TVG txheej txheem ntawm quartz sapphire BF33 wafer iav wafer xuas nrig ntaus

Qhov zoo ntawm TGV (Los ntawm iav Via) feem ntau yog tshwm sim hauv:

1) Cov yam ntxwv hluav taws xob ntau zaus zoo heev. Cov khoom siv iav yog cov khoom siv insulator, qhov dielectric tas li tsuas yog kwv yees li 1/3 ntawm cov khoom siv silicon, qhov kev poob qis yog 2-3 qhov kev txiav txim siab qis dua li cov khoom siv silicon, ua rau cov substrate poob thiab cov kab mob parasitic txo qis heev los xyuas kom meej cov khoom siv. kev ncaj ncees ntawm cov teeb liab kis;

(2) Loj loj thiab ultra-nyias iav substrate yog yooj yim kom tau. Peb tuaj yeem muab Sapphire, Quartz, Corning, thiab SCHOTT thiab lwm lub tuam txhab iav tuaj yeem muab qhov loj me (> 2m × 2m) thiab ultra-nyias (<50µm) vaj huam sib luag iav thiab cov khoom siv iav ultra-nyias hloov tau yooj yim.

3) Tus nqi qis. Tau txais txiaj ntsig los ntawm kev nkag tau yooj yim rau cov iav loj loj ultra-nyias vaj huam sib luag, thiab tsis tas yuav tsum muaj cov txheej txheem insulating, cov nqi tsim khoom ntawm iav adapter phaj tsuas yog kwv yees li 1/8 ntawm silicon-based adapter phaj;

4) Cov txheej txheem yooj yim. Tsis tas yuav tso cov txheej txheem insulating rau ntawm qhov chaw substrate thiab sab hauv phab ntsa ntawm TGV (Los ntawm iav Via), thiab tsis tas yuav tsum tau thinning hauv ultra-thin adapter phaj;

(5) Muaj zog mechanical stability. Txawm tias lub thickness ntawm lub phaj adapter yog tsawg dua 100µm, lub warpage tseem me me;

6) Kev siv ntau yam. Ntxiv rau qhov kev cia siab zoo hauv kev ua haujlwm siab, raws li cov khoom siv pob tshab, kuj tuaj yeem siv rau hauv kev sib koom ua ke ntawm optoelectronic system, airtightness thiab corrosion kuj zoo ua rau cov iav substrate hauv MEMS encapsulation muaj peev xwm zoo.

Tam sim no, peb lub tuam txhab muab TGV (Los ntawm iav Via) iav los ntawm lub qhov siv tshuab, tuaj yeem npaj cov khoom xa tuaj thiab muab cov khoom ncaj qha. Peb tuaj yeem muab Sapphire, Quartz, Corning, thiab SCHOTT, BF33 thiab lwm yam iav. Yog tias koj xav tau, koj tuaj yeem tiv tauj peb ncaj qha txhua lub sijhawm! Txais tos nug!