Ti/Cu Hlau-Txheej Silicon Wafer (Titanium/Tooj Liab)

Ti/Cu Hlau-Coated Silicon Wafer (Titanium/Tooj Liab) Duab Tshwj Xeeb

Kev Piav Qhia Luv:

Peb liTi/Cu hlau-coated silicon wafersmuaj cov khoom siv silicon zoo (lossis xaiv tau iav / quartz) uas tau coated nrog ibtitanium adhesion txheejthiab ib qhotxheej tooj liab conductivesivtus qauv magnetron sputteringCov txheej Ti interlayer txhim kho qhov kev nplaum thiab kev ruaj khov ntawm cov txheej txheem, thaum cov txheej sab saud Cu muab qhov tsis tshua muaj zog, qhov chaw zoo tagnrho rau kev sib txuas hluav taws xob thiab kev tsim khoom me me.

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Cov yam ntxwv

Daim duab qhia ntxaws ntxaws

Ti/Cu Hlau-Txheej Silicon Wafer (Titanium/Tooj Liab)6

Txheej txheem cej luam

Tsim los rau kev tshawb fawb thiab cov ntawv thov pilot-scale, cov wafers no muaj nyob rau hauv ntau qhov ntau thiab tsawg thiab resistivity ntau yam, nrog kev hloov kho tau yooj yim rau cov tuab, hom substrate, thiab txheej txheem.

Cov Nta Tseem Ceeb

Muaj zog nplaum thiab kev ntseeg siab: Ti bonding txheej ua rau zaj duab xis lo rau Si/SiO₂ thiab txhim kho kev tuav ruaj khov
Qhov chaw ua haujlwm siab: Cu txheej muab kev ua haujlwm hluav taws xob zoo heev rau kev sib cuag thiab cov qauv kuaj
Ntau yam kev hloov kho tau dav: qhov loj ntawm wafer, resistivity, orientation, substrate thickness, thiab film thickness muaj nyob rau ntawm qhov kev thov
Cov khoom siv npaj txhij rau kev ua haujlwm: sib xws nrog cov chaw kuaj mob thiab cov haujlwm ua haujlwm (lithography, electroplating build-up, metrology, thiab lwm yam)
Cov khoom siv muajTsis tas li ntawd xwb, peb kuj muab cov wafers uas muaj Au, Pt, Al, Ni, Ag uas muaj hlau txheej.

Cov Qauv Ib Txwm Muaj & Kev Tso Tawm

Pawg: Substrate + Ti adhesion txheej + Cu txheej txheej
Cov txheej txheem txheemTug: Magnetron sputtering
Cov txheej txheem xaiv tau: Thermal evaporation / Electroplating (rau cov Cu tuab dua)

Cov Khoom Siv Kho Tshuab ntawm Quartz Iav

Khoom	Cov kev xaiv
Qhov loj ntawm cov wafer	2", 4", 6", 8"; 10 × 10 hli; kev cai txiav qhov loj me
Hom kev coj ua	P-hom / N-hom / Intrinsic siab-resistivity (Un)
Kev Taw Qhia	<100>, <111>, thiab lwm yam.
Kev tiv taus	<0.0015 Ω·cm; 1-10 Ω Ω; > 1000-10000 Ω·cm
Thickness (µm)	2": 200/280/400/500; 4": 450/500/525; 6": 625/650/675; 8": 650/700/725/775; kev cai
Cov ntaub ntawv substrate	Silicon; xaiv tau quartz, BF33 iav, thiab lwm yam.
Zaj duab xis tuab	10 nm / 50 nm / 100 nm / 150 nm / 300 nm / 500 nm / 1 µm (kho tau)
Cov kev xaiv zaj duab xis hlau	Ti/Cu; kuj Au, Pt, Al, Ni, Ag muaj

Ti/Cu Hlau-Txheej Silicon Wafer (Titanium/Tooj Liab)4

Cov ntawv thov

Kev sib cuag ohmic & cov khoom siv hluav taws xobrau kev tshawb nrhiav thiab kev txhim kho khoom siv thiab kev kuaj hluav taws xob
Cov txheej noob rau electroplating(RDL, MEMS cov qauv, tuab Cu buildup)
Cov substrates loj hlob ntawm Sol-gel thiab nanomaterialrau kev tshawb fawb txog nano thiab nyias zaj duab xis
Kev Siv Tshuab Microscopy & Kev Ntsuas Qhov Nto(Kev npaj thiab ntsuas cov qauv SEM/AFM/SPM)
Cov nto bio/chemicalxws li cov platform kab lis kev cai ntawm tes, cov protein / DNA microarrays, thiab cov substrates reflectometry

FAQ (Ti / Cu Hlau-Coated Silicon Wafers)

Q1: Vim li cas thiaj siv Ti txheej hauv qab Cu txheej?
A: Titanium ua haujlwm ua ib qhotxheej nplaum (kev sib txuas), txhim kho qhov txuas ntawm tooj liab rau lub substrate thiab txhim kho qhov ruaj khov ntawm interface, uas pab txo qhov tev tawm lossis delamination thaum tuav thiab ua tiav.

Q2: Cov qauv tuab Ti/Cu yog dab tsi?
A: Cov kev sib xyaw ua ke feem ntau suav nrogTi: kaum tawm ntawm nm (piv txwv li, 10–50 nm)thiabCu: 50–300 nmrau cov yeeb yaj kiab sputtered. Cov txheej Cu tuab dua (µm-level) feem ntau ua tiav los ntawmelectroplating rau ntawm ib txheej noob Cu sputtered, nyob ntawm koj daim ntawv thov.

Q3: Koj puas tuaj yeem pleev xim rau ob sab ntawm lub wafer?
A: Yog.Ib sab los yog ob sab txheejmuaj thaum thov. Thov qhia koj qhov xav tau thaum xaj khoom.

Txog Peb

XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.