4 nti SiC Wafers 6H Semi-Insulating SiC Substrates prime, kev tshawb fawb, thiab qib dummy

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Semi-insulated silicon carbide substrate yog tsim los ntawm kev txiav, sib tsoo, polishing, tu thiab lwm yam kev siv tshuab tom qab kev loj hlob ntawm semi-insulated silicon carbide siv lead ua. Ib txheej los yog ntau txheej siv lead ua yog loj hlob ntawm cov substrate uas ua tau raws li qhov yuav tsum tau ua zoo li epitaxy, thiab tom qab ntawd cov khoom siv microwave RF yog tsim los ntawm kev sib txuas cov qauv tsim thiab ntim khoom. Muaj li 2inch 3inch 4incgh 6inch 8inch industrial, kev tshawb fawb thiab kev xeem qib semi-insulated silicon carbide ib leeg siv lead ua substrates.

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Product Detail

Khoom cim npe

Khoom Specification

Qib			Zero MPD Qhuav Qib (Z Qib)			Standard Qhuav Qib (P Qib)		Qib Dummy (D qib)
Txoj kab uas hla			99.5mm ~ 100.0 hli
	4 H-SI		500 μm ± 20 μm			500 μm ± 25 μm
Wafer Orientation			Tawm axis: 4.0 ° rau < 1120 > ± 0.5 ° rau 4H-N, Ntawm axis: <0001> ± 0.5 ° rau 4H-SI
	4 H-SI		≤1cm^-2			≤ 5 cm^-2		≤ 15 cm^-2
	4 H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Thawj Txoj Kev Ncaj Ncees		{10-10} ± 5.0°
Qhov Loj Loj Loj		32.5 hli ± 2.0 hli
Secondary Flat Length		18.0mm ± 2.0 hli
Secondary Flat Orientation		Silicon lub ntsej muag: 90 ° CW. los ntawm Prime tiaj tus ± 5.0 °
Ntug Exclusion		3 hli
LTV/TTV/How/Warp		≤ 3 μm / ≤ 5 μm / ≤ 15 μm / ≤ 30 μm						≤ 10 μm / ≤ 15 μm / ≤ 25 μm / ≤ 40 μm
Roughness			C ntsej muag				Polish		Ra≤1nm
			Si face	CMP	Ra≤0.2nm					Ra≤0.5nm
Ntug Cracks Los ntawm High Intensity Light		Tsis muaj						Qhov ntev ≤ 10 mm, ib leeg ntev ≤ 2 mm
Hex Phaj Los Ntawm Lub Teeb Siab Siab		Thaj tsam ≤ 0.05%						Cov cheeb tsam sib sau ≤0.1%
Polytype Areas Los Ntawm Lub Teeb Siab Siab		Tsis muaj						Thaj tsam ≤ 3%
Visual Carbon suav nrog		Thaj tsam ≤ 0.05%						Qhov loj me ≤ 3%
Silicon Surface Scratches Los ntawm High Intensity Light		Tsis muaj						Qhov ntev ntawm qhov ntsuas ≤1 ＊ wafer txoj kab uas hla
Ntug Chips Siab Los Ntawm Kev Siv Lub Teeb		Tsis muaj kev tso cai ≥0.2 hli dav thiab qhov tob						5 tso cai, ≤1mm txhua
Silicon Surface Contamination Los Ntawm Kev Siv Siab		Tsis muaj
Ntim		Multi-wafer Cassette lossis Ib Lub Thawv Wafer