SiC ceramic tais phaj graphite nrog CVD SiC txheej rau cov khoom siv

SiC ceramic tais phaj graphite nrog CVD SiC txheej rau cov khoom Featured duab

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Shanghai Xinkehui Tshiab Khoom Co., Ltd. tsim Φ380mm-Φ600mm semiconductor etching disk, wafer bearing disk, silicon carbide tais, SIC tais, silicon carbide tais, ICP etching tais, etching tais, silicon carbide 9 .9% kev pab cuam lub neej > yog plaub zaug ntawm graphite-based CVD tais, siv mus sij hawm ntev tsis muaj deformation, Resistant rau FH acid, concentrated H2So4 corrosion.

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Silicon carbide ceramics tsis yog tsuas yog siv nyob rau hauv cov yeeb yaj kiab nyias nyias, xws li epitaxy lossis MOCVD, lossis hauv kev ua haujlwm wafer, ntawm lub plawv uas cov wafer nqa cov tais rau MOCVD yog thawj zaug rau qhov chaw tso nyiaj, thiab yog li ntawd muaj zog tiv taus. Thaum tshav kub kub thiab corrosion.SiC-coated carriers kuj muaj thermal conductivity thiab zoo heev thermal faib khoom.

Pure Chemical Vapor Deposition Silicon Carbide (CVD SiC) wafer nqa rau kev kub siab Hlau Organic Chemical Vapor Deposition (MOCVD) ua.

Ntshiab CVD SiC wafer cov neeg nqa khoom muaj txiaj ntsig zoo dua rau cov khoom siv wafer siv nyob rau hauv cov txheej txheem no, uas yog graphite thiab coated nrog ib txheej ntawm CVD SiC.cov coated graphite-raws li cov cab kuj tsis tuaj yeem tiv taus qhov kub thiab txias (1100 txog 1200 degrees Celsius) yuav tsum tau rau GaN deposition ntawm hnub no lub siab brightness xiav thiab dawb coj.Qhov kub siab ua rau cov txheej txheem tsim cov pinholes me me los ntawm cov txheej txheem tshuaj erodes cov graphite hauv qab.Cov graphite hais ces flake tawm thiab paug GaN, ua rau cov coated wafer cab kuj hloov.

CVD SiC muaj purity ntawm 99.999% los yog ntau tshaj thiab muaj thermal conductivity thiab thermal shock kuj.Yog li ntawd, nws tuaj yeem tiv taus qhov kub thiab txias ib puag ncig ntawm lub teeb ci siab LED tsim.Nws yog cov khoom siv monolithic uas ncav cuag theoretical ntom ntom, tsim cov khoom me me, thiab nthuav tawm siab heev corrosion thiab yaig kuj.Cov khoom siv tuaj yeem hloov qhov opacity thiab conductivity yam tsis tau qhia cov hlau tsis huv.Cov neeg nqa khoom wafer feem ntau yog 17 nti hauv txoj kab uas hla thiab tuaj yeem tuav txog 40 2-4 nti wafers.