, sib tsoo, thiab tshuaj etching.
Kev ua kom nyias nyias ntawm cov khoom siv semiconductor, xws li gallium nitride (GaN), silicon carbide (SiC), thiab sapphire, feem ntau yog siv zog ntau, pov tseg, thiab yooj yim rau microcracks lossis kev puas tsuaj ntawm qhov chaw. Qhov sib txawv, Semiconductor Laser Lift-Off Equipment muab kev xaiv tsis ua puas tsuaj, meej uas txo qis kev poob khoom thiab kev ntxhov siab ntawm qhov chaw thaum ua kom muaj txiaj ntsig zoo. Nws txhawb nqa ntau yam khoom siv crystalline thiab compound thiab tuaj yeem sib xyaw ua ke rau hauv cov kab ntau lawm semiconductor pem hauv ntej lossis nruab nrab.
Nrog rau cov wavelengths laser uas teeb tsa tau, cov txheej txheem tsom mus rau qhov hloov pauv, thiab cov wafer chucks uas sib xws nrog lub tshuab nqus tsev, cov khoom siv no tshwj xeeb tshaj yog haum rau kev txiav cov ingot, kev tsim lamella, thiab kev rhuav tshem cov zaj duab xis ultra-thin rau cov qauv khoom siv ntsug lossis kev hloov pauv txheej heteroepitaxial.
Cov Khoom Siv Semiconductor Laser Lift-Off
| Qhov ntev ntawm lub zog | IR/SHG/THG/FHG |
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| Qhov Dav ntawm lub plawv dhia | Nanosecond, Picosecond, Femtosecond |
| Lub Tshuab Kho Qhov Muag | Lub kaw lus kho qhov muag ruaj khov lossis Galvano-optical system |
| XY Theem | 500 hli × 500 hli |
| Kev Ua Haujlwm Ntau Yam | 160 hli |
| Kev Ceev ntawm Kev Txav Mus Los | Siab tshaj 1,000 hli/sec |
| Rov ua dua tau | ±1 μm lossis tsawg dua |
| Qhov Tseeb ntawm Qhov Chaw: | ±5 μm lossis tsawg dua |
| Qhov Loj ntawm Wafer | 2-6 nti lossis kho kom haum |
| Kev Tswj | Windows 10, 11 thiab PLC |
| Lub zog fais fab mov | AC 200 V ±20 V, Ib theem xwb, 50/60 kHz |
| Qhov Loj Sab Nraud | 2400 hli (Dav) × 1700 hli (Ntev) × 2000 hli (Siab) |
| Qhov hnyav | 1,000 kg |
Txoj Cai Ua Haujlwm ntawm Semiconductor Laser Lift-Off Equipment
Lub hauv paus tseem ceeb ntawm Semiconductor Laser Lift-Off Equipment vam khom kev xaiv photothermal decomposition lossis ablation ntawm qhov sib txuas ntawm cov khoom pub dawb thiab epitaxial lossis txheej phiaj. Lub laser UV muaj zog siab (feem ntau KrF ntawm 248 nm lossis cov khoom siv UV khov kho nyob ib puag ncig 355 nm) yog tsom mus rau cov khoom pub dawb pob tshab lossis semi-pob tshab, qhov twg lub zog raug nqus tau xaiv ntawm qhov tob uas tau teem tseg.
Qhov kev nqus zog hauv zos no tsim cov roj theem siab lossis txheej thermal nthuav dav ntawm qhov sib txuas, uas pib qhov kev sib cais huv ntawm cov wafer sab saud lossis txheej khoom siv los ntawm lub hauv paus ingot. Cov txheej txheem tau kho kom zoo los ntawm kev kho cov kev teeb tsa xws li qhov dav ntawm lub zog, laser fluence, scanning ceev, thiab z-axis focal tob. Qhov tshwm sim yog ib daim nyias heev - feem ntau nyob rau hauv 10 txog 50 µm - sib cais huv si ntawm niam txiv ingot yam tsis muaj kev puas tsuaj.
Txoj kev siv laser lift-off rau ingot thinning no zam kev poob kerf thiab kev puas tsuaj ntawm qhov chaw cuam tshuam nrog kev txiav hlau pob zeb diamond lossis kev siv tshuab lapping. Nws kuj tseem khaws cia kev ncaj ncees ntawm cov siv lead ua thiab txo cov kev xav tau polishing downstream, ua rau Semiconductor Laser Lift-Off Equipment ua lub cuab yeej hloov pauv rau kev tsim cov wafer tiam tom ntej.
Cov ntawv thov ntawm Semiconductor Laser Lift-Off Equipment
Cov Khoom Siv Semiconductor Laser Lift-Off pom muaj kev siv dav hauv kev ua kom cov ingot nyias nyias hla ntau yam khoom siv siab heev thiab hom khoom siv, suav nrog:
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GaN thiab GaAs Ingot Thinning rau Cov Khoom Siv Fais Fab
Ua rau muaj kev tsim cov wafer nyias rau cov transistors fais fab thiab diodes uas ua haujlwm tau zoo, tsis tshua muaj zog.
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Kev Rov Kho Dua SiC Substrate thiab Lamella Separation
Tso cai rau wafer-scale lift-off los ntawm cov khoom siv SiC rau cov qauv khoom siv ntsug thiab wafer rov siv dua.
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LED Wafer Slicing
Pab txhawb kev nqa cov txheej GaN los ntawm cov pob zeb sapphire tuab los tsim cov khoom siv LED ultra-thin.
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Kev Tsim Khoom Siv RF thiab Microwave
Txhawb nqa cov qauv ultra-thin high-electron-mobility transistor (HEMT) uas xav tau hauv 5G thiab radar systems.
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Kev Hloov Pauv Txheej Epitaxial
Tshem tawm cov khaubncaws sab nraud povtseg epitaxial ntawm cov pob zeb crystalline kom meej rau kev siv dua lossis kev koom ua ke rau hauv heterostructures.
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Cov Cell Hnub Ci Thin-Film thiab Photovoltaics
Siv los cais cov txheej nqus dej nyias nyias rau cov roj teeb hnub ci uas yoog tau lossis ua haujlwm tau zoo.
Hauv txhua qhov chaw no, Semiconductor Laser Lift-Off Equipment muab kev tswj hwm tsis muaj kev sib xws ntawm cov tuab sib xws, qhov zoo ntawm qhov chaw, thiab kev ncaj ncees ntawm txheej.
Cov txiaj ntsig ntawm Laser-Based Ingot Thinning
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Kev Poob Khoom Siv Zero-Kerf
Piv rau cov txheej txheem slicing wafer ib txwm muaj, cov txheej txheem laser ua rau yuav luag 100% kev siv cov khoom siv.
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Kev Nyuaj Siab Tsawg Tshaj Plaws thiab Kev Ncua
Kev nqa tawm uas tsis sib chwv tshem tawm kev co ntawm lub cev, txo cov wafer bow thiab microcrack tsim.
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Kev Tiv Thaiv Qhov Zoo Ntawm Qhov Chaw
Feem ntau tsis tas yuav tsum tau lapping lossis polishing tom qab thinning, vim tias laser lift-off khaws cia qhov kev ncaj ncees ntawm sab saum toj.
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Kev Siv Tau Zoo thiab Kev Npaj Txhij Automation
Muaj peev xwm ua tau ntau pua lub substrates ib zaug ua haujlwm nrog kev thauj khoom / tshem tawm tsis siv neeg.
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Haum rau ntau yam khoom siv
Sib xws nrog GaN, SiC, sapphire, GaAs, thiab cov ntaub ntawv III-V tshiab.
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Kev Nyab Xeeb Ib Puag Ncig
Txo kev siv cov khoom siv abrasives thiab cov tshuaj lom neeg uas feem ntau siv rau hauv cov txheej txheem thinning uas siv slurry.
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Siv dua cov khoom siv
Cov khoom pub dawb tuaj yeem rov ua dua tshiab rau ntau lub voj voog nqa tawm, txo cov nqi khoom siv tau zoo heev.
Cov Lus Nug Feem Ntau (FAQ) ntawm Semiconductor Laser Lift-Off Equipment
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Q1: Cov Khoom Siv Semiconductor Laser Lift-Off tuaj yeem ua tiav qhov tuab npaum li cas rau cov wafer slices?
A1:Feem ntau cov tuab ntawm daim hlais yog li ntawm 10 µm txog 100 µm nyob ntawm cov khoom siv thiab kev teeb tsa.Q2: Cov khoom siv no puas siv tau los ua cov ingots ua los ntawm cov ntaub ntawv opaque xws li SiC?
A2:Yog. Los ntawm kev kho qhov wavelength ntawm laser thiab ua kom zoo dua qhov interface engineering (piv txwv li, sacrificial interlayers), txawm tias cov ntaub ntawv uas tsis pom tseeb ib nrab kuj tuaj yeem ua tiav tau.Q3: Cov khoom siv pub dawb tau teeb tsa li cas ua ntej laser nqa tawm?
A3:Lub kaw lus siv cov modules sib dhos raws li sub-micron vision-based nrog cov lus tawm tswv yim los ntawm cov cim fiducial thiab kev ntsuas qhov chaw reflectivity.Q4: Lub sijhawm xav tau rau ib qho kev ua haujlwm laser nqa tawm yog dab tsi?
A4:Nyob ntawm seb qhov loj thiab tuab ntawm wafer, cov voj voog ib txwm kav ntev li 2 txog 10 feeb.Q5: Cov txheej txheem puas xav tau ib puag ncig huv si?
A5:Txawm hais tias tsis yog qhov yuav tsum tau ua, kev koom ua ke hauv chav huv si yog qhov pom zoo kom tswj tau qhov huv ntawm cov khoom siv thiab cov khoom siv thaum lub sijhawm ua haujlwm siab.
Txog Peb
XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.
