50.8mm 2inch GaN ntawm sapphire Epi-txheej wafer
Daim ntawv thov ntawm gallium nitride GaN epitaxial ntawv
Raws li kev ua haujlwm ntawm gallium nitride, gallium nitride epitaxial chips yog tsim rau lub zog siab, siab zaus, thiab kev siv hluav taws xob tsawg.
Nws yog reflected nyob rau hauv:
1) High bandgap: High bandgap txhim kho qib voltage ntawm gallium nitride cov cuab yeej thiab tuaj yeem tso tawm lub zog ntau dua li cov khoom siv gallium arsenide, uas yog tshwj xeeb tshaj yog haum rau 5G kev sib txuas lus hauv paus chaw nres tsheb, tub rog radar thiab lwm qhov chaw;
2) Kev hloov siab ua haujlwm siab: kev tiv thaiv ntawm gallium nitride hloov hluav taws xob hluav taws xob yog 3 qhov kev txiav txim siab qis dua li ntawm cov khoom siv silicon, uas tuaj yeem txo qhov poob ntawm kev hloov pauv;
3) Cov thermal conductivity: siab thermal conductivity ntawm gallium nitride ua rau nws muaj kev ua tau zoo ntawm cov cua kub dissipation, haum rau kev tsim cov khoom siv hluav taws xob, kub kub thiab lwm yam khoom siv;
4) Kev tawg hluav taws xob muaj zog: Txawm hais tias qhov tawg hluav taws xob hluav taws xob ntawm lub zog ntawm gallium nitride yog ze rau ntawm silicon nitride, vim yog cov txheej txheem semiconductor, cov khoom siv lattice mismatch thiab lwm yam, qhov voltage kam rau ntawm gallium nitride li feem ntau yog txog 1000V, thiab kev nyab xeeb siv voltage feem ntau yog qis dua 650V.
Yam khoom | GaN-TCU-C50 | GaN-TCN-C50 | GaN-TCP-C50 |
Qhov ntev | 50.8mm ± 0.1mm | ||
Thickness | 4.5 ± 0.5 hli | 4.5 ± 0.5 hli | |
Kev taw qhia | C-plane (0001) ± 0.5 ° | ||
Hom kev coj ua | N-hom (Undoped) | N-hom (Si-doped) | P-hom (Mg-doped) |
Kev tiv thaiv (3O0K) | <0.5 Q-cm | <0.05 Q*cm | ~ 10 Q.cm |
Carrier Concentration | <5x1017cm-3 | > 1x1018cm-3 | > 6 x 1016 cm-3 |
Mobility | ~ 300 cm2/Vs | ~ 200 cm2/Vs | ~ 10 cm2/Vs |
Dislocation Ceev | Tsawg dua 5x108cm-2(xws li FWHMs of XRD) | ||
Substrate qauv | GaN ntawm Sapphire (Standard: SSP Option: DSP) | ||
Siv tau qhov chaw | > 90% | ||
Pob | Ntim rau hauv chav kawm 100 huv chav ib puag ncig, hauv cov ntawv ntim ntawm 25pcs lossis ib lub thawv wafer, nyob rau hauv ib qho chaw nitrogen. |
* Lwm cov thickness tuaj yeem kho tau