Sic ceramic chuck ceramic ceramed khob precision machining customized

Cov lus piav qhia luv luv:

Silicon carbide cerffic Cerker yog qhov kev xaiv zoo tshaj plaws rau kev tsim qauv semiconductor vim nws lub siab tawv, siab thermal condability. Nws cov high tiaj tiaj thiab nto ua tiav kom muaj kev sib cuag tag nrho ntawm cov wafer thiab tus ntxaij, txo kev puas tsuaj thiab kev puas tsuaj; Kev kub siab thiab corrosion tsis kam ua rau nws haum rau cov txheej txheem kev ua haujlwm; Nyob rau tib lub sijhawm, lub teeb yuag thiab cov yam ntxwv ntev ntev tsim muaj cov nqi ntau lawm thiab yog tsis tseem ceeb tseem ceeb hauv wafer txiav, polishing, lithography thiab lwm yam txheej txheem.


Khoom Qhia Qhia

Khoom Ntawv

Cov yam ntxwv cov khoom siv:

1.High hardness: lub mohs hardness ntawm silicon carbide yog 9.2-9.5, thib ob tsuas yog pob zeb diamond, nrog lub zog hnav tsis kam.
2. Siab thermal conductivity: Lub thermal conductivity ntawm silicon carbide yog li ntau li 120-200 w / min, uas muaj lub zog ua kom sov sai sai.
3. Tsawg Tsawg Thermal nthuav tawm coeffanic: Silicon Caral Thermal Kev nthuav tawm coefficient yog tsawg (4.0 × 10, tseem tuaj yeem tswj qhov seem ntawm qhov kub.
4. Tshuaj lom neeg ruaj khov: Silicon carbide acid thiab alkali corrosion tsis kam, haum rau siv nyob rau hauv kev sib xyaw tshuaj corrosive.
5

Nta:

1.Txoj kev lag luam semicond |
2.Silicon Carbide Sucker muaj cov thermal zoo conderivity, tuaj yeem ua kom luv cov waxing thiab waxing sij hawm, txhim kho ntau lawm kev ua tau zoo.
3.Silicon lub tshuab nqus tsev ntxais ntxaij kuj muaj cov kua qaub zoo thiab alkali corrosion tsis kam.
4.Cov nrog cov tsoos Corundum cab kuj, luv luv ntawm cov chaw thau khoom thiab thauj khoom cua sov thiab lub sijhawm cua txias, txhim kho kev ua haujlwm; Nyob rau tib lub sijhawm, nws tuaj yeem txo cov phiaj xwm nruab nrab ntawm cov phiaj loj thiab qis dua, tswj lub dav hlau zoo, thiab txuas ntxiv lub neej muaj txij li 40%.
5.Qhov cov khoom sib faib yog cov khoom me me, lub teeb hnyav. Nws yooj yim dua rau cov neeg ua haujlwm nqa pallets, txo txoj kev pheej hmoo ntawm kev sib tsoo sib tsoo los ntawm kev thauj cov teeb meem ntawm 20%.
6.ize: Ntau tshaj ntawm txoj kab uas hla 640 hli; Flartness: 3um lossis tsawg dua

Daim Ntawv Thov Teb:

1. Semiconductor Raug
Wafer kev ua:
Rau Wafer Fixation hauv Photolithography, etching, nyias zaj duab xis thiab lwm cov txheej txheem, kom muaj tseeb thiab txheej txheem sib luag. Nws cov kub kub thiab corrosion kuj yog haum rau Harts slicationonductor chaw tsim khoom.
● Epicsaxial kev loj hlob:
Hauv Sic lossis Gan Epitaxial kev loj hlob, raws li cov cab kuj rau cua sov thiab kho wafers, kom muaj kev zoo siab ntawm kev ua kom sov siab, txhim kho cov khoom siv ntsuas kub, txhim kho kev ua tau zoo.
2. Photeelectric cov khoom siv
LED manufacturing:
Siv los txhim kho sapphire lossis sic substrate, thiab raws li cov txheej txheem cua sov hauv MOCVD cov txheej txheem, kom ntseeg tau tias qhov kev sib txawv ntawm kev loj hlob, txhim kho Luminous efficiency thiab zoo.
Laser Diode:
Raws li lub high-precision fixture, kho thiab cua sov ua kom ntseeg tau cov txheej txheem kub ruaj khov, txhim kho cov zis hluav taws xob thiab kev ntseeg tau ntawm cov laser dier.
3. Precision Machining
● Optical Cheebtsam ua:
Nws yog siv rau kev txhim kho precision Cheebtsam xws li cov ntxaij lim dej thiab cov ntxaij lim dej kom meej thiab tsis muaj kuab lom thaum ua, thiab yog qhov tsim nyog rau kev siv tshuab hluav taws xob siab.
Cov khoom lag luam:
Raws li fixisty siab ruaj khov, nws yog qhov tsim nyog rau precision machining machining machining tshuab kom ntseeg tau tias yog qhov tseeb thiab xwm yeem nyob rau hauv ib puag ncig kub thiab corrosive.
4. Kev sim tshawb fawb
Kev sim kub kub:
Raws li cov qauv kev txhim kho cov khoom siv hauv qhov chaw kub thiab txias tshaj plaws 1600 ° C kom ntseeg tau qhov kub thiab txias.
Nqus kev kuaj:
Raws li cov qauv kev txhim kho thiab cov thauj khoom cua sov hauv lub tshuab nqus ib puag ncig, kom ntseeg tau tias qhov raug thiab rov ua dua ntawm cov txheej txheem thiab kev kho cua sov.

Cov Kev Tshwj Xeeb:

(Khoom siv khoom siv)

(Chav)

(ssic)

(SIC cov ntsiab lus)

 

(Wt)%

> 99

(Nruab nrab grain loj)

 

Micron

4-10

(Ntom)

 

KG / DM3

> 3.14

(Pom Porosity)

 

VO1%

<0.5

(Vickers hardness)

Hv 0.5

GPA

28

* (FLEXURAL HEEV)
* (peb ntsiab lus)

20ºC

MPa

450

(Compressive zog)

20ºC

MPa

3900

(Elastic Modulus)

20ºC

GPA

420

(Bacture tougness)

 

MPA / M '%

3.5

(Thermal conductivity)

20 ° ºC

W / (m * k)

160

(Resistivity)

20 ° ºC

Ohm.cm

106-108


(Thermal nthuav kev coefficient)

A (RT ** ... 80ºC)

K-1 * 10-6

4.3


(Ntau tshaj plaws ua haujlwm kub)

 

tsev yug menyuam

1700

Nrog rau xyoo ntawm kev nce qib thiab kev paub kev lag luam, xkh muaj peev xwm ua rau cov neeg siv khoom cua rau cov qhua tuaj noj mov, kom muaj zog yoog raws li cov khoom lag luam zoo kawg nkaus. Siic Silicon carbide ceramic cerams chucks tau dhau los ua qhov tsis tseem ceeb thiab lwm cov txheej txheem tseem ceeb vim lawv qhov kub thiab txias thiab tshuaj lom neeg qhov sov. Tshwj xeeb tshaj yog nyob rau hauv kev tsim khoom ntawm cov khoom lag luam thib peb semiconductor xws li Sic thiab Gan, qhov kev thov rau Silicon Carbide Ceramic cerams tseem loj hlob. Yav tom ntej, nrog kev loj hlob sai ntawm 5G, hluav taws xob hluav taws xob thiab lwm yam kev thov qhuas ntawm silicon carucks nyob rau hauv kev lag luam semiconduct nyob rau hauv semiconductor kev lag luam yog qhov dav.

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Cov duab kos kom ntxaws

Sic Ceramic Chuck 6
SIC Ceramic Chuck 5
Si Ceramic Chuck 4

  • Yav dhau los:
  • Tom ntej:

  • Sau koj cov lus ntawm no thiab xa mus rau peb