Silicon Carmide Ceramic Ceramic Ceramer Tuav Silicon Carbide Ceramic Ceramic Reepering Kev Ua Haujlwm Ua Haujlwm

Silicon Carmide Ceramic Ceramic Cerker Seem Txhaum silicon carbide ceramic ceramic raj mov kub ua hauj lwm cov hauj lwm kub

Cov lus piav qhia luv luv:

Silicon carbide ceramic ceramic ceramic ceramic ceramic ceramic ceramic ceramic hlab yog indispensable cov ntaub ntawv siab zoo hauv semiconductor kev tsim khoom. Silicon carbide ceramic ceramic tej phaj yog tsuas yog siv nyob rau hauv kev sib tw ua kom ruaj thiab kabmob, kom ntseeg tau tias lub siab ntawm cov txheej txheem siab; Silicon carbide ceramic hlab yog dav siv nyob rau hauv cov leeg cua sov, diffusion rauv tub sab thiab lwm yam xwm txheej los tiv thaiv zoo ib puag ncig thiab tswj cov thermal tswj. Ob qho tib si yog nyob ntawm silicon carbide raws li cov khoom siv tseem ceeb hauv kev lag luam semiconduct nyob rau hauv lub cev thiab tshuaj lom neeg zoo.

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Khoom Qhia Qhia

Khoom Ntawv

Lub ntsiab nta:

1. Silicon Carbide Ceramic Tais
- Muaj kev nyuaj siab thiab hnav tsis kam: Lub hardness yog ze rau pob zeb diamond, thiab tuaj yeem tiv thaiv kev nyab xeeb hauv kev ua haujlwm ntev.
- Hike thermal conductivity thiab tsawg thermal nthuav kev coefficient: zam kev nrawm, zam kev ntxhov siab los ntawm kev ntxhov siab thermal.
- High flatness thiab nto tas: Lub tiaj tiaj tiaj: Nyob rau sab saum toj yog li ntawm qib, kom muaj kev sib cuag tag nrho ntawm cov wafer thiab daim disk, txo kev puas tsuaj thiab kev puas tsuaj.
Tshuaj lom neeg ruaj khov: muaj zog corrosion tsis kam, haum rau ntub tu thiab etching cov txheej txheem hauv semiconductor raug.
2. Silicon Carbide Ceramic Tube
- Cov dej kub siab kuj: nws tuaj yeem ua haujlwm hauv qhov chaw kub ib puag ncig zoo tshaj 1600 ° C rau lub sijhawm ntev, haum rau semiconductor siab cov txheej txheem kub.
Zoo heev corrosion: resistant rau cov kua qaub, alkalis thiab ntau yam tshuaj kuab tshuaj, haum rau cov txheej txheem kev ua kom ib puag ncig.
- Muaj kev nyuaj siab thiab hnav tsis kam: Ua kom cov particle erosion thiab kev hnav tshuab, txuas ntxiv lub neej pabcuam.
- Hike thermal conductivity thiab tsawg coefficient ntawm thermal expationion: condension ntawm tshav kub thiab tawg tawm los ntawm kev ntxhov siab thermal.

Khoom parameter:

Silicon Carbide Ceramic Tais Parameter:

(Khoom siv khoom siv)		(Chav)	(ssic)
(SIC cov ntsiab lus)		(Wt)%	> 99
(Nruab nrab grain loj)		Micron	4-10
(Ntom)		KG / DM3	> 3.14
(Pom Porosity)		VO1%	<0.5
(Vickers hardness)	Hv 0.5	GPA	28
* () Flucal lub zog * (peb ntsiab lus)	20ºC	MPa	450
(Compressive zog)	20ºC	MPa	3900
(Elastic Modulus)	20ºC	GPA	420
(Bacture tougness)		MPA / M '%	3.5
(Thermal conductivity)	20 ° ºC	W / (m * k)	160
(Resistivity)	20 ° ºC	Ohm.cm	106-108
(Thermal nthuav kev coefficient)	A (RT ** ... 80ºC)	K-1 * 10-6	4.3
(Ntau tshaj plaws ua haujlwm kub)		tsev yug menyuam	1700

Silicon carbide ceramic raj parameter:

Cov khoom	Phiaj qhia ntawv
α-sic	99% min
Pom porosity	16% Max
Ceev ntom	2.7G / CM3 min
BENDING LUB ZOG HEEV	100 mpa min
Coefficient ntawm thermal expansion	K-1 4.7x10 -6
Coefficient ntawm thermal conductivity (1400ºC)	24 w / mk
Max. Tsev hauj lwm kub	1650ºC

Cov ntawv thov MAIN:

1. Silicon Carbide Ceramic Phaj
- WELFER txiav thiab polishing: ua haujlwm ua kev sib tw platform kom ntseeg tau siab siab thiab ruaj khov thaum lub sij hawm txiav thiab polishing.
- Cov txheej txheem Lithography: Lub wafer yog tsau nyob rau hauv lub livy lub tshuab los xyuas kom muaj kev ua kom siab precision tso thaum kis tau.
- Tshuaj kho kom zoo polishing (CMP): Ua raws li kev txhawb nqa platform rau polishing cov ntaub qhwv, muab cov khoom siv sib xyaw thiab kev xa tawm kub.
2. Silicon Carbide Ceramic Tube
- Kev kub kub sov ntawm cov khoom kub: siv rau cov khoom siv kub siab xws li diffusion rauv thiab oxidation rauv los nqa cov txheej txheem hnyav kom muaj cov txheej txheem kub siab.
- CVD / PVD Txheej Txheem: Raws li cov ris ris hauv cov tshuaj tiv thaiv chamber, tiv taus cov pa taws kub thiab muaj roj av.
- Cov cuab yeej siv hluav taws xob (thev naus laus zis cov khoom siv hluav taws xob: rau cov tshuab hluav taws xob, roj pipelines, thiab lwm yam, txhawm rau txhim kho cov cua sov kev ua haujlwm.
Xkh muaj tag nrho ntawm cov kev pabcuam kev cai rau silicon carbide ceramic ceramic ceramic, xuas ua khob thiab silicon carbide hlab ntshaia. Silicon carbide ceramic ceramic ceramic thiab xuas khob, xkh tuaj yeem kho tau raws li cov neeg siv khoom sib txawv, txhim kho kev kho mob tshwj xeeb thiab corrosion tsis kam; Rau silicon carbide ceramic hlab, xkh tuaj yeem kho ntau hom ntawm sab hauv lossis cov tub rog ntev, thiab muab cov txheej txheem polishing, thiab cov txheej txheem tiv thaiv oxidation thiab lwm cov txheej txheem kev kho hauv cov txheej txheem. XKH ntseeg tau tias cov neeg yuav khoom tuaj yeem siv sijhawm tag nrho ntawm cov txiaj ntsig kev ua tau zoo ntawm cov khoom lag luam uas muaj cov khoom lag luam zoo xws li cov semiconductors, LEDs thiab photovoltacs.